Tetramethylammonium Hydroxide Research Articles

Determination of tetramethylammonium hydroxide in air using ion chromatography or ultra-performance liquid chromatography - high-resolution mass spectrometry

Tetramethylammonium hydroxide (TMAH) is extensively utilized in the semiconductor and optoelectronic industries, serving as either a developer or an etchant. TMAH possesses acute toxicity and alkaline corrosiveness, having caused several fatal and injurious accidents in Taiwan. However, there is currently a lack of methods available for assessing TMAH exposure. This study developed a method involving sampling with quartz fiber filters followed by ultrasonic agitation in 10 mL mobile phase, filtering, and analysis using either ion chromatography (IC) or ultra-performance liquid chromatography - high-resolution mass spectrometry (UPLC-HRMS). Utilizing the characteristics of HRMS, the compound analyzed was identified as tetramethylammonium ion (TMA+) through mass spectrometry analysis. The method exhibits excellent trapping capacity and recovery rate. The linear range of TMA+ for IC is 0.3 to 100 μg/mL, with a correlation coefficient of R = 0.9998. The linear range of TMA+ for UPLC-HRMS is 0.002 to 1 μg/mL, with a correlation coefficient of R = 0.996. The recovery rates for IC and HRMS were 116.6% and 90.6%, with corresponding coefficient of variation (CV) of 2.25% and 3.53%, respectively. Samples can be stored at room temperature for 28 days. Verification of this method was conducted at the TMAH factory, and the air concentrations measured in the TMAH filling area were 3.29 and 4.75 μg/m3 from IC and UPLC-HRMS, respectively. This method will be applied in the on-site analysis of occupational hazards for operators in chemical plants, technology factories, and recycling plants, aiming to evaluate risk values to protect the safety and health of workers and prevent occupational diseases.

Application of an ozone-activated peroxymonosulfate process to effectively degrade tetramethylammonium hydroxide (TMAH) in semiconductor wastewater

In this study, ozone-activated peroxymonosulfate (O3/PMS) was used to remove tetramethylammonium hydroxide (TMAH) from artificial semiconductor wastewater. The rate constant for the O3/PMS process was approximately 14.4 times higher than that for the process employing only O3. This was attributed to the explosive production of hydroxyl radicals (•OH) in the process, the contribution of which was confirmed using a scavenger test. The degradation efficiencies were the highest at pH 7.0 (1.80 × 10−2 min−1) and 40 °C (2.18 × 10−2 min−1). Alkalinity and humic acid, which are potent scavengers of •OH, significantly reduced the degradation of TMAH. Remarkably, removal efficiencies of 64.4 % for TMAH and 43.7 % for the total organic carbon (TOC) were achieved at a relatively high initial concentration of 100 μM. However, approximately 27 % of the nitrogen was converted to the final byproducts, NH4+ and NO3−, indicating that a considerable number of nitrogen fragments remained as intermediates. Degradation pathways and intermediates were proposed based on the spectrometry data. Given that the toxicity of the demethylated intermediates was roughly 20–30 times lower than that of TMAH, the acute toxicity to A. fischeri was reduced by approximately half (46.4 ± 2.57 %). The results of this study demonstrated the substantial potential of the O3/PMS process for treating wastewater containing TMAH.

The application of unsupervised machine learning for the elucidation of the burial effect of lignin in peatland: Case of TMAH thermochemolysis

