The resistivity of thin single-crystalline Au and Ag layers is measured during deposition onto Si(111) surfaces at 95 K from zero to several tens of monolayers and for layers from 1.5 to 12 monolayers as a function of temperature. The structure of the layers is monitored by reflection high-energy electron diffraction (RHEED). In Au layers resistance oscillations occur synchronously with RHEED intensity oscillations. They are attributed to periodic variations of the specularity factor. Below 6 monolayers a three- to two-dimensional crossover is observed.
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