A model machine of multifunctional form and position measurement instrument controlled by a personal computer has been successfully developed. The instrument is designed in rotary table type with a high precision air bearing and the radial rotation error of the rotary table is 0.08 μm. A high precision vertical sliding carriage supported by an air bearing is used to the instrument, the straight motion error of the carriage is 0.3 μm/200 mm and the parallelism error of the motion of the carriage relative to the rotation axis of the rotary table is 0.4 μm/200 mm. The mathematical models have been established for assessing planar and spatial straightness, flatness, roundness, cylindricity, and coaxality errors. By radial deviation measurement, the instrument can accurately measure form and position errors of such workpieces as shafts, round plates and sleeves of medium or small dimensions with the tolerance grades mostly used in industry.