International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 253-256 (2003) BioMEMS and MicrofluidsNo AccessA DISPOSABLE SELF-PRIMING AND BUBBLE TOLERANCE PNEUMATIC ACTUATION MICRO-PUMPGUOLIN XU, DOR NGI TING, VINCENT LUAR, and LIN KIAT SAWGUOLIN XUInstitute of Bioengineering and Nanotechnology, 51 Science Park Road, The Aries, Singapore 117586, Singapore Search for more papers by this author , DOR NGI TINGInstitute of Bioengineering and Nanotechnology, 51 Science Park Road, The Aries, Singapore 117586, Singapore Search for more papers by this author , VINCENT LUARInstitute of Bioengineering and Nanotechnology, 51 Science Park Road, The Aries, Singapore 117586, SingaporeNational University of Singapore, Singapore Search for more papers by this author , and LIN KIAT SAWInstitute of Bioengineering and Nanotechnology, 51 Science Park Road, The Aries, Singapore 117586, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001010Cited by:2 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractA low cost, robust, self-priming and bubble tolerance pneumatically actuated planar micro-pump was demonstrated and characterized. This micro-pump has a simple three-layered structure. The two micro-pump housings were fabricated with polycarbonate, while the actuation membrane which, also acted as the inlet and outlet valves was made form polydimethylsiloxane(PDMS). PDMS displayed desirable mechanical properties including very low Young's modulus, high elongation, biocompatibility and good sealing for the design of this micropump. The use of PDMS as actuation memberanes solved problems of sealing and poor compression ratio associated with most silicon based micro-pumps. Furthermore, polycarbonate material is much easier and cheaper to fabricate than silicon wafer. Using external compressed air and vacuum source for atuation, flow rate near to 1000ul/min of air or liquid has been achieved. The maximum pump head of more than 2m is obtained with water as pumping media. The pump exhibited a linear output flow rate, insensitive to output pressure.Keywords:micro-fluidicmicro-pumpmicro-valvePDMS References Disier Maillefer, Stephan Gamper, Beatrice Frehner, Patrick Balmer. "A High performane Silicon micro-pump for an implantable drug delivery system" MEMS 1999, Orlando, Florida . Google Scholar R. Linnemann, P. Woias, C. D. Senfft, and J. A. Ditterich, " A self-priming and bubble tolerant piezoelectric silicon micro-pump for liquids and gases". The 11th annual international workshop on MEMS. 1998, Heidelberg German, pp. 532-5371 . Google Scholar Hou-Pu Chou, Marc A. Unger, Axel Scherer and Stephen R. Quake "Integrated elastomer fluidic lab-on-a-chip surface patterning and DNA diagnostic" . Google ScholarM. Richter, R. Linnemann and P. Woias, Sensors and Actuators A68, 480 (1998). Google Scholar FiguresReferencesRelatedDetailsCited By 2A pneumatic PDMS micropump with in-plane check valves for disposable microfluidic systemsJunhui Ni, Beizhi Li and Jianguo Yang1 Nov 2012 | Microelectronic Engineering, Vol. 99A planar PDMS micropump using in-contact minimized-leakage check valvesJunhui Ni, Fengliang Huang, Bin Wang, Beizhi Li and Qiao Lin27 August 2010 | Journal of Micromechanics and Microengineering, Vol. 20, No. 9 Recommended Vol. 04, No. 02 Metrics History Keywordsmicro-fluidicmicro-pumpmicro-valvePDMSPDF download