These proceedings arose from the 14th International Workshop on Slow Positron Beam Techniques (SLOPOS14), which was held at Kunibiki Messe, Matsue, Shimane prefecture, Japan, from the 22nd—27th May 2016. Meetings in the SLOPOS series are held every three years.The SLOPOS workshop series has traditionally been devoted to investigations on the production of positron and positronium beams, their fundamental physics and chemistry, and their applications to materials such as metals, semiconductors and soft matter. During the workshop numerous applications using positron and positronium beams were also presented, clearly demonstrating the usefulness of such beams to the determination of surface structure, defect characterization as well as to fundamental scientific studies.For SLOPOS14 the main subjects of the workshop included the following: • Positron transport and beam technology• Pulsed positron beams and positron traps• Defect profiling in bulk and layered structures• Nano structures, porous materials and thin films• Surface and interface analysis• Positronium formation, emission and beams• Positron and positronium interactions with atoms and molecules• Many positrons and anti-hydrogen• Improvement of experimental techniques 106 delegates from 14 countries participated in the SLOPOS14, including 31 student delegates, which was a most encouraging sign for the future. The scientific program comprised 5 plenary talks, 22 invited talks, 32 contributed talks and 46 posters presented during two poster sessions. Student prizes were awarded for the best presented scientific contributions by 4 students from University of College London, Universität der Bundeswehr München and The University of Tokyo.On a sad note, delegates paid tribute to the contributions of our recently deceased colleagues, Prof. A. Seeger, Prof. R.N. West, Prof. T.C. Griffith, and Prof. Z. Tang. Memorial talks were given and a one minute silence was observed before the opening session of workshop in their memory.The workshop would not have been possible without the hard work of the Local Organizing Committee and the International Organizing Committee. We would also like to express our gratitude to the students from Chiba University for their hospitality and efficient support during the workshop.Finally we would like to thank all of the attendees of SLOPOS14 for their scientific contributions to the workshop, and for fruitful discussions in an informal atmosphere.SLOPOS15 will be held in Romania in 2019 and we are all greatly looking forward to the occasion.Masanori Fujinami, Yasuyuki Nagashima, and Brian E. O’Rourke Guest EditorsDecember 2016