The emergence of terahertz (THz) nanoscale resonance metasurface devices represents an innovative method for modulating THz waves by utilizing the intense, high-frequency alternating electric field in THz radiation. However, compared to traditional modulation methods that employ electrical, optical, and other techniques, the potential of these devices still necessitates further exploration. In this work, we achieved THz beam-splitting and field-induced nonlinear frequency shifting functions within a single THz nano-metasurface device. The device consists of single split-ring resonators (s-SRRs) with a nanogap on GaAs substrate. The pattern design based on the Pancharatnam–Berry (P-B) phase principle can split the incident wave into three beams. Meanwhile, its frequency shifting capability, which varies with the E-field, has been thoroughly investigated. The device performance was experimentally evaluated by an angle-resolved THz time-domain spectroscopy (THz-TDS) system and a strong-field THz-TDS system. This device could serve as a promising research platform for integrating THz with nano-optics and holds the potential for ultrafast modulation, offering application prospects in radar, wireless communication, and electromagnetic protection.
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