Silicon Spatial Light Modulator Research Articles

Design and fabrication of polarization independent LCoS phase modulators with polymer waveplate and analog driving

Abstract Phase-only liquid crystal on silicon (LCoS) spatial light modulators are used in a variety of applications. Despite their wide use, current phase-only LCoS devices are hindered by their single-polarization modulation. We propose a polarization independent LCoS device which uses a polymer quarter-wave plate for polarization conversion. We designed a custom pixel circuit which enables high driving voltage and high pixel grayscale by utilizing an analog driving frame buffer pixel circuit. Our pixel circuit is optimized for small pixel size and the silicon backplanes can be fabricated at a traditional foundry. We demonstrate polarization independent phase modulation through optical beam steering tests for various input polarizations. Our fabricated device lays the foundation for commercial LCoS devices highly suitable for wavelength selective switches, holographic display, wavefront correction, and optical beam shaping.

High-Throughput Two-Photon 3D Printing Enabled by Holographic Multi-Foci High-Speed Scanning.

The emerging two-photon polymerization (TPP) technique enables high-resolution printing of complex 3D structures, revolutionizing micro/nano additive manufacturing. Various fast scanning and parallel processing strategies have been proposed to promote its efficiency. However, obtaining large numbers of uniform focal spots for parallel high-speed scanning remains challenging, which hampers the realization of higher throughput. We report a TPP printing platform that combines galvanometric mirrors and liquid crystal on silicon spatial light modulator (LCoS-SLM). By setting the target light field at LCoS-SLM's diffraction center, sufficient energy is acquired to support simultaneous polymerization of over 400 foci. With fast scanning, the maximum printing speed achieves 1.49 × 108 voxels s-1, surpassing the existing scanning-based TPP methods while maintaining high printing resolution and flexibility. To demonstrate the processing capability, functional 3D microstructure arrays are rapidly fabricated and applied in micro-optics and micro-object manipulation. Our method may expand the prospects of TPP in large-scale micro/nanomanufacturing.

High fidelity laser beam shaping using liquid crystal on silicon spatial light modulators as diffractive neural networks

Spatial light modulators (SLMs) based on liquid crystal on silicon (LCoS) are powerful tools for laser beam shaping as they can be used to dynamically create almost arbitrary intensity distributions. However, laser beam shaping with LCoS-SLMs often suffers from beam shaping artifacts in part caused by unconsidered properties of the LCoS devices: astigmatism that stems from the non-normal incidence of the laser beam on the SLM and the effect commonly referred to as the ’0-th diffraction order’ that is caused by both the crosstalk between neighboring pixels and the direct reflection at the cover glass of the SLM. We here present a method to consider and compensate for these inherent properties of LCoS devices by treating the SLM as a diffractive neural network.

Multi-object distance determination by analysis of CoC variation for dynamic structured light.

A multi-object distance determination method can be achieved by 932 nm structured light with one camera as the data receiver. The structured light generated by a liquid crystal on silicon spatial light modulator (LCoS-SLM) facilitates dynamic image projection on targets. A series of moving light strip images were captured and collected for data analysis. This method lifted the limitation of single-object distance determination and the limitation of the angle requirement between the camera and the light source in the triangulation method. The average error of this method was approximately 3% in the range of 700 mm to 1900 mm away from LCoS-SLM without further optimization. It provides a potential compact design for indoor multi-object distance determination in the future.

Head-mounted adaptive optics visual simulator.

Adaptive optics visual simulation is a powerful tool for vision testing and evaluation. However, the existing instruments either have fixed tabletop configurations or, being wearable, only offer the correction of defocus. This paper proposes a novel head-mounted adaptive optics visual simulator that can measure and modify complex ocular aberrations in real-time. The prototype is composed of two optical modules, one for the objective assessment of aberrations and the second for wavefront modulation, all of which are integrated into a wearable headset. The device incorporates a microdisplay for stimulus generation, a liquid crystal on silicon (LCoS) spatial light modulator for wavefront manipulation, and a Hartmann-Shack wavefront sensor. Miniature optical components and optical path folding structures, together with in-house 3D printed mounts and housing, were adapted to realize the compact size. The system was calibrated by characterizing and compensating the internal aberrations of the visual relay. The performance of the prototype was analyzed by evaluating the measurement and compensation of low-order and higher-order aberrations induced through trial lenses and phase masks in an artificial eye. The defocus curves for a simulated bifocal diffractive lens were evaluated in real eyes. The results show high accuracy while measuring and compensating for the induced defocus, astigmatism, and higher-order aberrations, whereas the MTF analysis shows post-correction resolution of up to 37.5 cycles/degree (VA 1.25). Moreover, the subjective test results show the defocus curves closely matched to a commercial desktop visual simulator.

Fast 2-photon stimulation using holographic patterns.

