Wear debris in hydraulic oil contains important information on the operation of equipment, which is important for condition monitoring and fault diagnosis in mechanical equipment. A micro inductive sensor based on the inductive coulter principle is presented in this work. It consists of a straight micro-channel and a 3-D solenoid coil wound on the micro-channel. Instead of detecting the inductance change of the inductive sensor, the equivalent resistance change of the inductive sensor is detected for non-ferrous particle (copper particle) monitoring. The simulation results show that the resistance change rate caused by the presence of copper particles is greater than the inductance change rate. Copper particles with sizes ranging from 48 μm to 150 μm were used in the experiment, and the experimental results are in good agreement with the simulation results. By detecting the inductive change of the micro inductive sensor, the detection limit of the copper particles only reaches 70 μm. However, the detection limit can be improved to 48 μm by detecting the equivalent resistance of the inductive sensor. The equivalent resistance method was demonstrated to have a higher detection accuracy than conventional inductive detection methods for non-ferrous particle detection in hydraulic oil.
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