We investigate the effect of sidewall slope in hybrid plasmonic slot waveguides on the characteristics of its guided sub- wavelength hybrid modes at the telecommunication wavelength of 1.55 μ.m. The rectangular cross-section of the waveguide turns to a trapezoidal-shape with the increase of the sidewall slope angle and mode attenuation increases gradually. We showed strong mode attenuation for a waveguide with a triangular cross-section. The guided mode properties are improved by increasing the width of low refractive index dielectric slots. These investigations are in a good agreement with the experimental results drawn from a previous study and can be exploited for elucidating the characteristics of the complementary metal oxide semiconductor- compatible hybrid plasmonic slot waveguides.