Surface Acoustic Wave Research Articles

Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation

Surface acoustic wave (SAW) tweezers are a promising multifunctional micromanipulation method that controls microscale targets via patterned acoustic fields. Owing to their device structure and bonding process, most SAW tweezers have limitations in terms of controlling the position and motion of the acoustic traps, as they generate an acoustic field with a fixed region and adjust the manipulation effects via signal modulation. To address this challenge, we propose movable SAW tweezers with a multilayer structure, achieving dynamic control of their wave field and acoustic trap positions; we demonstrate their precise manipulation functions, such as translation, in-plane rotation, out-of-plane rotation, and cluster formation, on a wide spectrum of samples, including particles, bubbles, droplets, cells, and microorganisms. Our method not only improves the degree of freedom and working range of SAW tweezers but also allows for precise and selective manipulation of microtargets via microtools and localized wavefields. Owing to their flexibility, versatility, and biocompatibility, the movable SAW tweezers can be a practical platform for achieving arbitrary manipulation of microscale targets and have the potential to play significant roles in biomedical microrobotics.

Evaluation of fatigue damage of structural steel based on attenuation of laser-induced surface acoustic wave

ABSTRACT In this paper, the fatigue damage degree of low-alloy structural steel is evaluated by using the attenuation characteristics of laser-induced surface acoustic wave (SAW) during propagation. Taking the typical structural steel material Q345 as an example, a cracks model of fatigue damage is established, and the finite element method is used to solve the model. The results showed that the attenuation coefficient of SAW can reflect the depth and density of fatigue cracks. The surface measurement experiments of specimens with stress cycles of 0, 50000, 100000, 150000, and 200,000 showed that with the increase of stress cycles, the attenuation coefficient of SAW increases as a whole, indicating that it is feasible to evaluate the fatigue damage degree based on the attenuation of SAW. A method of applying tensile stress to the material to improve the sensitivity of fatigue damage evaluation is proposed. The tensile stress is used to offset the horizontal amplitude of the SAW, keeping the fatigue cracks in an open state and increasing the attenuation coefficient of SAW. The attenuation coefficient measurement experiment shows that this method is feasible.

Wireless Powered Surface Acoustic Wave Platform for Achieving Integrated Functions of Fogging/Icing Protection and Monitoring.

In this study, we introduced an integrated approach using piezoelectric thin film-based surface acoustic wave (SAW) and wireless power transfer (WPT) technologies, designed for both passive monitoring and active defogging/icing functions. We systematically investigated the resonant frequency shifts of ZnO/glass SAW devices, establishing their correlations with variations in humidity and temperature under cold conditions. Acoustic waves generated through the ZnO/glass SAW device were used for defogging and deicing functions with effects of RF powers and acousto-heating thoroughly evaluated. More significantly, the WPT system was successfully applied for achieving defogging and deicing functions, with its performance comparable to that of conventional wired SAW systems. Our findings demonstrated that the WPT SAW system significantly minimizes localized acousto-heating effects, although the time taken for both defogging and deicing was slightly longer than the wired system. This work represents a significant advancement in developing multifunctional, optically compatible, and wireless-integrated solutions for SAW based ice protection.

Nonreciprocal transmission of surface acoustic waves induced by magneotoelastic coupling with an anti-magnetostrictive bilayer

In this study, we report giant nonreciprocal transmission of shear-horizontal surface acoustic waves (SH-SAWs) in a ferromagnetic bilayer structure with negative–positive magnetostriction configuration. Although the directions of magnetization in the neighboring layers are parallel, SH-SAWs can excite optical-mode spin waves (SWs) via magnetoelastic coupling at relatively low frequencies, which is much stronger than acoustic-mode SWs at high frequencies. The measured magnitude nonreciprocity or isolation of SH-SAWs exceeds 40 dB (or 80 dB/mm) at 2.333 GHz. In addition, maximum nonreciprocal phase accumulation reaches 188° (376°/mm). Our theoretical model and calculations provide an insight into the observed phenomena and demonstrate a pathway for further improving nonreciprocal acoustic devices toward highly compact microwave isolators and circulators.

Application of quantum graph theory to metamaterial design: Negative refraction of acoustic waveguide modes

We leverage quantum graph theory to quickly and accurately characterize acoustic metamaterials comprising networks of interconnected pipes. Anisotropic bond lengths are incorporated in the model that correspond to space-coiled acoustic structures to exhibit dispersion spectra reminiscent of hyperbolic metamaterials. We construct two metasurfaces with embedded graph structure and, motivated by the graph theory, infer and fine-tune their dispersive properties to engineer nonresonant negative refraction of acoustic surface waves at their interface. Agreement between the graph model, full-wave simulations, and experiments bolsters quantum graph theory as a new paradigm for metamaterial design. Published by the American Physical Society 2024

Scanning Acousto-Optoelectric Spectroscopy on a Transition Metal Dichalcogenide Monolayer.

