The basic features of mass resolved ion (back-)scattering spectrometry (MARISS) at target-to-projectile mass ratios μ near unity have been explored using a quadrupole based secondary ion mass spectrometer with a simple (biased) energy analyzer. Sputter cleaned targets of Mg, Al, Si, Ti, Nb and Mo were bombarded at near-normal incidence with isotopically pure beams of Ne +, Ar + and Kr +, at impact energies E i between 1.5 and 10 keV. Positively charged scattered ions as well as secondary ions, with final energies E f and charge states n = 1 and 2, were energy analysed by ramping the target bias. The energy spectra showed narrow binary scattering surface peaks (full width at half maximum 15–28 eV) with shoulders or tails on the low and the high-energy side (due to subsurface scattering and double or multiple scattering, respectively). The peak-to-“background” ratio was significantly different for the projectile-target combinations studied (as high as 40–80 for Ne Al,Si and Kr Nb ; only 2–4 for Ne Mg and Ar Ti ). The fractional sca E f E i ranged from as low as 1.9 × 10 −3 to 3.7 × 10 −2 (1.08 ≤ μ ≤ 1.4). Mass analysis was indispensable for removing interference with secondary i All binary scattering events appear to be associated with inelastic energy losses Q. Assuming Q = 45 eV for scattering of Ne + from Mg, Al and Si, the true scattering angle θ has been determined as a function of the scattering energy (124 ≤ θ ≤ 139°). For scattering of 3–9 keV Ar + from Ti and 10 keV Kr + from Nb, Q was found to be ∼ 90 and ∼ 250 eV, respectively. Using four different Kr isotopes the characteristic velocity for neutralization of Kr + escaping from Nb (1.5 × 10 6 cm/s) could be determined without knowing the scattering cross section. Relatively high yields of Ne 2+ were recorded in scattering from Mg, Al and Si (up to 10% of the Ne + yield), with no shoulders on the low-energy side of the single scattering peaks ( Q ≈ 120 eV). Ionization of reemitted inert gases by two-particle gas-phase interaction has also been observed.
Read full abstract