An automatic evaluation method for the surface profile of a microlens array using an optical interferometric microscope

Abstract

In this paper, an automatic evaluation method for the surface profile of a microlens array using an optical interferometric microscope is presented. For inspecting the microlens array, an XY-table is used to position it. With a He–Ne laser beam and optical fiber as a probing light, the measured image is sent to the computer to analyze the surface profile. By binary image slicing and area recognition, this study located the center of each ring and determined the substrate of the microlens array image through the background of the entire microlens array interference image. The maximum and minimum values of every segment brightness curve were determined corresponding to the change in the segment phase angle from 0° to 180°. According to the ratio of the actual ring area and the ideal ring area, the area ratio method was adopted to find the phase-angle variation of the interference ring. Based on the ratio of actual ring brightness and the ideal ring brightness, the brightness ratio method was used to determine the phase-angle variation of the interference ring fringe. The area ratio method and brightness ratio method are interchangeable in precisely determining the phase angles of the innermost and outermost rings of the interference fringe and obtaining different microlens surface altitudes of respective pixels in the segment, to greatly increase the microlens array surface profile inspection accuracy and quality.