Surface Acoustic Wave Phase Velocity Research Articles

A novel gyroscope based on the slow surface acoustic wave in a phononic metamaterial

Limited to the direct modulation on the surface acoustic wave (SAW) by the rotation, the conventional SAW gyroscopes incur weak Coriolis effects and gyroscopic effects. In this paper, we innovatively utilize a phononic metamaterial (PM) operated at whispering-gallery modes (WGMs) as the vehicle for the Coriolis effect rather than SAW itself. The gyroscopic effects of this PM are investigated, and a new SAW gyroscope is subsequently proposed based on the slow SAW in PM. We show, combining theoretical modeling and finite element method simulation, that the rate of rotation can linearly induce the splitting of WGMs and modulate the phase velocity of SAW down to 4600 m/s (initial phase velocity of 5355 m/s); the direction of rotation results in the chiral symmetry of the PM vibration and the asymmetric distribution of the transmissive SAW. Besides, the proposed SAW gyroscope measures the angular velocity by detecting the phase shift resulting from rotation-dependent slow SAW in PM, obtaining a sensitivity of 0.016 deg/Hz when 50-cell PM. Compared with the existing SAW gyroscopes based on phase velocity modulation, the gyroscopic gain factor in this paper is enhanced by 430–1600 times. This work jumps out of the framework of directly modulating SAW in gyroscopes and provides an innovative scheme of the indirect modulations from the rotation-dependent PM on SAW, showing excellent performance and potential for angular velocity measurement in extreme environments.

Single-Ended Surface Acoustic Wave Pressure Resonators

Surface acoustic wave (SAW) sensors exhibit advantageous attributes for pressure detection, including compact dimensions, cost-effectiveness, facile integration, elevated sensitivity, and a high quality factor (Q value). In this study, the single-ended resonant configuration of SAW pressure sensing element based on ST-X cut quartz was simulated and fabricated. The influence of the interdigitated transducer (IDT) and applied pressure on the resonance frequency of SAW were simulated and analyzed. The designed phase velocity (3159.344 m s−1) without IDT is closest to the theoretical phase velocity (3158 m s−1) of SAW propagation in the substrate, and the relative error is about 0.043%. The designed phase velocity of SAW dropped to 3149.198 m s−1 due to the loading of the IDT mass. With an increase in applied pressure from 0 to 350 kPa, the resonance frequency of the SAW decreases from 157.05 to 154.02 MHz, yielding a maximum linear pressure sensitivity of approximately 8.6 kHz kPa−1. The measured center frequencies of the fabricated single-ended SAW devices are predominantly clustered around 157 MHz, exhibiting a deviation of 0.46 MHz from the simulated results. The present work establishes a foundation for subsequent experimental investigations into pressure sensing.

Phononic-Crystal-Based SAW Magnetic-Field Sensors.

In this theoretical study, we explore the enhancement of sensing capabilities in surface acoustic wave (SAW)-based magnetic field sensors through the integration of engineered phononic crystals (PnCs). We particularly focus on amplifying the interaction between the SAW and magnetostrictive materials within the PnC structure. Through comprehensive simulations, we demonstrate the synchronization between the SAWs generated by IDTs and the resonant modes of PnCs, thereby leading to an enhancement in sensitivity. Furthermore, we investigate the ΔE effect, highlighting the sensor's responsiveness to changes in external magnetic fields, and quantify its magnetic sensitivity through observable changes in the SAW phase velocity leading to phase shifts at the end of the delay line. Notably, our approach yields a magnetic field sensitivity of approximately S~138 °mT for a delay line length of only 77 µm in homogeneous magnetic fields. Our findings underline the potential of PnCs to advance magnetic field sensing. This research offers insights into the integration of engineered materials for improved sensor performance, paving the way for more effective and accurate magnetic field detection solutions.

Sub- and supersonic elastic waves in an annular hole phononic metamaterial

Surface acoustic wave (SAW) devices are used in a wide range of applications including sensing and microfluidics, and are now being developed for applications such as quantum computing. As with photonics, and other electromagnetic radiation, metamaterials offer an exciting route to control and manipulate SAW propagation, which could lead to new device concepts and paradigms. In this work we demonstrate that a phononic metamaterial comprising an array of annular hole resonators can be used to realise frequency control of SAW velocity. We show, using simulations and experiment, that metamaterial patterning on a lithium niobate substrate allows control of SAW phase velocities to values slower and faster than the velocity in an unpatterned substrate; namely, to ~85% and ~130% of the unpatterned SAW velocity, respectively. This approach could lead to novel designs for SAW devices, such as delay lines and chirp filters, but could also be applied to other elastic waves.

