Nanoporous carbonaceous materials derived from polysiloxane were first prepared by pyrolysis at 1300°C followed with hydrofluoric acid (HF) etching treatment. Their thermal stability of pore structure in inert condition was investigated in this paper by nitrogen adsorption technique in detail. The specific surface area (SSA) and pore volume (total pore volume, micropore volume, mesopore volume) decreased continually in the heat-treatment temperature range of 1000~1400°C. The average pore size almost kept the same with the raw sample. However, when the temperature exceeded 1400°C, the micropore interconnection began transforming to mesopore structure, which led to the decline of SSA and the increase of average pore size. Furthermore, the pore size distributions (PSDs) curves showed that heat-treatment had an advantage on the transition process of pore structure from disorder to regularity to some extent when heat-treated in the range 1000~1400°C for the most possible reason of relief of residue strain in the carbonaceous materials.