The charge carrier dynamics are investigated by surface acoustic waves (SAWs) inside a WSe2 monolayer on LiNbO3 by scanning acousto-optoelectric spectroscopy. A strong enhancement of the PL emission intensity is observed almost over the entire area of the flake. This enhancement increases with increasing amplitude of the wave and is especially strong at or in the vicinity to defects. The latter is attributed to the SAW-driven Poole-Frenkel activation of trapped charge carriers bound to trapping sites at these defects. In addition, the PL intensity exhibit clear periodic modulations at the SAW's frequencyfSAW and at 2 fSAW. These modulations are clear and unambiguous fingerprints of spatio-temporal carrier dynamics driven by the SAW. These occur on sub-nanosecond timescales which are found in good agreement with calculated exciton dissociation times. Mapping and analyzing both effects, this study shows that scanning acousto-electric spectroscopy provides a highly sensitive and local contact-free probe which uncovers distinct local features not resolved by conventional quasi-static photoluminescence techniques. The method is ideally suited to study carrier transport in 2D and other types of nanoscale materials and to reveal dynamic exciton modulation, and carrier localization and activation dynamics in the technologically important megahertz to gigahertz frequency range.

Numerical simulation of impulse-induced surface acoustic waves for elastography purposes using k-Wave simulation toolbox

As elastography, an emerging medical imaging strategy, advances, surface acoustic waves have been utilized to examine superficial tissues quantitatively. So far, most studies are experimental, and a numerical method is needed to cost-effectively investigate surface acoustic wave generation and propagation for technical development and optimization purposes. This study aims to develop a reliable numerical method for simulating impulse-induced surface acoustic waves using the k-wave simulation toolbox. According to the physical process of surface acoustic wave based elastography, the proposed simulation method consists of two stages: compressional wave simulation and elastic wave simulation, which aim to generate acoustic radiation force impulse and elastic waves, respectively. The technical procedures were demonstrated by a wave simulation on a water–tissue model. Meanwhile, three acoustic radiation force modeling methods were adopted. The compressional wave simulation showed that the three force modeling methods could produce similar force distribution in space but largely different amplitudes. The elastic wave simulation confirmed the feasibility of numerically generating surface acoustic waves. The reliability of the simulated waves was verified by a quantitative comparison between the numerically acquired sound speeds and their theoretical expectations and by a qualitative comparison between the numerically generated waves and the experimental observations under similar conditions. In summary, this study confirms k-wave as an effective numerical method for simulating surface acoustic waves for elastography purposes. This study provides an immediate simulation platform for investigating Scholte waves, the surface acoustic wave at a liquid–solid interface, and also, a potential numerical framework to investigate other surface acoustic waves.

Conductive metal-organic framework for ppb-concentration and highly selective SAW hydrogen sulfide sensing at room temperature

Hydrogen sulfide (H2S) sensing is utilized for monitoring the concentration in environment protection and industrial process control, of which high selectivity and ppb detection limit are required. Here, a ppb-concentration and highly selective surface acoustic wave (SAW) H2S sensing has been developed with the Cu3(HHTP)2 MOFs conductive metal-organic frameworks (MOFs), which have been synthesized by connecting Cu2+ with the organic ligands via hydrothermal process. Typically, as-prepared Cu3(HHTP)2 MOFs take on shapes including nanoparticles and nanorods. Beneficially, the SAW H2S sensing presents excellent selectivity to H2S and enables to detection of H2S as low as 6 ppb at room temperature (∼ 26 °C). Remarkably, the SAW sensor prototypes exhibit high sensitivity (0.02 mV/ppb) to 50–2000 ppb H2S, fast response (T90: 281 s) and 46 day-long stability at room temperature. Theoretically, such excellent H2S SAW sensing performance might be attributed to the interaction between Cu ions and H2S molecules and the strong acoustoelectric effect of SAW. Practically, our ppb-concentration and highly selective H2S SAW sensing have the potential in the real-time detection of H2S.

