We demonstrate a high finesse, microfabricated mirror-based, air-gap cavity with volume less than 1 ml, constructed in an array, that can support low-noise microwave generation through optical frequency division. We use the air-gap cavity in conjunction with a 10 nm bandwidth mode-locked laser to generate low phase noise 10 GHz microwaves, exhibiting a phase noise of −95 and −142 dBc/Hz at 100 Hz and 10 kHz offset frequencies, respectively. This is accomplished using the 2-point lock optical frequency division method, where we exploit 40 dB common-mode rejection of two lasers separated by 1.29 THz and locked to the same air-gap cavity. If used with an octave spanning comb, the air-gap cavity is capable of supporting 10 GHz phase noise below −160 dBc/Hz at 10 kHz offset, a level significantly lower than electronic synthesizers. These results show how extremely small optical reference cavities, operated without the benefit of vacuum enclosures or thermal insulation, can, nonetheless, support state-of-the-art microwave phase noise in compact and portable systems.
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