Abstract The flux of particles emitted from a solid surface under electronic sputtering conditions induced by irradiation with Swift Heavy Ions (SHI) was investigated using time-of-flight mass spectrometry in connection with laser post-ionization. While secondary ions emitted from the irradiated surface were directly detected using a reflectron ToF spectrometer, the corresponding neutral particles were post-ionized after their emission using single photon ionization in a pulsed VUV laser beam. The ToF spectrometer was operated in delayed extraction mode, thereby ensuring that secondary ions and post-ionized neutrals were detected under otherwise identical experimental conditions. For comparison with a purely nuclear sputtering process, spectra taken under irradiation with 4.8 MeV/u 197Au26+ and 48Ca10+ ions were compared to those measured in situ under bombardment with 5 keV Ar+ ions. Most importantly, we find that in most cases the vast majority of the sputtered material is emitted in the neutral state, with the flux of sputtered particles mainly consisting of single atoms and small (mostly diatomic) clusters. For metallic targets, we find a significant electronic sputtering effect for In and Bi, while other metals like Mo or Ag do not appear to sputter very efficiently under SHI irradiation. As an example for a semiconductor target, (amorphous) Ge is found to exhibit a large electronic sputtering yield under irradiation with Au projectiles, while practically no effect is observed with the Ca ions, thereby clearly indicating a stopping power threshold for this material. KBr as an example for an ionic crystal exhibits the expected large yield, with the sputtered material mainly consisting of atomic species and neutral KBr and K2Br clusters. We find about equal signals of neutral and ionized K atoms and K2Br clusters, while KBr is exclusively detected as a neutral molecule. Besides these major species, we find a progression of [KBr]nK+ and – with much smaller intensity – [KBr]nBr− clusters, which exhibits a similar size distribution as observed by others for [LiF]nLi+ clusters emitted from LiF. Interestingly, no negative halogen ions are observed under SHI irradiation, while they are clearly detected under nuclear sputtering conditions with similar intensity as the corresponding positive alkali ions.
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