Abstract This paper describes experiments concerning dimension and surface shape measurement with a single-mode fiber-optic sensor and improvement of the measurement principle. The sensor probe was well designed with a small structure and a compensation network. The novel optical fiber probe arrangement as well as the possibilities for complex measurement problems is explained by measuring an internal screw thread as an example. The size of the fiber-based sensor probe is about 5 mm, which is very suitable for the internal surface measurement of small precision products. The experimental results show that the measurement uncertainty of the internal screw thread minor diameter can reach ±10 μm, and the stability of the measurement system is better than 0.1%. Compared the measurement results obtained by the developed sensor system with those by a Universal Tool Maker’s Microscope, the measurement results of an external screw thread are satisfactory. The maximum deviation of the thread pitch measurement is about 1 μm, and that of the major diameter measurement is better than 3 μm.
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