High performance filters in the GHz range are required in communication systems. In this paper, fine electrodes of the order of 0.187 µm width have been fabricated using electron beam lithography, normal lift-off techniques and O2-plasma cleaning system. These techniques have been applied to surface acoustic wave (SAW) filters in the GHz range. We performed experiments with the filters at 5 GHz. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz were obtained. We also describe and demonstrate some new single phase unidirectional transducers (SPUDT) utilizing self-aligned angle evaporation techniques with low loss and no ripples. The experimental results show a directivity of 18.0 dB/transducer at about 500 MHz and 10.0 dB at about 2 GHz.