Polycrystalline specimens of copper oxide superconductors YBa2Cu3O7-δ(YBCO), Y0.39Sm0.30Eu0.31Ba2Cu3O7-δ(ME-REBCO), Y0.18La0.24Nd0.14Sm0.14Eu0.15Gd0.15Ba2Cu3O7-δ (HE-REBCO) were irradiated with 1 MeV-He ions at room temperature. Magnetization measurement using superconducting quantum interference device (SQUID) and microstructure observation using transmission electron microscope (TEM) were conducted before and after irradiation. The improvement of properties in HE-REBCO and degradations in YBCO, ME-REBCO were suggested by SQUID measurement. HE-REBCO had smaller irradiation defects and volume fractions although disappearance of twin boundaries due to tetragonal transition occurred in peak-damage area as well as YBCO. These defects work as optimal flux pinning centers leading to improve properties in HEREBCO.