ABSTRACT The different variants of presentation of Electronic Spectroscopy of Diffuse Reflections spectra of superficial titan-oxide structures synthesized by Molecular Layering method on the dispersible solid matrixes were observed. For the characterization of such structures using of Fermi-Dirak statistics is offered. It's shown that mathematical processing of composite spectra with using of Fermi-Dirak distribution function support to spectra separation and allocates the contribution of superficial structures with various coordination of atom-modifier.