Distributed parameter systems (DPSs) frequently appear in industrial manufacturing processes, with complex characteristics such as time–space coupling, nonlinearity, infinite dimension, uncertainty and so on, which is full of challenges to the modeling of the system. At present, most DPS modeling methods are offline. When the internal parameters or external environment of DPS change, the offline model is incapable of accurately representing the dynamic attributes of the real system. Establishing an online model for DPS that accurately reflects the real-time dynamics of the system is very important. In this paper, the idea of reinforcement learning is creatively integrated into the three-dimensional (3D) fuzzy model and a reinforcement learning-based 3D fuzzy modeling method is proposed. The agent improves the strategy by continuously interacting with the environment, so that the 3D fuzzy model can adaptively establish the online model from scratch. Specifically, this paper combines the deterministic strategy gradient reinforcement learning algorithm based on an actor critic framework with a 3D fuzzy system. The actor function and critic function are represented by two 3D fuzzy systems and the critic function and actor function are updated alternately. The critic function uses a TD (0) target and is updated via the semi-gradient method; the actor function is updated by using the chain derivation rule on the behavior value function and the actor function is the established DPS online model. Since DPS modeling is a continuous problem, this paper proposes a TD (0) target based on average reward, which can effectively realize online modeling. The suggested methodology is implemented on a three-zone rapid thermal chemical vapor deposition reactor system and the simulation results demonstrate the efficacy of the methodology.