The periodic cleaning of silicon nitride residues on the graphite deposition reactor surface is a critical process for producing silicon wafers in the photovoltaic manufacturing industry. A green, non-erosive and sustainable sodium bicarbonate media blasting technology (SBMBT) was investigated in this research, aiming for providing an alternative to the widely-used polluting liquid hydrofluoric acid soaking method in the industry. By comparing the cleaning behavior of different blasting media (sodium bicarbonate, alumina, glass bead and walnut shell) under various blasting angles and pressures, the most appropriate cleaning process parameters (30° and 0.3 MPa) and efficient removal rate (0.085 cm2/s) of SBMBT were determined based on the statistical characterization of surface roughness data. Under the most appropriate cleaning process parameters, the mean value of roughness (Ra = 2.119 μm) and cleanliness of graphite deposition reactor surface that was cleaned by SBMBT could meet industry standards. Based on the stress sample data provided by the six identical simulations on each of the nine parameter combinations, the multiple-impact cleaning mechanism of SBMBT was revealed using the LSTC dynamics (LS-DYNA) particle impact model and a high-speed camera. Based on five sets of the recovery experiments data, the mean value of blasting media recovery rate obtained in the validation of the designed sodium bicarbonate media recovery scheme was 79.98%, and the consistency of the media crystal form before and after recovery was confirmed by PXRD. As the experimental results indicate, SBMBT is a green technology with low damage, no residue, and can effectively alleviate the problem of solid waste treatment, which is worthy of being applied in graphite deposition reactor cleaning processes.
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