To analyze the quantitative mapping relationship between the geometric errors of the five-axis CNC machine tool and the tooth surface deviation of spiral bevel gears, and identify the key geometric errors that affect the machining deviation of the spiral bevel gear tooth surface, a sensitivity analysis method for tooth surface machining deviation of spiral bevel gear based on screw theory and EFAST method is proposed. Firstly, the machining model of the spiral bevel gear tooth surface based on the five-axis CNC machine tool is established. Then, the geometric error transfer model of the machine tool is established based on the screw theory. Combined with the EFAST global sensitivity analysis method, the key geometric errors that affect tooth surface deviation are identified. Finally, the reliability and effectiveness tests are performed by comparing the results to the local sensitivity analysis method and simulating compensation for the key geometric errors. The result of compensation shows that the tooth surface deviation is reduced significantly according to global sensitivity analysis. The feasibility of applying sensitivity analysis to control the tooth surface deviation of spiral bevel gears has been demonstrated.