Lignin is one of the major components of organic macromolecules in peatland. Analysis of lignin in sediments is considered as a valuable tool for understanding peat vegetation as well as carbon cycle. It provides valuable perspectives on different sides such as occurrence of various vegetation types and the extent of decay in terrestrial organic material. Thermochemolysis technique using tetramethyl ammonium hydroxide (TMAH) was used for lignin analysis, in an ombrotrophic peatland. It specifically breaks of O-aryl bonds followed by methylation of the lignin components yielding phenolic subunits. Several discrepancies exist between TMAH thermochemolysis findings and those obtained from previous investigations with CuO oxidation. This could be explained by the specific pool of aryl ether, specifically targeted by the thermochemolysis, with discarding of C-C bonds. Hence, this would show the capacity of TMAH thermochemolysis to cleave oxidised lignin leaving lignin of fresh and preserved organic matter intact. The TMAH thermochemolysis method's efficiency in molecular characterization and lignin degradation was evaluated using principal component analysis (PCA). PCA reduced dimensionality and redundancy of component contributions, with the first two principal components accounting for 70.33 % of the total variance. PCA has reinforced the selectively of the thermochemolytic approach in targeting O-aryl bonds while maintaining C-C bonding of polyphenolic sub-units. Hence, two distinct oxidation phases: recent (acrotelm and mesotelm) and older (catotelm) have been revealed. PCA was applied to diagenetic and source vegetation proxies, revealing strong agreement among variables which is supported by the use of molecular ratios as indicators of organic matter source and dynamics in a peat core.

Effect of Triton X-100 surfactant and agitation on tetramethylammonium hydroxide wet etching for microneedle fabrication

Solid silicon (Si) microneedles have many applications such as skin pretreatment to form micrometer-sized holes in the skin surface in transdermal drug delivery systems. Wet etching based on tetramethylammonium hydroxide (TMAH) is an efficient method to fabricate solid microneedles. However, it is challenging to increase the density of microneedle arrays due to the faster lateral etching than the vertical etching that requires a large initial mask size. In this work, we used wet etching based on TMAH to fabricate solid Si microneedles. One kind of nonionic surfactant, Triton X-100, was introduced into the TMAH solution to suppress the lateral etching. When Triton X-100 was added into TMAH for a given etching condition, the maximum height (attained right before the mask fell off) of microneedles could reach ∼230 μm for 600 μm square-shaped mask size and 700 μm array period, compared to microneedles of maximum 152 μm height for the same mask size and period without surfactant addition. Correspondingly, when the target heights of microneedles were the same as ∼230 μm, denser (down to 700 μm period, 600 μm mask size) microneedle arrays were achieved with the help of Triton X-100, in comparison to arrays down to 900 μm period (800 μm mask size) without surfactant addition. Furthermore, agitation by a magnetic stirring bar is important for the fabrication of dense solid Si microneedle arrays based on TMAH. The microneedle structures were rhombic pyramid in shape with Triton X-100 and agitation. But microneedle structures obtained with Triton X-100 yet without agitation were octagonal pyramid in shape with a much less steep side surface.

External quantum efficiency enhancement of GaN-based blue LEDs by treating their full-M-sided hexagonal mesa with TMAH solution.

In recent years, III-Nitride-based micro light-emitting diodes (micro-LEDs) have emerged in many fields and gained more attention. However, fabricating high-efficiency micro-LEDs still remains a challenge due to the presence of sidewall damage. In this study, a GaN-based single blue micro-LED with a full-M-sided hexagonal mesa was prepared. The mesa has a circumradius of 10 µm and was treated with a tetramethylammonium hydroxide (TMAH) solution. Experimental results show that the sidewall defects introduced by dry etching damage act as non-radiative recombination centers and greatly impair the performance of the device. By constructing a full-M-sided hexagonal structure and soaking in a TMAH solution, the etching damage on the sidewall can be eliminated to the greatest extent, thereby reducing sidewall defects. In consequence, the peak EQE of the devices treated with the TMAH solution exceeded 10% at low current density, an increase of 9% compared with the untreated samples. This work provides, to our knowledge, a new approach to improving the efficiency of GaN-based micro-LEDs.

