The hydrodynamic slideway, which is often adopted for machine tools, usually possesses a large friction and induces a lost motion (backlash), hence the positioning and contouring accuracies are decreased. These defects can be overcome if the hydrostatic slide way is adopted, but it is inevitable that the stiffness along the feed direction will become low and the manufacturing cost will increase. The authors have revealed that a proper amount of solid friction should work between the sliding faces in order to satisfy both the accuracy and the stiffness, and it is very important from the point of consistency of performance that the amount of the above frictional force does not vary with an applied vertical load and a given feed rate. The present paper uses the Half-floating Slideway which has a composite property between the hydrodynamic and the hydrostatic slideways. Air is supplied as a lubricant, hence a variation of hydrodynamic effect with the feed can be avoided. Furthermore, a load compensation mechanism which changes supply pressure automatically corresponding to the variation of the vertical load is provided. The principle and the design procedure of these slideways are reported.
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