Scattering Matrix Approach to Design of One-Port Surface Acoustic Wave Resonator Sensors Utilizing Reflectors as Sensing Element.

It has been recently demonstrated that one-port surface acoustic wave (SAW) resonators known for their high Q value and relatively small device footprint could be utilized for in-liquid mass loading sensing applications where only the reflectors of the device are coated with the sensing film, while the interdigital transducer (IDT) is isolated from the sensing environment. The sensor relies on changes induced in reflectivity and phase velocity of SAW in the region of the reflectors upon detection of the measurand and is particularly advantageous for SAW resonator-type sensors as any contact of the sensing film with the IDT could change its static capacitance during sensing and thereby introduce serious instability in the sensor response. Accordingly, in the present work, the existing scattering matrix approach to the design of one-port SAW resonator filters, which does not cater to the integration of sensing film on the resonator surface, is adapted to develop a method to design one-port SAW resonator sensors utilizing reflectors as sensing element. The reflector block of the one-port SAW resonator is readily split into sensing-active and sensing-inactive parts using the SAW grating transmission matrix in order to study the changes introduced in input admittance of the device for varying level of coverage of the sensing film. The theoretical design approach presented in this work could be used to fabricate high-performance one-port SAW resonator sensors operating at its point of highest sensitivity while utilizing one of the device reflectors as sensing element, without the use of additional impedance matching circuit elements.

Enhanced Properties of SAW Device Based on Beryllium Oxide Thin Films

The present study depicts the first-ever optimized surface acoustic wave (SAW) device based on Beryllium Oxide (BeO) thin film. The feasibility of surface acoustic wave devices based on BeO/128° YX LiNbO3 layered structure has been examined theoretically. The SAW phase velocity, electromechanical coupling coefficient, and temperature coefficient of delay for BeO/128° YX LiNbO3 layered structure are calculated. The layered structure is found to exhibit optimum value of phase velocity (4476 ms−1) and coupling coefficient (~9.66%) at BeO over layer thickness of 0.08 λ. The BeO (0.08 λ)/128° YX LiNbO3 SAW device is made temperature stable, by integrating it with negative temperature coefficient of delay (TCD) TeO3 over layer of thickness 0.026λ.

A Weighted Average Phase Velocity Inversion Model for Depth-Resolved Elasticity Evaluation in Human Skin In-Vivo.

In current surface acoustic wave (SAW) elastography field, wavelength-depth inversion model is a straightforward and widely used inversion model for depth-resolved elasticity profile reconstruction. However, the elasticity directly evaluated from the wavelength-depth relationship is biased. Thus, a new inversion model, termed weighted average phase velocity (WAPV) inversion model, is proposed to provide depth-resolved Young's modulus estimate with better accuracy. The forward model for SAW phase velocity dispersion curve generation was derived from the numerical simulations of SAWs in layered materials, and inversion was implemented by matching the measured phase velocity dispersion curve to the one generated from the forward model using the least squares fitting. Three two-layer agar phantoms with different top-layer thicknesses and one three-layer agar phantom were tested to validate the proposed inversion model. Then the model was demonstrated on human skin at various sites (palm, forearm and back of hand) in-vivo. In multi-layered agar phantoms, depth-resolved elasticity estimates provided by the model have a maximal total inversion error of 15.2% per sample after inversion error compensation. In in-vivo human skin, the quantified bulk Young's moduli (palm: 212 ± 78 kPa; forearm: 32 ± 11 kPa and back of hand: 29 ± 8 kPa) are comparable to the reference values in the literature. The WAPV inversion model can provide accurate depth-resolved Young's modulus estimates in layered biological soft tissues. The proposed model can predict depth-resolved elasticity in layered biological soft tissues with a reasonable accuracy which traditional wavelength-depth inversion model cannot provide.

Surface Brillouin scattering study of tantalum nitride (TaN) thin films.

Elastic properties of TaN films on (001)Si are investigated by surface Brillouin scattering (SBS). The velocity dispersion is obtained from Brillouin frequency shifts and surface acoustic wave phase velocities derived from measured SBS spectra. The observed Rayleigh surface acoustic and Sezawa waves indicate a soft on hard configuration. The elastic stiffnesses from the best fit of the calculated and measured spectra were C11=288 and C44=80GPa. Using these elastic constants in the surface elastodynamic Green's function yielded theoretical Brillouin spectra in agreement with measured spectra. Employing a least squares fitting procedure to the elastic constants gives uncertainties in C11 and C44 as ±3.7 and ±2.5GPa, respectively.