Preparation of novel ACMO-AA/PVDF composite membrane by one-step process and its application in removal of heavy metal ions from aqueous solutions

In this study, a simple one-step process was used to fabricate a high-efficiency 4-acryloylmorpholine-acrylic acid/polyvinylidene fluoride (ACMO-AA/PVDF) composite membrane for the adsorption of heavy metal ions. The initiation phase involved the use of the strong organic base tetramethylammonium hydroxide (TMAH) to facilitate the partial dehydrofluorination of PVDF, thereby yielding a reactive CC bond. Following this, undesirable residuals and by-products of TMAH were removed through a thermal treatment process. Subsequently, an ACMO and AA, both possessing distinctive functional groups, onto the active CC bond took place in-situ. The use of a suitable initiator (AIBN) and crosslinking agent (MBA) facilitated the copolymerization process, culminating in the production of the ACMO-AA/PVDF composite membrane with excellent capability for the adsorption of heavy metal ions. Performance evaluations confirmed the membrane high efficiency in Pb2+ removal with complete removal realized at initial Pb2+ concentrations of ≤50 mg·L–1 and presenting a maximum adsorption capacity of 1214.75 mg·g–1, as described by the Langmuir model. In complex environments with co-existing metal ions such as Cu2+, Hg2+, and Cd2+, at an each initial concentration of up to 50 mg·L–1, the membrane exhibited a Pb2+ removal rate of 93.81 %, and Hg2+ and Cu2+ removal rates of 93.75 % and 92.93 %, respectively. The results of surface morphological and microstructural analyses showed that the principal adsorption mechanism is chemical chelation. Furthermore, the membrane exhibited sustainable usability, retaining its structural integrity and adsorption efficacy over multiple regeneration cycles. This indicates that the ACMO-AA/PVDF composite membrane is a viable candidate for deep decontamination processes involving Pb2+, Hg2+, and Cu2+ in environmental remediation applications.

Impacts and effectiveness of sidewall treatment on the spatially resolved optical properties and efficiency enhancement for GaN-based blue and green micro-LEDs

InGaN-based micro-light-emitting diodes (micro-LEDs) are crucial for efficient full-color micro-displays, but suffer from severe degradation of external quantum efficiency (EQE) with size reduction. In this study, the impacts of chemical treatment on the sidewall condition and the EQE of the 10 μm InGaN-based blue and green micro-LEDs were demonstrated. The sidewall treatment can effectively alleviate the residual damage caused by dry etching and suppress the nonradiative recombination, facilitating the achievement of high internal quantum efficiency (IQE). Nevertheless, the sidewall light extraction of the micro-LEDs with smoother sidewall morphology after tetramethylammonium hydroxide (TMAH) treatment is lower than those with rough and prismatic sidewall surface. By utilizing microscopic hyperspectral imaging, the difference in chromatic properties between the inner region and the whole micro-LED caused by dry etching can hinder the stability of chromatic properties of InGaN-based blue micro-LEDs, which can be alleviated by sidewall treatment. The optimal duration for TMAH treatment is obtained as 10 min for both blue and green micro-LEDs, which is the consequence of the compromise between sidewall light extraction efficiency (LEE) and IQE, whereas the improvement of IQE by sidewall treatment for green micro-LEDs is less significant compared to that for blue ones, which can be attributed to the higher dislocation density and recombination via localized states of green InGaN micro-LEDs. This work demonstrates the evolution of IQE and LEE for blue and green micro-LEDs with different sidewall treatment strategies to achieving the ultimate EQE.

Synthesis and characterization of ZnO quantum dot-functionalized mesoporous nanocarriers for controlled drug delivery

In this study, ZnO quantum dots (ZnO@QDs) were synthesized and functionalized with 2nd generation poly amido amine (2GPD) using 3-amino-propyl tri-methoxy silane as the initiator core, facilitated by tetramethylammonium hydroxide (TMAH) to enhance stability against oleate coating. Concurrently, a mesoporous substrate with a unique morphology was developed as a drug reservoir for doxorubicin loading. ZnO quantum dots displayed photoluminescence radiation, with dimensions ranging from 5 to 7 nm and exhibiting spherical morphology. The cubic structure of the synthesized mesoporous nanocatalysts was also confirmed. Brunauer-Emmett-Teller analysis indicated a multidimensional porous structure of the nanocarriers, while zeta potential analysis showed a stable system (approximately −9.6 mV). Fourier transform infrared spectroscopy, X-ray diffraction, and energy dispersive spectroscopy corroborated these findings. Drug release studies demonstrated sustained release under acidic conditions (pH 5.5), with an efficiency of approximately 94 %. These results highlight the potential applications of this nanosystem for controlled drug delivery, underscoring its practical implications in the field of nanotechnology.

