Microlens Array Surface Research Articles

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays.

Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this study, a mask-moving-projection-lithography-based high-precision surface fabrication method for microlens arrays is proposed, which effectively reduces the surface shape errors and surface roughness of microlens arrays. The pre-exposure technology is used to reduce the development threshold of the photoresist, thus eliminating the impact of the exposure threshold on the surface shape of the microlens. After development, the inverted air bath reflux method is used to bring the microlens array surface to a molten state, effectively eliminating surface protrusions. Experimental results show that the microlens arrays fabricated using this method had a root mean square error of less than 2.8%, and their surface roughness could reach the nanometer level, which effectively improves the fabrication precision for microlens arrays.

Effect of rapid thermal annealing on the surface properties of the microlens arrays machined on monocrystalline silicon

Microstructure arrays, such as microlens arrays, play a significant role in optical systems, biomedical imaging, and telecommunications. However, the machining-induced subsurface defects deteriorate their performance and functionality. To address this issue, this study proposes a rapid thermal annealing method to heal the subsurface defects using different temperatures ranging from 200 °C to 1000 °C in a vacuum. Firstly, the ultra-precision diamond sculpturing process is employed to machine the high-quality microlens array on the monocrystalline silicon surface. Then, the effects of the rapid thermal annealing on the microlens array surface, such as surface roughness and subsurface defect, are comprehensively investigated. Experimental results show that the annealing temperature of >600 °C contributes to the decrease in surface roughness and subsurface defect. Furthermore, to reveal the healing mechanism, a molecular dynamics simulation of rapid thermal annealing is performed by controlling the bulk temperature of machined monocrystalline silicon from 500 K to 1300 K. The simulation results show that recrystallization always occurred on the interface between the amorphous layer and monocrystalline silicon substrate and the healing mechanism should be solid phase epitaxy rather than random nucleation. The research findings would contribute to fabricating the defect-free optical lens in the industry.

Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm

We present a technique for measuring the microlens radius of curvature (ROC). The technique is based on the principle of three-dimensional (3-D) surface topography using a white light interference microscope. By measuring 3-D point clouds of the surface combined with fitting the measured data to an ideal sphere, the radius of the surface is determined. We take advantage of the fast speed of the maximum intensity method and the anti-interference capability of the fitting method of fringe analysis techniques in white-light interferometry to measure the 3-D topography of the microlens array surface. To measure each microlens’s ROC, we use the fast geometric fit algorithm for sphere where the input data are the spherical surface point cloud. We have built a white light interference microscope and experimentally measured the geometric parameter and the surface curvature of some microlens of a commercial microlens array. Our measurement results of the ROC, the surface height, and the diameter of microlens showed a good agreement with the results obtained using the Alpha-Step D-500 stylus profiler and the values reported by the manufacturer, indicating the applicability of this technique.

Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA); however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting process. In this paper, the formation mechanism of the brittle fracture is studied via a series of experiments including the slow tool servo (STS) cutting experiment of MLA, surface scratching experiment and sudden-stop cutting experiment. The effects of undeformed chip thickness, feed rate, and machining track on brittle fracture formation are investigated in detail. In addition, based on the fracture formation mechanism, a bi-directional cutting approach is proposed to eliminate the regional brittle fracture of the microlens during diamond cutting. An experiment was then conducted to verify the method; the results demonstrated that bi-directional cutting could eliminate brittle fracture entirely. Finally, a spherical MLA with the form error (vPV) of 60 nm and the surface roughness (Ra) of 8 nm was successfully fabricated.

A technique for a nano-textured gapless microlens array using self-formation characteristics of anodic alumina.

This paper presents a method to utilize the growth properties of anodic alumina possessing self-formation characteristics to fabricate a nano-textured microstructure and also introduces an application technique of the proposed method. The growth rate of anodic alumina, fabricated on aluminum surfaces, has a strong dependence on the intensity of the applied current density or electric field. The uniformity of the thickness of anodic alumina is determined by its electrical distribution characteristics. Accordingly, microscale structures can be fabricated using the growth rate deviation of anodic alumina. A patterned insulative layer is an important factor that determines the current density distribution property of a local region. A computational analysis and a verification experiment can verify this characteristic through the correlation between structural dimensional conditions and a cross-section of the fabricated anodic alumina. The anodic alumina fabricated by the verification experiment in this study had a swollen shape and a nano & micro complex structure, in which a nanoscale base pattern was formed on all bottom surface due to the process characteristics. Based on the advantages of the proposed process, evidenced by the reliability evaluation results, gapless microlens array (MLA) replication molds with nanostructured surfaces were fabricated to verify the applicability of the proposed technique to other fields. A patterned insulative layer with a cylindrical cavity and dimensional conditions was designed to induce the fabrication of lens-shaped anodic alumina. The anodic alumina fabricated by the long process was selectively etched out, and an additional process was conducted to fabricate a nanoporous structure having controlled dimensional conditions on the engraved gapless MLA surface. The textured aluminum surface was used as a replication mold for the imprinting process. The analysis of the fabrication results showed that the gapless MLA surface had a nanopillar structure. In addition, we investigated the reflection characteristics of the fabricated gapless N-MLA structure according to the incident light and verified the low reflectance of the gapless microlens. The results of this study affirmed that the proposed technique is applicable to various fields including those concerning optical devices.