Surface Acoustic Wave Vapor Sensor with Graphene Interdigital Transducer for TNT Detection

The performance of the surface acoustic wave (SAW) vapor sensor with graphene interdigital transducer (IDT) is investigated to study the improvement of sensitivity and decrease of secondary effects by the finite element method (FEM). Unlike conventional Al metal electrodes, the observed increase in the SAW phase velocity confirms the existence of elastic loading for the graphene electrode to the contact surface. Accordingly, the mass sensitivity of the SAW device with graphene electrode shows one order of magnitude higher. In the presence of TNT, the resonance frequency shift of the SAW sensor with graphene IDT is approximately 10 times larger than that with Al. Also, graphene electrodes offer the less secondary effects (BAW generations). So the SAW sensor with graphene IDT possesses superior sensing performance.

THERMAL MODEL FRO SAW CALCULATIONS IN THE LAYERED SYSTEMS

The calculation of surface acoustic wave (SAW) parameters in the layered systems consists of half infinite substrate and one or several layers when the temperature is variable have been considered. SAW phase velocity calculation with temperature dependent material constants have been discussed. Expressions for the temperature coefficients of delay (TCD) and the temperature coefficients of frequency (TCF) of the first and the second order with taking into account SAW dispersion have been evaluated. Numerical procedures for TCD and TCF calculation have been proposed.

Non-destructive characterization of surfaces and thin coatings using a large-bandwidth interdigital transducer.

This paper deals with non-destructive testing of thin layer structures using Rayleigh-type waves over a broad frequency range (25-125 MHz). The dispersion phenomenon was used to characterize a layer-on-substrate-type sample comprising a thin layer of platinum 100 nm thick on a silicon substrate. The originality of this paper lies in the investigation of different ways of generating surface acoustic waves (SAWs) with large bandwidth interdigital transducers (IDTs) as well as the development of a measuring device to accurately estimate the SAW phase velocity. In particular, this study focuses on comparing the performance (in terms of SAW amplitude and bandwidth) of different excitations imposed on IDTs. The three types of excitations are burst, impulse, and chirp. The interest of chirp excitation compared to the other two types was clearly demonstrated in terms of the SAW bandwidth and amplitude of displacement. With these IDT transducers, measurements could be performed over a wide frequency band (20-125 MHz), and consequently, dispersion curves could be obtained over a wide frequency band with a range of velocity variations in the order of 100 m/s. Under these conditions, an extremely accurate estimate of the phase velocity as a function of the frequency could be obtained using a Slant Stack transformation. Finally, from these experimental dispersion curves and theoretical dispersion curves, an accurate estimate of the thickness of the layer could be obtained by inversion. This estimated thickness was then confirmed using profilometer measurements.

Multiple-layer guided surface acoustic wave (SAW)-based pH sensing in longitudinal FiSS-tumoroid cultures

A constitutively increased intracellular pH that is higher than the extracellular pH is emerging as a hallmark of cancer and determining pH could play a significant role in the measurement of drug responsiveness of tumor cells. However, a non-invasive, touch-free and real-time pH sensing as a research tool is lacking and remains a major unmet need. The purpose of the current study is to investigate a microfluidic surface acoustic wave (SAW) sensor platform capable of monitoring pH in cell and tumoroid cultures. A novel multi-layer guided SAW sensor integrated into a microfluidic channel was investigated theoretically and experimentally in detail for pH bio-sensing. Sensitivity and capability of the layer guided Love wave device was modeled using the finite element simulation. The model was verified experimentally, and a study monitoring pH of cell growth media is presented. This novel pH sensor is based on a 13.91 MHz center frequency SAW device coated with ZnO (500 nm) and IrO2 (30 nm) layers to increase the sensitivity. A change in mechanical and electrical properties of the conductive IrO2 layer was observed resulting from electrical corrosion induced by pH solutions affecting the charge distribution, SAW phase velocity and attenuation. By measuring the frequency shift induced by the change in SAW phase velocity between the test group and control group, the pH value of cell culture media from H460 cancer cell culture plates from day 0 to day 5 can easily be determined. To improve the sensitivity and stability of the sensor, a finite element method was used to optimize the layer thicknesses. Taken together, the results of experiments show the potential application of this device to be integrated with microfluidic channels and used in determining pH changes in longitudinal tumor cell cultures.