Rejection of PFAS and priority co-contaminants in semiconductor fabrication wastewater by nanofiltration membranes

Use of high-pressure membranes is an effective means for removal of per-and polyfluoroalkyl substances (PFAS) that is less sensitive than adsorption processes to variable water quality and specific PFAS structure. This study evaluated the use of nanofiltration (NF) membranes for the removal of PFAS and industry relevant co-contaminants in semiconductor fabrication (fab) wastewater. Initial experiments using a flat sheet filtration cell determined that the NF90 (tight NF) membrane provided superior performance compared to the NF270 (loose NF) membrane, with NF90 rejection values exceeding 97 % for all PFAS evaluated, including the ultrashort trifluoromethane sulfonic acid (TFMS). Cationic fab co-contaminants diaryliodonium (DIA), triphenylsulfonium (TPS), and tetramethylammonium hydroxide (TMAH) were not as highly rejected as anionic PFAS likely due to electrostatic effects. A spiral wound NF90 module was then used in a pilot system to treat a lab solution containing PFAS and co-contaminants and fab wastewater effluent. Treatment of the fab wastewater, containing high concentrations of perfluorocarboxylic acids (PFCAs), including trifluoroacetic acid (TFA: 96,413 ng/L), perfluoropropanoic acid (PFPrA: 11,796 ng/L), and perfluorobutanoic acid (PFBA: 504 ng/L), resulted in ≥92 % rejection of all PFAS while achieving 90 % water recovery in a semi-batch configuration. These findings demonstrate nanofiltration as a promising technology option for incorporation in treatment trains targeting PFAS removal from wastewater matrices.

Dissolution dynamics of partially protected poly(4-hydroxystyrene) in organic developers investigated by a quartz crystal microbalance (QCM) method

Poly(4-hydroxystyrene) (PHS) molecules in solid films are connected to each other through polar and nonpolar molecular interaction and hydrogen bonds. Although the dissociation of phenolic hydroxyl groups plays a major role in the dissolution of PHS films in tetramethylammonium hydroxide (TMAH) aqueous developer, it is important to clarify the effects of other interactions. In this study, we investigated the dissolution dynamics of partially protected PHS in organic developer by a quartz crystal microbalance method to deepen the fundamental understanding of the dissolution dynamics of chemically amplified resists. The dissolution dynamics in the solvents, in which the phenolic hydroxyl groups are hardly dissociated, was measured. In a 50 vol% methanol aqueous developer, a large swelling was observed. By decreasing the polarity of the developer, the dissolution dynamics was significantly changed. In the hexyl acetate, the dissolution kinetics of PHS films became similar to that in TMAH aqueous developer although the dissolution mechanism is different.

Dissolution dynamics of poly(4-hydroxystyrene) partially protected with t-butoxycarbonyl group in alkyltrimethylammonium hydroxide aqueous developers

Novel developers with low biotoxicity have attracted considerable attention with respect to ensuring environmental sustainability. In this study, the dissolution dynamics of poly(4-hydroxylstyrene) (PHS) partially protected with a t-butoxycarbonyl (t-Boc) group in alkyltrimethylammonium hydroxide and tetraethylammonium hydroxide aqueous solutions (0.26 N) were investigated by the quartz crystal microbalance method. One of the methyl groups of tetramethylammonium hydroxide (TMAH) was substituted by ethyl, propyl, and butyl groups. Depending on the developer used, the dissolution dynamics of PHS and t-Boc-protected PHS (t-Boc PHS) films showed different tendencies. The dissolution rate of PHS was higher in the TMAH developer than in the butyltrimethylammonium hydroxide (B-TMAH) developer, whereas that of the t-Boc PHS (30 mol%-protected) film was higher in the B-TMAH developer than in the TMAH developer. The elongation of one of the alkyl chains is beneficial for the penetration of the developer and the separation of nonpolar molecular interactions among t-Boc PHS molecules.

