One-bit hybrid phase shifters with two different circuit topologies were developed for 2.5 GHz operation. They were realized by combining micro-electro-mechanical-systems (MEMS) shunt switch chips with delay lines formed on a printed circuit board (PCB). An equivalent circuit model of an assembled switch chip on a PCB with bonding wires was investigated in advance, and it was fully reflected on the phase shifters design. Through this approach, excellent design accuracy was achieved in MEMS hybrid phase shifters. The loaded-line phase shifter exhibited a very low insertion loss of 1.02 dB (maximum) with a 41.3° phase shift. From the switched-line phase shifter, a low insertion loss of 1.82 dB (maximum) was obtained with a 91.3° phase shift.