Parametric Excitation and Instabilities of Spin Waves Driven by Surface Acoustic Waves

AbstractThe parametric excitation of spin waves by coherent surface acoustic waves in metallic magnetic thin film structures is demonstrated experimentally using Brillouin light scattering spectroscopy. Complementary micromagnetic simulations and analytical modeling reveal that, depending on the experimental conditions, the spin‐wave instabilities originate from different phonon‐magnon and magnon‐magnon scattering processes. This opens novel ways to create micro‐scaled nonlinear magnonic systems for logic and data processing that profit from the efficient excitation of phonons using piezoelectricity.

A SAW Wireless Passive Sensing System for Rotating Metal Parts

Passive wireless surface acoustic wave (SAW) sensors are very useful for on-site monitoring of the working status of machines in complex environments, such as high-temperature rotating objects. For rotating parts, it is difficult to realize real-time and continuous monitoring because of the unstable sensing signal caused by the continuous change of the relative position of the rotating part to the sensor and shielding of the signal. In our SAW sensing system, we propose a loop antenna integrated with the rotating part to obtain a stable sensing signal owing to its omnidirectional radiation pattern. Methodologies for determining the antenna dimension, system operating frequency, and procedures for designing a SAW sensor tag are discussed in this paper. By fully utilizing the influence of metal rotor on antenna performance, the antenna needs no impedance matching elements while it provides sufficient gain, which equips the antenna with nearly zero temperature drift at a wide temperature-sensing range. Experimental verification results show that this sensing system can greatly improve the stability of the sensing signal significantly and can achieve a temperature sensing accuracy of ~1 °C at different rotational speeds, demonstrated by the feasibility of the loop antenna for monitoring the working status of rotating metal parts.

Surface acoustic wave platform integrated with ultraviolet activated rGO-SnS2 nanocomposites to achieve ppb-level dimethyl methylphosphonate detection at room-temperature

Dimethyl methylphosphonate (DMMP) is commonly used as an alternative for demonstrating to detect sarin, which is one of the most toxic but odorless chemical nerve agents. Among various types of DMMP sensors, those utilizing surface acoustic wave (SAW) technology provide notable advantages such as wireless/passive monitoring, digital output, and a compact, portable design. However, key challenges for SAW-based DMMP sensors operated at room temperature lies in simultaneous enhancement of sensitivities and reduction of detection limits. In this study, we developed a binary material strategy by combining reduced graphene oxide (rGO) and tin disulfide (SnS2) with (100)-facets orientation as sensing layers of SAW device for DMMP detection utilized at room temperature. Ultraviolet (UV) light was applied to activate the sensitive film and reduce the sensor's response time. The developed SAW DMMP sensor demonstrated a superior sensitivity (−1298.82 Hz/ppm), a low detection limit of 50 ppb, and a hysteresis below 1.5%, along with fast response/recovery time (39.2 s/28.4 s), excellent selectivity, long-term stability and repeatability. The formation of shrub-like rGO-SnS2 heterojunctions with abundant surface defects and large specific surface areas, high-energy (100) crystalline surfaces of SnS2, and photogenerated carriers generated by UV irradiation were pinpointed as the crucial sensing mechanisms. These factors collectively enhanced adsorption and reaction dynamics of DMMP molecules.

Graphene Decorated Shear Horizontal Surface Acoustic Wave Resonator as Humidity Sensor

Graphene Decorated Shear Horizontal Surface Acoustic Wave Resonator as Humidity Sensor

Surface acoustic wave amplification by drifting electrons in semiconducting epitaxial graphene on silicon carbide

Abstract A theory is presented for the amplification of a surface acoustic wave (SAW) due to its interaction with conduction electrons in gate-controlled epitaxial graphene (epigraphene) on a SiC substrate. It is assumed that the SAW is launched onto the substrate in the direction of an external dc electric field applied to the graphene sample and causing the conduction electrons to drift at a speed greater than the speed of the SAW. The wavelength of the SAW is assumed to be shorter than the mean free path of the electrons, so that the quantum regime of interaction of those electrons with the SAW is realized. The Green’s function method is used to calculate the SAW gain as a function of the electron concentration in epigraphene and the external dc electric field strength. It is shown that the substrate-induced band gap in the electronic spectrum of epigraphene leads to a significant (at least an order of magnitude) increase in the SAW gain as compared to the case of gapless graphene. In addition, the opening of the band gap results in a non-monotonic dependence of the SAW gain on the electron concentration, controlled by the gate voltage applied to the graphene sample. This dependence is characterized by the presence of a distinct maximum at a certain value of electron concentration (of about 2 × 10 12 cm−2 for typical values of the other parameters involved), which distinguishes it from the monotonic concentration dependence of the SAW gain in gapless graphene.