Characteristics of Exposure to High-Risk Substances in the Electronics Industry Using the Work Environment Survey and Work Environment Measurement Database (2018~2022) in South Korea -Dichloromethane, Trichloromethane, and Tetramethylammonium Hydroxide-

Characteristics of Exposure to High-Risk Substances in the Electronics Industry Using the Work Environment Survey and Work Environment Measurement Database (2018~2022) in South Korea -Dichloromethane, Trichloromethane, and Tetramethylammonium Hydroxide-

Comparative analysis of microstructure, electrical and optical performance in sidewall etching process for GaN-based green micro-LED

Micro-LEDs show the size-dependent external quantum efficiency (EQE) reduction problem, mainly owing to increased non-radiative recombination loss at the sidewall for smaller chip size. In this work, the evolution of microstructure, surface potential and optical performance of the green micro-LED sidewall was investigated comparatively after inductively coupled plasma (ICP) and tetramethylammonium hydroxide (TMAH) etching through transmission electron microscopy (TEM), Kelvin probe force microscope (KPFM), cathodoluminescence (CL) and time-resolved photoluminescence (TRPL). As confirmed by TEM and geometric phase analysis (GPA), ICP etching causes sidewalls to form atomically rough semi-polar surfaces and increases 25% compressive strain at the sidewall compared to the inside. TMAH solution introduces new sidewall defects due to excessive etching of three atomic layers of InGaN. Holes accumulate at the surface because of build-in electric field as showed by KPFM. The sidewall defects lead to a decrease in carrier lifetime resulting in uneven luminescence of micro-LED mesa. TMAH treatment removes the damaged layer and reduces the non-radiative recombination rate. ICP causes damage to the nanoscale structure, however the influence of sidewall defects on the carrier behavior is in the micron range due to unavoidable surface dangling bonds and surface lattice relaxation. A non-radiative recombination mechanism is proposed based on strain relaxation.

Removal of tetramethylammonium hydroxide (TMAH) by cold plasma treatment combined with periodate oxidation: Degradation, kinetics, and toxicity study

Tetramethylammonium hydroxide (TMAH), which is a chemical used in the electronic industry, is classified as a hazardous material (HAZMAT class 8) that threatens aquatic ecosystems and human health. Consequently, numerous studies have attempted to remove TMAH using various treatment methods, including advanced oxidation processes such as ozone, UV, or Fenton oxidation. However, prior research has indicated a low kinetic rate of TMAH removal. In this context, we proposed an alternative to TMAH degradation by combining a cold plasma (CP) process with periodate oxidation. As for the kinetics of TMAH removal, the kinetic constant was improved by 5 times (0.1661 and 0.0301 for 40.56 and 2.2 W, respectively) as the electric power of a CP system increased from 2.2 to 40.56 W. The kinetic constant of a 40.56 W CP system further increased by 54 times (1.6250) than a 2 W CP system when 4 mM periodate was used simultaneously. As a result, the integrated CP/periodate system represented 2 times higher TMAH removal efficiency (29.5%) than a 2 W CP system (14.4%). This excellent TMAH degradation capability of the integrated CP/periodate system became pronounced at pH 10 and 25 °C. Overall, the integrated CP/periodate system is expected to be a viable management option for effectively controlling hazardous TMAH chemicals.

