First results of the investigation of waveguides fabricated by proton double implantation and subsequent annealing in LiNbO 3 are presented. Rutherford backscattering measurements and optical characterization were carried out. A symmetrical near field pattern is obtained by burying the waveguides. Channel waveguides show strong light-induced refractive index changes with time constants of about 100 ms. Switching of the guided light using a cut-off effect is possible. Comparison with annealed proton-exchanged waveguides is drawn.