A spurious-free SAW filter employing a novel transducer structure on bulk LiNbO3 substrates

In order to cope with the ubiquitous wireless connections and the rapid transmission of data in communication systems, surface acoustic wave filters are required to have high performance. With a large electromechanical coupling coefficient (K2), conventional bulk 64°YX-LiNbO3 substrates are attractive for low-cost mass production of surface acoustic wave (SAW) resonators. However, the influence of the transverse modes restricts their practical application. In this work, a novel and simple tilted transducer is fabricated, and successfully achieved spurious-free passband SAW filters based on 64°YX-LN piezoelectric substrates. In this work, the transverse modes suppression method is theoretically studied and designed, and the effectiveness of the energy concentrated structure is verified. The optimal tilt IDT angle for eliminating the influence of transverse modes in Al/64 °YX-LN structure is about 6°. Subsequently, based on the above research, three types of tilted resonators were designed and fabricated, which not only verified the reliability of the aforementioned results but also enhanced the performance of the devices, compensating for the deficiency caused by the reduction of the Q factor due to the tilted structure. Finally, based on the double busbar tilted structure, a SAW filter was designed, which has a large 3 dB fractional bandwidth (FBW) and a spurious-free passband. The SAW filter designed in this work has low cost and excellent performance, and can be mass produced. In the field of low-cost RF devices, this work contributes to maintaining the competitive advantage of SAW technology.

Enhanced surface acoustic wave microfluidic performance through FDTS self-assembled monolayers on [formula omitted]

Microfluidics technology has been extensively applied in biochemical analysis and medical diagnostics, where precise and efficient control of microfluids is crucial. However, existing passive microfluidic control methods (e.g., microchannels) and active strategies (e.g., optical, thermal, magnetic field, and electrokinetic manipulation) are often hindered by complex device structures and operational uncertainties. Surface acoustic wave (SAW) microfluidic manipulation offers a promising alternative, providing flexible and efficient digital microfluidic control through the modulation of input signals. Nevertheless, the intrinsic hydrophilicity of substrates such as LiNbO3 results in inefficient microfluidic driving and jetting, primarily due to high surface tension. In this study, we employed chemical vapor deposition (CVD) to coat LiNbO3 substrates with 1H,1H,2H,2H-Perfluorododecyltrichlorosilane (FDTS) self-assembled monolayers (SAMs), creating hydrophobic surfaces with a contact angle of approximately 120°. In comparison to commercially available Glaco hydrophobic coatings, which reduce SAW amplitude by approximately threefold and increase substrate temperature by up to 1.5 times, FDTS SAMs exhibit negligible impact on SAW properties. Furthermore, when compared to untreated SAW devices, FDTS SAMs-coated devices demonstrated a sixfold increase in droplet driving speed under low power input (e.g., 0.5 W), enabling faster and more precise liquid jetting at velocities reaching 5 m/s. This work highlights the potential of FDTS SAMs in enhancing the performance of SAW-driven microfluidic devices, particularly in applications requiring high-efficiency droplet manipulation.

Tracking the Risk of Cardiovascular Disease after Almond and Oat Milk Intervene or Statin Medication with a Powerful Reflex SH-SAW POCT Platform.

Cardiovascular disease (CVD) represents the leading cause of death worldwide. For individuals at elevated risk for cardiovascular disease, early detection and monitoring of lipid status is imperative. The majority of lipid measurements conducted in hospital settings employ optical detection, which necessitates the use of relatively large-sized detection machines. It is, therefore, necessary to develop point-of-care testing (POCT) for lipoprotein in order to monitor CVD. To enhance the management and surveillance of CVD, this study sought to develop a POCT approach for apolipoprotein B (ApoB) utilizing a shear horizontal surface acoustic wave (SH-SAW) platform to assess the risk of heart disease. The platform employs a reflective SH-SAW sensor to reduce the sensor size and enhance the phase-shifted signals. In this study, the platform was utilized to monitor the impact of a weekly almond and oat milk or statins intervention on alterations in CVD risk. The SH-SAW ApoB test exhibited a linear range of 0 to 212 mg/dL, and a coefficient correlation (R) of 0.9912. Following a four-week intervention period, both the almond and oat milk intervention (-23.3%, p < 0.05) and statin treatment (-53.1%, p < 0.01) were observed to significantly reduce ApoB levels. These findings suggest that the SH-SAW POCT device may prove a valuable tool for monitoring CVD risk, particularly during routine daily or weekly follow-up visits.