Three-dimensional finite element simulation of Love mode surface acoustic wave in layered structures including ZnO piezoelectric film and diamond substrate

Three-dimensional (3D) finite element method (FEM) was used to simulate the surface acoustic wave (SAW) propagation properties in layered structures including ZnO piezoelectric film and diamond substrate. The excitation conditions of Love mode and Rayleigh mode SAWs are discussed considering the ZnO crystal orientation and the SAW propagation direction which are specified using Euler angles (α, β, γ). The phase velocity and electromechanical coupling coefficient K2 of Love mode SAW in the ZnO/diamond structure are provided as functions of the normalized ZnO layer thickness hZnO/λ and the Euler angles (α, β, γ). The results show that the maximum K2 of 4.26% is reached at hZnO/λ = 0.3 and (α, β, γ) = (0°, 90°, 0°) for Love mode SAW; the associated phase velocity is 3436 m/s and the temperature coefficient of frequency (TCF) value is −26.5 ppm/°C. The TCF properties are greatly improved by adding a SiO2 layer between the ZnO film and the diamond substrate. A zero TCF can be obtained when the normalized SiO2 thickness hSiO2/λ is 0.25 and the hZnO/λ is 0.2, where the corresponding K2 is 3.26% and the phase velocity is 3126 m/s.

SAW propagation characteristics of TeO3/3C-SiC/LiNbO3 layered structure

Surface acoustic wave (SAW) devices based on Lithium Niobate (LiNbO3) single crystal are advantageous because of its high SAW phase velocity, electromechanical coupling coefficient and cost effectiveness. In the present work a new multi-layered TeO3/3C-SiC/128° Y-X LiNbO3 SAW device has been proposed. SAW propagation properties such as phase velocity, coupling coefficient and temperature coefficient of delay (TCD) of the TeO3/SiC/128° Y-X LiNbO3 multi layered structure is examined using theoretical calculations. It is found that the integration of 0.09λ thick 3C-SiC over layer on 128° Y-X LiNbO3 increases its electromechanical coupling coefficient from 5.3% to 9.77% and SAW velocity from 3800 ms−1 to 4394 ms−1. The SiC/128° Y-X LiNbO3 bilayer SAW structure exhibits a high positive TCD value. A temperature stable layered SAW device could be obtained with introduction of 0.007λ TeO3 over layer on SiC/128° Y-X LiNbO3 bilayer structure without sacrificing the efficiency of the device. The proposed TeO3/3C-SiC/128° Y-X LiNbO3 multi-layered SAW structure is found to be cost effective, efficient, temperature stable and suitable for high frequency application in harsh environment.

Temperature dependence of elastic properties in austenite and martensite of Ni-Mn-Ga epitaxial films

Using surface acoustic waves (SAW) the elastic properties of 500 nm thick epitaxial off-stoichiometric Ni-Mn-Ga films prepared by sputtering on MgO substrate were determined in a broad temperature range both in austenite and martensite and across the martensitic transformation. At room temperature the films were in non-modulated martensite with tweed-like microstructure. Structural and magnetic studies proved that the martensitic structure can be considered homogenous on the scale of surface waves owing to the fine twinning. Measured angular dependence of SAW velocities indicated that the averaged in-plane tetragonal structure can be used for the calculation of elastic coefficients in martensite. The phase velocity of SAW showed an anomaly around the phase transition temperature due to changes of the shear elastic coefficients, c'and c44. During cooling there was a gradual softening of c' in austenite. The softening turned to stiffening at the onset of the martensitic transformation while c44 sharply decreased. The shear coefficients for martensite and paramagnetic austenite of the film are comparable to Ni-Mn-Ga bulk single crystal. No significant effect of magnetic field on elastic coefficients was detected in agreement with the bulk.