Fluid jet-array parallel machining of optical microstructure array surfaces.

Optical microstructure array surfaces such as micro-lens array surface, micro-groove array surface etc., are being used in more and more optical products, depending on its ability to produce a unique or particular performance. The geometrical complexity of the optical microstructures array surfaces makes them difficult to be fabricated. In this paper, a novel method named fluid jet-array parallel machining (FJAPM) is proposed to provide a new way to generate the microstructure array surfaces with high productivity. In this process, an array of abrasive water jets is pumped out of a nozzle, and each fluid jet simultaneously impinges the target surface to implement material removal independently. The jet-array nozzle was optimally designed firstly to diminish the effect of jet interference based on the experimental investigation on the 2-Jet nozzles with different jet intervals. The material removal and surface generation models were built and validated through the comparison of simulation and experimental results of the generation of several kinds of microstructure array surfaces. Following that, the effect of some factors in the process was discussed, including the fluid pressure, nozzle geometry, tool path, and dwell time. The experimental results and analysis prove that FJAPM process is an effective way to fabricate the optical microstructure array surface together with high productivity.

Fabrication of Micro-Lens Array Obtained by Anisotropic Wet Etching of Silicon

This paper presents the fabrication of a micro-lens array surface with a single-mask process and two etching steps with KOH water solution. Numerical analysis of optics was used to determine the optimal design parameters such as curvature sagitta and radius. The dimension of each lens is 20μm x 20μm. We used anisotropic etching of <100> silicon through a circular and squar mask to produce a pyramidal pit formed by four (111) planes. The oxide mask is stripped and the immersion of the sample in the etchant solution favors the etching of (411) plane transforming the pit into a smooth hemispherical cavity. An intermediate stage exists when a wider 19.470 <411> - face pyramid replaces the initial 54.740 inverted pyramid. The dependence of surface roughness on concentration and temperature of KOH is investigated in the range of 25%-40% and 60°C-80°C, respectively, and compared between them. The surface profiles and roughness was characterized by AFM. The etching depth and radius of micro-lens array was obtained from the SEM images and AFM data. Also, the array of concave depressions was directly used as a mould for replication of KER-2500 transparent polymeric silicon from Shin-Etsu with a refractive index n=1.41. The perfectly matched array of micro-lenses can be detached from substrate and used as a local solar concentrator. Optical properties such as the focal length of the plano-convex micro-lens array, obtained by replication, are measured and analyzed.

Data Fusion Strategy for Multiscale Surface Measurements

Interdisciplinary research efforts have started focusing on the development of multiscale models and development of designer multiscale surfaces exhibiting specific properties at different scales for a specific purpose. With the rapid evolution of these new engineered surfaces for microelectromechanical systems (MEMS), microfluidics, etc., there is a strong need for developing tools to measure and characterize these surfaces at different scales. In order to obtain all meaningful details of the surface at various required scales, one is left with the only option of measuring the surface using multiple technologies using a combination of instruments. The majority of hardware-based approaches focus on the development of systems housing multiple technologies/capabilities into a single frame. These systems enable the user to obtain different surface maps using various technologies, but the user does not readily have the ability to combine all the obtained data into one single dataset. The effective approach toward multiscale measurement and characterization would be to use the individual measurement tools and finding a method to relate the individual coordinate systems and use an offline virtual tool to unify, manipulate, segment, merge, and retrieve data. Shape primitives and focus-based fusion strategies cannot be used as every data point in the data sets under consideration has to be treated as essentially at optimal focus. A multiscale data fusion strategy results in edge effects on nonplanar and high aspect ratio surfaces. An optimized fusion strategy, the “FWR method,” for the surface metrology domain is proposed where the subimages obtained from discrete wavelet frame (DWF) were separated into three regimes—form, waviness, and roughness—and fusion was not performed on subimages in the form regime. This approach effectively eliminates the edge effects. Individual data-point-level fusion was successfully demonstrated on Fresnel microlens array surface data as a case study of a nondirectional engineered surface with high aspect ratio.

An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

PurposeThe purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array.Design/methodology/approachThe system set‐up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre‐processing with a precision of less than 0.09 micron.FindingsBy integrating with the genetic algorithm, the XY‐Table shortest moving path of the system is calculated to achieve the purpose of high‐speed inspection and automatic microlens array surface profile measurement.Originality/valueThe measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.