Two decades after its introduction, optogenetics - a biological technique to control the activity of neurons or other cell types with light - remains a cutting edge and promising tool to study biological processes. Its increasing usage in research varies widely from causally exploring biological mechanisms and neural computations, to neurostimulation and sensory restauration. To stimulate neurons in the brain, a variety of approaches have been developed to generate precise spatiotemporal light patterns. Yet certain constrains still exists in the current optical techniques to activate a neuronal population with both cellular resolution and millisecond precision. Here, we describe an experimental setup allowing to stimulate a few tens of neurons in a plane at sub-millisecond rates using 2-photon activation. A liquid crystal on silicon spatial light modulator (LCoS-SLM) was used to generate spatial patterns in 2 dimensions. The image of the patterns was formed on the plane of a digital micromirror device (DMD) that was used as a fast temporal modulator of each region of interest. Using fluorescent microscopy and patch-clamp recording of neurons in culture expressing the light-gated ion channels, we characterized the temporal and spatial resolution of the microscope. We described the advantages of combining the LCoS-SLM with the DMD to maximize the temporal precision, modulate the illumination amplitude, and reduce background activation. Finally, we showed that this approach can be extended to patterns in 3 dimensions. We concluded that the methodology is well suited to address important questions about the role of temporal information in neuronal coding.

Forward-forward training of an optical neural network.

Neural networks (NNs) have demonstrated remarkable capabilities in various tasks, but their computation-intensive nature demands faster and more energy-efficient hardware implementations. Optics-based platforms, using technologies such as silicon photonics and spatial light modulators, offer promising avenues for achieving this goal. However, training multiple programmable layers together with these physical systems poses challenges, as they are difficult to fully characterize and describe with differentiable functions, hindering the use of error backpropagation algorithm. The recently introduced forward-forward algorithm (FFA) eliminates the need for perfect characterization of the physical learning system and shows promise for efficient training with large numbers of programmable parameters. The FFA does not require backpropagating an error signal to update the weights, rather the weights are updated by only sending information in one direction. The local loss function for each set of trainable weights enables low-power analog hardware implementations without resorting to metaheuristic algorithms or reinforcement learning. In this paper, we present an experiment utilizing multimode nonlinear wave propagation in an optical fiber demonstrating the feasibility of the FFA approach using an optical system. The results show that incorporating optical transforms in multilayer NN architectures trained with the FFA can lead to performance improvements, even with a relatively small number of trainable weights. The proposed method offers a new path to the challenge of training optical NNs and provides insights into leveraging physical transformations for enhancing the NN performance.

Pixel-level phase filters for off-axis shifting of sinc envelope in holographic projection.

Off-axis projection is a common practice for reconstructions of Fourier holograms displayed on liquid crystal on silicon (LCoS) spatial light modulators (SLMs), as it spatially separates the image from the undiffracted light. Binary gratings encoded within the holograms enable maximum angular separation. However, as a result, two mirror images of equal intensities are present in the reconstruction. To introduce asymmetry to the intensity distribution and suppress one of those images, we propose a phase mask with a subpixel pattern. Presented results prove the potential of in-built SLM phase-mask layers for optimizing efficiency of the off-axis holographic projection.

High-speed speckle averaging for phase-only beam shaping in laser materials processing

A phase-only spatial light modulator (SLM) is a powerful tool to shape arbitrary intensity distributions and finds application in various research fields and industry. However, since phase-only beam shaping cannot control the full complex light field, a speckle pattern overlays the shaped target intensity and strongly impairs the result. Several methods have been developed to diminish speckle noise, all of which have their advantages and disadvantages. Usually they offer a compromise between quality and efficiency. We present a method for phase-only beam shaping which achieves near-perfect and highly efficient speckle averaging with a liquid crystal on silicon SLM based on a single phase mask. A galvanometer scanner scans the laser beam over the active area of the SLM to achieve high-speed averaging. The applied angle resulting from the scanning movement is compensated by a proper optical setup to maintain a static target image with speckle averaging out. As an additional benefit of the scanning movement, artifacts from light not diffracted by the SLM disappear in the target plane. The setup is designed for high-energy laser beams as intermediate foci are avoided at all optical components. Besides optical averaging on camera images, we validate our method with ablation experiments where we make a profound analysis of the involved system parameters and the achieved quality. Thereby, it becomes apparent that the proposed method not only stands out by the high-quality results but also by its simplicity in implementation.

Experimentally simulating the beam shaping capabilities of piston-type deformable mirrors using a liquid crystal spatial light modulator

The number of mirror segments, mirror geometry and orientation are essential parameters when assessing the beam-shaping capabilities of deformable mirrors. Here, we use a Liquid Crystal on Silicon Spatial Light Modulator (LCoS-SLM) to mimic the mechanical design of a deformable mirror and quantitatively analyse the effect of the number of mirror segments and their geometrical structure on resulting structured modes. Our approach can be used as a test bed prior to designing a deformable mirror for high power beam shaping.

LCOS-Based 3 × 3 Folded Wavelength Selective Switch With High-Resolution Spectral

We propose and experimentally verify a 3 × 3 folded wavelength selective switch (WSS) scheme based on liquid crystal on silicon spatial light modulator (LCOS-SLM). This scheme adopts a concise double-layer folded structure that greatly reduced the structural complexity of the WSS system by using the same set of optical elements to accomplish twice beam deflection. The presented WSS is for the C-band, insertion loss is less than 13.2 dB, the spectral resolution is 1 GHz, the bandwidth tuning range is 16.25∼3750 GHz.

