The electrical and optical properties of sprayed indium tin oxide (ITO) films have been reported as a function of tin concentration, substrate temperature T s and the substrate-nozzle distance D sn · D sn and T s seem to be interrelated for the optimization of good quality ITO films. Highly conduction (3 × 10 5 ohm −1m −1) and transparent (90% in visible region) ITO films were obtained when D sn = 0.3 m, T s = 693 K with 5% by weight of SnCl 4 in the starting material. These data are discussed in the light of reaction kinetics.
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