A unified energy model for mechanical deformation of the microbeam included by single stranded DNA (ssDNA) adsorption considering the surface charge density on substrate is investigated. First, a free energy model is established to quantify the deflection and axial displacement of the microbeam, the ion concentration in the solution, as well as the electric potential distribution inside and outside the ssDNA film with a uniform surface charge density. Then, the governing equations and corresponding boundary conditions are obtained by minimizing the free energy with three types of variational variables. And, the relationship of the electric potential difference between the two sides of the ssDNA film and the deformation of microcantilever and simply support beam are determined in different solutions (1: 1, 1: 2, 1: 3). Moreover, the numerical solutions of the electric potential distribution inside and outside the ssDNA film are investigated by using the finite difference method and Newton's iteration method. The results suggest that the nonlinear model for electric potential distribution should be used under higher surface charge density. By fitting and comparing the present predictions with Arroyo-Hernandez's experimental data, the effectiveness of the model is verified. The study shows that the surface charge density can modulate the magnitude and direction of ssDNA-microbeam deformation, which also indicates that there exists a critical surface charge density, causing the failure of ssDNA-microbeam detection. These conclusions are helpful for designing the efficient biosensors based on DNA-microbeam.
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