Reaction rate theory analysis has performed to investigate the irradiation temperature and dose rate dependence of void swelling of RAFM steel under a wide range of irradiation temperatures and dose rates (250 to 620 °C and 10−7 to 10−3 dpa/s) with focusing on nucleation behavior of voids. In the rate theory analysis, an improved nucleation model is employed where the stable nucleus size of voids is estimated by the vacancy flux into/from voids which depends on irradiation condition and void size. The calculation says that the void swelling strongly depends on irradiation temperature and dose rate, and there is one unique peak temperature for each dose rate. As dose rate increases, the peak temperature shifts to higher temperatures and the peak swelling decreases; this results from the enhancement and suppression of void nucleation. The calculated stable nucleus size of voids remarkably depends on irradiation conditions and varies widely from 5 to about 50: the nucleus size drastically increases at higher temperatures, while it decreases at higher dose rates. For the dose rate dependence of the peak temperature of void swelling, the calculation provides a good agreement with the experiment more than a conventional model.