Smart Spatial Light Modulator Research Articles

Monolithic integration of a silicon driver circuit onto a lead lanthanum zirconate titanate substrate for smart spatial light modulator fabrication

The monolithic integration of N-channel metal-oxide-semiconductor (NMOS) driver circuits in silicon thin films onto a lead lanthanum zirconate titanate (PLZT) substrate is reported. Two integration methods are compared. Both methods result in NMOS transistors that exhibit electrical properties that are close to those of transistors fabricated in bulk silicon. The characteristics of PLZT modulators driven by thin-film transistors are also similar to those of bulk PLZT modulators. These techniques promise new spatial light modulators of high complexity and performance that good-quality silicon and bulk PLZT can offer.

MOSAIC: a space-multiplexing technique for optical processing of large images

A technique for Fourier processing of images larger than the space-bandwidth products of conventional or smart spatial light modulators and two-dimensional detector arrays is described. The technique involves a spatial combination of subimages displayed on individual spatial light modulators to form a phase-coherent image, which is subsequently processed with Fourier optical techniques. Because of the technique's similarity with the mosaic technique used in art, the processor used is termed an optical MOSAIC processor. The phase accuracy requirements of this system were studied by computer simulation. It was found that phase errors of less than λ/8 did not degrade the performance of the system and that the system was relatively insensitive to amplitude nonuniformities. Several schemes for implementing the subimage combination are described. Initial experimental results demonstrating the validity of the mosaic concept are also presented.

Ferroelectric thin films for Smart Spatial Light Modulator applications

Abstract System, device and material issues for the use of ferroelectric ceramic thin films in the realization of Smart Spatial Light Modulators are considered. Results show that ferroelectric thin films such as PLZT PBN, KTN, and SBN are particularly attractive.

Design issues and development of monolithic silicon/lead lanthanum zirconate titanate integration technologies for smart spatial light modulators

System, device, and material issues for the design and realization of smart spatial light modulators are discussed. Silicon and lead lanthanum zirconate titanate (PLZT) are two promising materials that meet the system requirements. Two different technologies for the integration of Si and PLZT are described. Results show that large-scale smart spatial light modulators can be realized with Si/PLZT technologies.

Deposition and characterization of thin ferroelectric lead lanthanum zirconate titanate (PLZT) films on sapphire for spatial light modulators applications

Ferroelectric lead lanthanum zirconate titanate (PLZT) films are deposited on R-plane sapphire using RF triode magnetron sputtering. Perovskite PLZT films with the desired composition (9/65/35) are obtained using compensated deposition techniques around 500 degrees C and postdeposition annealing at 650 degrees C. The deposited films exhibit good optical and electrooptical properties. The room temperature dielectric constant of the films was 1800 at 10 kHz. The refractive index of the films was in the range of 2.2-2.5. The films showed a quadratic electrooptic effect with R=0.6 x10(-16) m(2)/V(2). The development of PLZT on silicon-on-sapphire smart spatial light modulators using these films is also explored.

Characterization of Ferroelectric Thin Film PLZT(9/65/35) on R-Plane Sapphire

ABSTRACTThe deposition of ferroelectric PLZT on r-plane sapphire using R-F Triode Magnetron Sputtering is reported. R-plane (1102) sapphire is chosen, in spite of its large lattice mismatch to PLZT, because of its capability of integrating MOS silicon circuits with PLZT modulators. Perovskite PLZT films with the desired composition (9/65/35) are obtained using co-deposition techniques around 500°C and post deposition annealing at 650°C. The deposited films exhibit good optical and electro-optical properties. The room temperature dielectric constant of the films was 1800 at 10 Khz. The refractive index of the films was in the range 2.2–2.5. The films showed a quadratic E-O effect with R=0.6×10−16 m2/V2. The films are promising for smart Spatial Light Modulators (SLM) applications.