Characteristics of Hα and Be II emissions in ITER divertor plasmas have been evaluated, and the applicability of a spectroscopic evaluation method of influxes and ionization front positions by using the divertor impurity monitor (DIM) has been systematically verified for the first time based on plasma profile datasets with parameter scans. In addition, practical values of the ionization/photon factor (S/XB) for DIM to evaluate influxes have been determined. In attached divertor plasmas and the onset of plasma detachment, H influx integrated over the entire area of the divertor can be evaluated within ±30 % accuracy using Hα intensities measured by the DIM and S/XB value of 32, which is higher than the S/XB in most divertor plasmas in previous devices owing to high electron density. The ionization front position can also be evaluated to within a few mm by using peak channel position. However, when electron temperature further decreases from the detachment onset, the ionizing plasma component (caused by electron impact excitation) in the total Hα emission decreases and the spatial profiles of emission and ionization diverge, making spectroscopic evaluation difficult. In all conditions, Hα intensities could be measured with a more than sufficient number of photons at the required time resolution using the current DIM design. For Be influx integrated over the entire divertor area, it has been found that Be I is not suitable for the DIM since its intensity is similar to the background continuous spectra. Replacing Be I with Be II solves this problem. Even in detached divertor plasmas, it is possible to evaluate Be1+ ionization flux within ±30 % accuracy using Be II intensities and S/XB, the value of which depends on the DIM’s fields of view. However, the evaluated Be1+ ionization flux is lower than Be influx by more than 80 %, meaning that the evaluation of Be influx using Be II would be an underestimate. But, Be II can be measured with a more than sufficient number of photons.