Low friction coatings of tenth μm in thickness operating at high temperatures are composed of either metal oxides (PbO, CdO) or alkaline earth metal fluorides (CaF 2, BaF 2). These oxides and fluorides can be associated with other solid lubricant materials such as graphite or silver to extend the service temperature range from room temperature to about 800°C. Sliding contacts can also be lubricated by thin films of solid lubricant materials (silver, calcium fluoride) and Ag/CaF x ( x − 1.85) multilayer structures of 0.1 to a few μm thick produced by sputtering. The friction coefficient of these thin films was deduced from ball-on-disk tribological tests conducted at room temperature and 500°C in room air. The average friction coefficient value of silver and CaF x films in the range 0.14 to 0.42 was dependent on the film thickness and test temperature. The friction coefficient of Ag/CaF x multilayer structures was stable at about 0.35 at room temperature and 500°C. Furthermore, plan-to-plan tribological tests of thick (300 μm) plasma-sprayed coatings (PS-212 type) and CaF x thin films deposited on Cr 3C 2 underlayers were performed in room air at 500°C and 700°C. The friction properties of these thick coatings and thin films were determined and compared. The excellent performance of lubricant thin films demonstrates the interest of sputter-deposited Ag and CaF x films in lubrication of precision tolerance mechanical components operating in hostile environment.