Surface acoustic wave properties in 0.955Pb(Zn1/3Nb2/3)O3-0.045PbTiO3 multidomain single crystal poled along [001

ABSTRACTSurface acoustic wave propagation in a 0.955Pb (Zn1/3Nb2/3)O3-0.045PbTiO3 multidomain single crystal poled along [001]c has been analyzed theoretically using Christoffel wave equations. From the measured experimental data, the orientational dependence of surface acoustic wave phase velocities, electromechanical coupling coefficients and power flow angles was calculated. The results showed that surface acoustic wave propagations of 0.955Pb (Zn1/3Nb2/3)O3-0.045PbTiO3 are poor than 0.93Pb(Zn1/3Nb2/3)O3-0.07PbTiO3 crystal slightly. However, the 0.955Pb (Zn1/3Nb2/3)O3-0.045PbTiO3 single crystals have higher rhombohedral-tetragonal phase transition temperature and much stabler electromechanical properties. This may expand applications range of SAW devices.

Full-Wave Analysis of Ultrahigh Electromechanical Coupling Surface Acoustic Wave Propagating Properties in a Relaxor Based Ferroelectric Single Crystal/Cubic Silicon Carbide Layered Structure

This paper describes a full-wave analysis of ultrahigh electromechanical coupling surface acoustic wave (SAW) of Y-cut X propagating Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (YX-PIMNT) single crystals on a cubic silicon carbide (3C-SiC) substrate. There are several eigenmodes including shear horizontal (SH) and Rayleigh SAWs. Based on the finite-element method (FEM), the phase velocity (vp) and coupling factor (K2) of SAWs varying with the top electrode thickness, thickness, and Euler angle (θ) of the YX-PIMNT substrate have been investigated. K2 of SH SAW can reach an extremely high value of 75.9%. The proper control of structural parameters can suppress unwanted responses caused by other modes without deteriorating the coupling factor. The large K2 value of SH SAW and suppression of unwanted responses have highly promising applications in developing ultrawideband and tunable SAW filters. Finally, the performance of 3C-SiC and 6H-SiC as substrates was investigated, and 3C-SiC was identified as a more attractive substrate candidate than 6H-SiC.

Laser photoacoustic technique for ultrasonic surface acoustic wave velocity evaluation on porcelain

A laser photoacoustic technique has been developed to evaluate the surface acoustic wave (SAW) velocity of porcelain. A Q-switched Nd:YAG laser at 1064 nm was focused by a cylindrical lens to initiate broadband SAW impulses, which were detected by an optical fiber interferometer with high spatial resolution. Multiple near-field surface acoustic waves were observed on the sample surface at various locations along the axis perpendicular to the laser line source as the detector moved away from the source in the same increments. The frequency spectrum and dispersion curves were obtained by operating on the recorded waveforms with cross-correlation and FFT. The SAW phase velocities of the porcelain of the same source are similar while they are different from those of different sources. The marked differences of Rayleigh phase velocities in our experiment suggest that this technique has the potential for porcelain identification.

Enlarged phase velocities of ultra-wideband surface acoustic wave devices with relaxor based ferroelectric single crystal/diamond layered structure

The surface acoustic wave (SAW) characteristics of Y-cut X propagating Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (YX-PIMNT) single crystals on a diamond substrate have been theoretically calculated. The simulated results show that the phase velocity of the shear horizontal (SH) SAW may be greatly enhanced from the 1350m/s to 3350m/s by reducing the thickness of the PIMNT from 0.5λ to 0.05λ, with a corresponding decrease in the electromechanical coupling factor (K2) from 73.6% to 19.6%. The dispersion curves of phase velocity and K2 as a function of PIMNT thickness are given for the proposed layered structure. Besides the SH SAW, there are also higher order modes that would cause unwanted responses in the pass-band of wideband SAW filters. These were suppressed by properly controlling structural parameters including top electrode thickness, thickness and Euler angle (θ) of PIMNT substrate. The calculated results demonstrate the effectiveness of this approach to enlarge the phase velocity of the SH SAW without dramatically sacrificing its K2, which makes relaxor based ferroelectric single crystals promising for realizing ultra-wideband SAW devices working in ~GHz range.

The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures.

We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital transducers with a periodic length of 24 μm were patterned by lift-off photolithography techniques on the AlN films/TC4 structure, while the AlN film thickness was in the range 1.5–3.5 μm. The device performances in terms of quality factor (Q-factor) and electromechanical coupling coefficient (k2) were determined from the measure S11 parameters. The Q-factor and k2 were strongly dependent not only on the normalized AlN film thickness but also on the full-width at half-maximum (FWHM) of AlN (002) peak. The dispersion curve of the SAW phase velocity was analyzed, and the experimental results showed a good agreement with simulations. The temperature behaviors of the devices were also presented and discussed. The prepared SAW resonators based on AlN/TC4 structure have potential applications in integrated micromechanical sensing systems.