Two microbeam lines for an ion microprobe and a cell irradiation have been installed in a 5 MV tandem accelerator at the Wakasa Wan Energy Research Center (WERC), Japan. In the ion microprobe beam line, a magnetic quadrupole doublet is equipped for focus of the ion beam on the target point in a scattering chamber. It is utilized for the ion microprobe analysis such as particle induced X-ray emission and Rutherford backscattering spectroscopy. The beam spot size was obtained to be 0.8 μm ( x) × 0.6 μm ( y) (FWHM) for a beam current of 1 pA, and to be 2.0 μm ( x) × 2.5 μm ( y) (FWHM) for a beam current of 140 pA. In the cell irradiation beam line, a beam is extracted in air through a glass capillary with a 10 μm inner diameter in the vertical direction. A total dose to the cell is measured with a silicon surface barrier detector mounted under the sample stage.