Anaerobic biodegradation enables zero liquid discharge of two-stage nanofiltration system for microelectronic wastewater treatment

Nanofiltration (NF) is a promising technology in the treatment of microelectronic wastewater. However, the treatment of concentrate derived from NF system remains a substantial technical challenge, impeding the achievement of the zero liquid discharge (ZLD) goal in microelectronic wastewater industries. Herein, a ZLD system, coupling a two-stage NF technology with anaerobic biotechnology was proposed for the treatment of tetramethylammonium hydroxide (TMAH)-contained microelectronic wastewater. The two-stage NF system exhibited favorable efficacy in the removal of conductivity (96 %), total organic carbon (TOC, 90 %), and TMAH (96 %) from microelectronic wastewater. The membrane fouling of this system was dominated by organic fouling, with the second stage NF membrane experiencing a more serious fouling compared to the first stage membrane. The anaerobic biotechnology achieved a near-complete removal of TMAH and an 80 % reduction in TOC for the first stage NF concentrate. Methyloversatilis was the key genus involved in the anaerobic treatment of the microelectronic wastewater concentrate. Specific genes, including dmd-tmd, mtbA, mttB and mttC were identified as significant players in mediating the dehydrogenase and methyl transfer pathways during the process of TMAH biodegradation. This study highlights the potential of anaerobic biodegradation to achieve ZLD in the treatment of TMAH-contained microelectronic wastewater by NF system.

Annealing Process on Metal–Oxide–Semiconductor Channel Properties for Quasivertical GaN‐on‐Sapphire Trench Metal–Oxide–Semiconductor Field‐Effect Transistor

Quasivertical gallium nitride trench‐gate metal–oxide–semiconductor field‐effect transistors with different etch radio frequency power and the impact of the order of annealing process in tetramethylammonium hydroxide wet treatment have been fabricated and studied. The high‐power device has a threshold voltage of 5.3 V and a maximum saturation current density of 552 A cm−2, whereas the low‐power device has a threshold voltage of 4.5 V and a maximum saturation current density of 650 A cm−2. However, the low‐power device has more severe off‐state leakage due to more fixed charges and defects on the device surface. Furthermore, the annealing process serves as an additional step before wet treatment. Scanning electron mircoscope image indicates that annealing at high temperatures prior to etching can eliminate surface oxide and redistribute surface imperfections, resulting in a smoother sidewall morphology. The relationship between temperature and mobility confirms the impact of the crystal surface feature on device performance.

Hydroxide-Derived Nanostructures: Scalable Synthesis, Characterization, Properties, and Potential Applications.

Metal oxide nanostructures have received an increasing attention owing to their unique chemical and physical properties along with their widespread applications in various fields. This article provides an overview of the recent discovery - christened Hydroxides-Derived Nanostructures, or HDNs - in which hydroxide aqueous solutions (mostly tetramethylammonium hydroxide, TMAH) are reacted at temperatures < 100°C and under atmospheric pressure with various metal-containing precursors to scalably prepare novel metal oxide nanostructures. In one case, a dozen commercial and earth abundant Ti-containing powders such as binary carbides, nitrides, borides, among others, are converted into new, 1D TiO2-based lepidocrocite (1DL) nanofilaments (NFs). Application-wise, the 1DLs show outstanding performance in a number of energy, environmental, and biomedical fields such as photo- and electrocatalysis, water splitting, lithium-sulfur and lithium-ion batteries, water purification, dye degradation, cancer therapy, and polymer composites. In addition to 1DL, the HDNs family encompasses other metal oxides nanostructures including magnetic Fe3O4 nanoparticles and MnO2 birnessite-based crystalline 2D flakes. The latter showed promise in electrochemical energy conversion and storage applications. The developed recipe provides a new vista in the molecular self-assembly synthesis of nanomaterials that can advance the field with a library of novel nanostructures with substantial implications in a multitude of fields.