SAW-driven directional clearance of bacteria on submerged surfaces

The process of bacterial film formation on submerged surfaces commences with the attachment of bacteria to the substrate. Appropriate combinations of topology and surface chemistry have been explored to prevent biofilm anchoring at the solid–liquid interface. However, the failure to actively remove bacteria from solid surfaces within a fluid in a directional manner results in bacterial backflow onto those surfaces, thus leading to secondary contaminations. Herein, inspired by the biology broom of the ciliary beating system, we propose an active surface sweeper mechanism assisted by charged particles and surface acoustic waves (SAW) to facilitate the directional clearance of bacteria. Through the synergistic effect of charge trapping and acoustic propelling, the sweeper system demonstrates an effective inhibition of bacterial adhesion in the initial stage of biofilm formation. Utilizing SAW for twenty seconds yields a remarkable 94.8% efficiency in bacterial clearance, with antibacterial adhesion efficiency up to 92.4% and 98.8% for Escherichia coli and Staphylococcus aureus, respectively. Moreover, the accompanying theoretical force modeling offers a comprehensive mechanistic insight into the relationship between acoustic streaming and bacteria repelling. The motion analysis of bacteria-loaded particles suggests that the acoustic radiation force, rather than the Strokes force, determines the clearance direction of bacteria.

Physical Sensors Based on Lamb Wave Resonators

A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development.

Angle-dependent ion-beam etching of RuAl thin films for structuring GHz-frequency electronics

The ruthenium aluminide (RuAl) alloy is a promising electrode material for wireless surface acoustic wave sensors working under harsh conditions at high temperatures. However, during the structuring of RuAl thin films using ion-beam etching, etched material can redeposit at the edges of the electrodes and form objects, so-called fences, on top of the structured features. These decrease the high-temperature stability and lead to an undesired alteration of the sensor performance. In this work, the angle-dependent ion-beam etching of RuAl thin films was investigated to inhibit the formation of such fence structures. The etch rate was determined as a function of the etching angle between ion-beam and sample surface in a range between 90° and 40°. Furthermore, finger structures with pitches below 500 nm, which are required for devices working in the intended GHz regime, were patterned to study the influence of the etching angle on the profile of the RuAl electrode fingers using transmission electron microscopy and energy-dispersive x-ray spectroscopy. The results show that an etching angle of 50° results in the highest etch rate. For etching angles of 50° and below, the width of the fences is reduced below 10 nm, so they break off during standard resist removal procedures. Such low etching angles lead to shadowed areas on the side of structured features in which unetched material remains. However, this material can be removed by using a two-step etching process combining a 50° step with a 90° step. This process is capable of structuring fence-free trapezoidal-shaped electrode finger profiles. Therefore, the developed process is well suited for the fabrication of high-temperature GHz-frequency RuAl electrodes.

Theoretical investigation of Rayleigh-type surface acoustic waves with high electromechanical coupling coefficient in c-axis-tilted ScAlN film/3C-SiC substrate structure

Surface acoustic wave (SAW) resonators are essential components of mobile communication technology. Advanced performance SAW resonators are needed to support beyond fifth-generation mobile communication technology, which aims to achieve unprecedentedly high data rates and low latency using wide frequency bands in the RF spectrum. This study theoretically investigates the propagation characteristics of a non-leaky Rayleigh-type SAW (RSAW) propagating in a c-axis-tilted ScAlN film/3C-SiC substrate structure. By appropriately selecting the c-axis tilt angle and the film thickness of the ScAlN film, a high electromechanical coupling coefficient (K2) value was obtained in the second-mode RSAW (Sezawa wave). The maximum K2 value for the Sezawa wave was 8.03%, with a phase velocity of 7456 m/s and a power flow angle of 0° under the structural conditions where the K2 value was maximized. These properties offer significant advantages for achieving wide frequency bands, high operating frequencies, and ease of design for SAW resonators. The structural conditions under which good propagation characteristics were obtained in the Sezawa waves were found to coincide with the conditions that maximize the electromechanical coupling coefficient of the quasi-longitudinal wave in the ScAlN film, and a significant increase in the shear vertical component of Sezawa wave particle displacement was observed. Additionally, ScAlN films with a 40% Sc concentration can be fabricated using sputtering and molecular beam epitaxy. Recent advancements have reported the production of high-quality 3C-SiC wafers and large 3C-SiC film/silicon wafers. Therefore, the c-axis-tilted ScAlN film/3C-SiC substrate structure shows great potential as a candidate for next-generation SAW resonators.