Micro/nanochannel electroporation can deliver gene/drug into single cell with precise dosage control and much higher cell viability compared to traditional bulk electroporation. However, single cell micro/nanochannel electroporation has the problems of low efficiency and complicated operation. By integrating microfluidic with micro/nanochannel electroporation, a large number of cells can be processed within a short time. In this chapter, we provide a detailed protocol of fabrication microfluidic nanochannel electroporation devices. The fabrication of this microfluidic nanochannel electroporation device integrates soft lithography, DNA combing and imprinting, and micromilling. This device is appropriate for gene/drug delivery to a batch of cells. It has the advantages of both the single cell nanochannel electroporation and microfluidic based cell manipulation. The procedures of device fabrication, holder fabrication, cell trapping, and electroporation are included in this protocol.
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