This paper reports the results of secondary ion mass spectrometry (SIMS) analyses of the elemental components contained in microvolume liquid residues deposited onto high-purity graphite substrates. These residues were formed by evaporating the solvent in 25-nL volumes of standard solutions containing the analyte element and a known mass of a yttrium internal standard. The capability of the SIMS technique to quantitatively measure the mass of the analyte was determined from these standard samples. The relative ion yields of Al, Ca, Mn, Fe, Co, Cu, An, Se, and Pb with respect to the Y internal standard were determined. The minimum detectable quantities (MDQ) of these elements were measured along with the precision of the SIMS analysis. Gram detectivities for this set of elements dissolved in the 25-nL volumes ranged between 85 pg and 2.0 fg, corresponding to molar detectivities ranging between 16 ..mu..M and 1.6 nM. Stable isotope dilution analysis of samples containing enriched /sup 206/Pb demonstrated quantitative measurement accuracy within 3% of the true values for samples containing 4.0 mM Pb. SIMS analyses of the NBS bovine serum reference standard indicate that this technique can provide useful quantitative analysis of selected elements contained in a microvolume of biological fluids.