Thin films of sodium cobalt oxide and zinc aluminium oxide were prepared onto ceramic substrates by a bipolar pulsed-dc magnetron sputtering system using a NaCoO2target and a ZnAlO target, respectively, under an argon atmosphere. Energy dispersive spectroscopy analysis revealed that the as-deposited films from the NaCoO2target comprised Na, Co, O elements, while those from the ZnAlO target contained Zn, Al, O elements. Cross-sectional view estimation by the scanning electron microscope indicated that the as-deposited Na-Co-O (NCO) and Zn-Al-O (ZAO) films had the thickness of 0.63 μm and 0.58 μm, respectively. X-ray diffraction analysis showed that the NCO thin films were grown in amorphous phase while the ZAO thin films exhibited hexagonal structure. From thermoelectric properties measurement, the p-NCO and n-ZAO films were found to exhibit the thermoelcectric power factor of 0.03 and 14.39 μW/mK2, respectively. A thermoelectric module made from three pairs of the p-n thin film stripes provided the open-circuit voltage up to 26.0 mV for a temperature difference of 79.3 K. However, the module was unable to produce useful electrical current due to its high internal series resistance contributed from the NCO films.
Read full abstract