Adhesion Force Change by Electrowetting on a Polymer Microlens Array

In addition to contact angle changes, adhesion force changes by electrowetting on a polymer microlens are reported in this paper. A flexible poly(dimethylsiloxane) (PDMS) microlens array was fabricated with an embedded Cr/Au double-layered electrode and a dielectric layer of parylene and Teflon. On microlens structures with a Teflon layer, a deionized water droplet on the microlens array surface shows a high contact angle of 137° before electrowetting. The contact angle is decreased to 63° by electrowetting with an external bias of 250 V. The electrowetting process carried out on the microlens array also enhances the adhesion force between the water droplet and the microlens array. This change in the adhesion force after electrowetting is demonstrated by a water droplet that hangs upside down on the fabricated microlens array. From the computed work of adhesion, it is shown that a larger difference in the adhesion force by electrowetting can be achieved on the fabricated microlens array than on a flat Teflon surface.

Study of field intensity distribution of laser beam propagating through a micro-lens array

The propagation of a laser beam through a micro-lens array (MLA) was simulated using Finite Time Difference Domain (FDTD) method. The intensity distribution at different output planes away from the micro-lens array surface was investigated. As compared to the focal plane, the intensity distribution observed at those out-of-focus planes varies, which is attributed to the interference and diffraction of output laser beams. The simulated results were counter checked by placing a physical MLA under an illumination of a 488 nm continuous wave Argon Ion laser and images were captured for different output planes. Both simulation and experimental results show a great similarity in terms of the distribution patterns. By changing the lens sag height with respect to the lens diameter, the full width at half maximum (FWHM) of the focused laser spot and its corresponding maximum energy flux were analyzed. A FWHM of 160 nm can be achieved by proper selection of lens sag height. It is also found that the energy flux is proportional to numerical aperture (NA).

Lens Sag Measurement of Microlens Array Using Optical Interferometric Microscope

This study attempted to develop a detection system for lens sag of the microlens array in real time using an optical automatic inspection framework to link with the computer through a camera. An image processing technique was applied to detect the spherical microlens array, and then, the results were compared. The system light source used laser light and applied CCD to collocate with the microscope array to form an automatic optical detection system for an optical interferometric microscope. It applied the principle of the Fizeau interferometer, illuminated the surface of microlens array, and formed the phase difference required by the interference of two lights through the laser light reflected by the reference plane and the surface of the microlens array, thus, forming an interference fringe. When the sag of the microlens was much longer than the wave length of the detection light source, the fringe would be densely distributed, thus, only a few central fringes were clear in the microscopic image. An image processing method was used to search the center of the interference fringe and a creative algorithm was utilized to obtain the lens sag of the microlens. As proved by the experiment, lens sag of 4 microlens arrays were detected in real time, with a minimum detection error of 0.08 μm, and a maximum detection error of 4 μm (error value 1 ~ 9%), according to different sample processes. This system featured a simple structure and is applicable to non-contact detection and detection of different-sized microlens arrays.

An automatic evaluation method for the surface profile of a microlens array using an optical interferometric microscope

In this paper, an automatic evaluation method for the surface profile of a microlens array using an optical interferometric microscope is presented. For inspecting the microlens array, an XY-table is used to position it. With a He–Ne laser beam and optical fiber as a probing light, the measured image is sent to the computer to analyze the surface profile. By binary image slicing and area recognition, this study located the center of each ring and determined the substrate of the microlens array image through the background of the entire microlens array interference image. The maximum and minimum values of every segment brightness curve were determined corresponding to the change in the segment phase angle from 0° to 180°. According to the ratio of the actual ring area and the ideal ring area, the area ratio method was adopted to find the phase-angle variation of the interference ring. Based on the ratio of actual ring brightness and the ideal ring brightness, the brightness ratio method was used to determine the phase-angle variation of the interference ring fringe. The area ratio method and brightness ratio method are interchangeable in precisely determining the phase angles of the innermost and outermost rings of the interference fringe and obtaining different microlens surface altitudes of respective pixels in the segment, to greatly increase the microlens array surface profile inspection accuracy and quality.

Electrowetting on a Polymer Microlens Array

This paper reports on the electrowetting behavior of a flexible poly(dimethylsiloxane) (PDMS) microlens array. A Cr and Au double-layered electrode was formed on an array of microlenses with diameters of 10 microm and heights of 13 microm. A deposition of parylene and a coating of Teflon were followed for electrical insulation as well as for enhancement of the hydrophobicity. On the nearly superhydrophobic microlens array surface, the electrowetting of a deionized water droplet was observed over the contact angle range of approximately 140 degrees to approximately 58 degrees by applying 0-200 V, respectively. The electrowetting phenomenon was reversible even in air environment with applied voltages of less than 100 V. The electrowetting on the microlens array surface lost its reversibility after the microlens array surface was completely wetted when the water meniscus touched the bottom of the microlens array. Analysis of meniscus shapes and net force direction follows to elucidate the reversibility. The convex curvature of the microlens caused gradual rather than abrupt impalement of water into the gap among the microlenses.