Deep eutectic solvent (TMAH·5H2O/Urea) with low viscosity for cellulose dissolution at room temperature

A deep eutectic solvent (DES) formulated with tetramethylammonium hydroxide pentahydrate /urea (TMAH·5H2O/Urea) was designed for the first time to dissolve cellulose at room temperature. The optimized system, characterized by a 1:3 M ratio, demonstrates the capability to dissolve approximately 7.5 wt% cellulose, boasting a high degree of polymerization (DP = 526). Notably, both the pure DES and 4.0 wt% cellulose/TMAH·5H2O/Urea mixtures manifests low viscosity, establishing its potential as an effective spinning aid in fiber manufacturing. The structural analyses shows that the cellulose crystal type shifts from type I to type II form, accompanied by a reduction in both crystallinity and DP. A pivotal aspect of this research involves determining Kamlet-Taft parameters for TMAH·5H2O/Urea-DES with different molar ratios. The results reveal these solvate DESs exhibit the high hydrogen bond basicity, which enables them to easily form hydrogen bonds with hydroxyl groups of cellulose and demonstrate good cellulose solubility. In conclusion, this solvent system presents notable advantages, including straightforward synthesis procedures, low viscosity, and well cellulose solubility, paving the way for new approaches and techniques in cellulose utilization.

Hydroxide Ion Conduction through Viologen-Based Covalent Organic Frameworks (vCOFs): An Approach toward the Advancement.

Alkaline fuel cells rely on the movement of hydroxide anions (OH-) for their operation, yet these anions face challenges in efficient conduction due to their limited diffusion coefficient and substantial mass compared to proton (H+) transport. Within the covalent organic framework structure, ordered channels offer a promising solution for the OH- ion transport. Herein, we synthesized a cationic covalent organic framework (vTAPA) via the solvothermal-assisted Zincke reaction. vTAPA showcases excellent stability in harsh basic solution (12 M) and a wide range of pH. This framework facilitates OH- conduction through its one-dimensional network through the anion exchange process. We employed various tertiary ammonium salts (tetramethyl, tetraethyl, and tetrabutyl ammonium hydroxide) to exchange trapped anionic chloride ions inside the vTAPA structure with OH- ions. The density functional theory (DFT) study exhibited that the anion exchange process is very favorable, as the vTAPA framework offers preferable interaction sites for OH- ions. The impact of steric hindrance from these tertiary ammonium salts on the OH- conduction performance was extensively investigated. Butyl@vTAPA exhibited a high OH- ion conductivity of 1.05 × 10-4 S cm-1 at 90 °C under 98% relative humidity (RH). Our uniquely designed cationic covalent organic frameworks (COF) created a platform for a preferential transport network of hydroxide ions, and this is the first report of directly used COFs for hydroxide ion conduction without any vigorous postsynthetic modification.

Enhancement of device performance in β-Ga2O3 Schottky barrier diodes with tetramethylammonium hydroxide treatment

Schottky barrier diodes were fabricated on tetramethylammonium hydroxide (TMAH)-treated β-Ga2O3 surfaces with Ni/Au as Schottky metal contacts. TMAH wet surface treatment efficiently reduced the roughness of the β-Ga2O3 surface. An X-ray photoelectron emission analysis of the TMAH-treated β-Ga2O3 surface chemical binding features indicates the effective removal of unwanted surface oxides and contaminants formed unintentionally by chemisorption during exposure to ambient conditions. The TMAH-treated Au/Ni/β-Ga2O3 Schottky diode displayed improved rectification behavior with an increment of barrier height by 0.30 eV compared to the untreated diode. The breakdown voltages (Vbr) for the untreated and TMAH-treated Au/Ni/β-Ga2O3 Schottky barrier diode are 298 and 358 V, respectively. The decrease in the turn-on resistance (Ron) in the Au/Ni/β-Ga2O3 Schottky barrier diode by TMAH treatment can be ascribed to the improved surface morphology. The improved electrical behavior of the Au/Ni/β-Ga2O3 Schottky barrier diode formed on the TMAH-treated β-Ga2O3 surface can be accredited to the oxygen vacancies reduction, that deceased the carrier concentration in the β-Ga2O3 epilayer and to the improved the surface morphology. These results demonstrate the effectiveness of TMAH wet surface treatment on β-Ga2O3 and its potential as a simple method for fabricating β-Ga2O3-based devices with improved performance.