Fabrication of high-performance copper circuits using laser-induced forward transfer with large receiving gaps based on beam modulation technology

Laser-induced forward transfer (LIFT) technology has been widely used to print 2D/3D structural patterns in the micron level of metals due to its contactless and maskless advantages. Still, it cannot meet the practical needs of the industry due to its drawbacks, such as low efficiency and a small receiving gap. This study proposes a new LIFT by modulating a Gaussian beam into an Arc beam using a liquid crystal on silicon spatial light modulator (LCOS-SLM) to achieve stable preparation of high-performance Cu circuits at large receiving gaps. First, the laser-induced monomer transfer modes of Gaussian beams and arc beams are studied. Then the effects of laser energy density, scanning velocity, and reception gap on the microcircuits prepared by Gaussian beam laser-induced forward transfer (GB-LIFT) and Arc beam laser-induced forward transfer (AB-LIFT) are studied systematically, and suitable process parameters are found. The transfer process of action of AB-LIFT is revealed. Under the optimized process parameters, the flight distance of AB-LIFT is up to 120 μm, which is about twice that of GB-LIFT, when the laser energy density is 1.94 μJ, and the scanning velocity is 3 mm/s. And the height of the microcircuit can be controlled by the number of depositions. It is demonstrated that the AB-LIFT can achieve stable transfer with large receiving gaps and efficiently prepare continuous Cu circuits with high bonding strength and low resistance. The minimum resistivity (7.46 μΩ∙cm) obtained by selecting optimized process parameters is about 4 times that of Cu bulk (1.76 μΩ∙cm). The application of the AB-LIFT method based on the beam modulation technique in microcircuit defect repair is verified.

Detection of the orbital angular momentum state of light using sinusoidally shaped phase grating

We demonstrate a method based on a unique sinusoidally shaped phased grating for efficient and nearly alignment free detection of both signs and modulus of the orbital angular momentum (OAM) of light. OAM detection efficiency is almost the same over the whole grating area. The capability and robustness of this method are demonstrated by detection of optical vortices with OAM topological charge up to 150 using a reflective phase-only liquid crystal on a silicon spatial light modulator.

Towards a solid‐state light detection and ranging system using holographic illumination and time‐of‐flight image sensing

AbstractLight detection and ranging (LIDAR) systems are finding their way into an increasing number of applications including autonomous vehicles. Image sensors based on single‐photon avalanche diode (SPAD) arrays have demonstrated great promise for LIDAR, typically using flood illumination or raster‐scanning of a small spot. Holographic illumination, based on phase‐only liquid crystal on silicon (LCoS) spatial light modulators, has been successfully applied to display systems such as automotive head up displays (HUDs). It holds great promise as the method of illumination for a LIDAR system. We present a novel solid‐state LIDAR architecture using holographic projection and single‐photon detection. We report a simple experiment that demonstrates proof of concept. The results of the experiment show that the novel architecture can improve the depth accuracy of 3D imaging compared to conventional LIDAR systems. We also indicate several key performance advantages of the novel architecture that will increase as the system scales to higher performance.

LCOS-SLM Based Intelligent Hybrid Algorithm for Beam Splitting

The iterative Fourier transform algorithm (IFTA) is widely used in various optical communication applications based on liquid crystal on silicon spatial light modulators. However, the traditional iterative method has many disadvantages, such as a poor effect, an inability to select an optimization direction, and the failure to consider zero padding or phase quantization. Moreover, after years of development, the emergence of various variant algorithms also makes it difficult for researchers to choose one. In this paper, a new intelligent hybrid algorithm that combines the IFTA and differential evolution algorithm is proposed in a novel way. The reliability of the proposed algorithm is verified by beam splitting, and the IFTA and symmetrical IFTA algorithms, for comparison, are introduced. The hybrid algorithm improves the defects above while considering the zero padding and phase quantization of a computer-generated hologram, which optimizes the directional optimization in the diffraction efficiency and the fidelity of the output beam and improves the results of these two algorithms. As a result, the engineers’ trouble in the selection of an algorithm has also been reduced.

Single-path single-shot phase-shifting digital holographic microscopy without a laser light source.

We propose single-path single-shot phase-shifting digital holographic microscopy (SSP-DHM) in which the quantitative phase information of an object wave is acquired without a laser light source. Multiple phase-shifted holograms are simultaneously obtained using a linear polarizer, a liquid crystal on a silicon spatial light modulator (LCoS-SLM), and a polarization-imaging camera. Complex amplitude imaging of a USAF1951 test target and phase imaging of transparent HeLa cells are performed to show its quantitative phase-imaging ability. We also conduct an experiment for the motion-picture imaging of transparent particles to highlight the single-shot imaging ability of SSP-DHM.

Texturing of Omniphobic Surface on Polymer Using Laser Interference Processing

Omniphobic surface, which has both hydrophobicity and oleophobicity, is needed as a technique of industrial application because liquid in the environment is a complex mixture of water and oil. In this study, polymer surfaces were textured using laser interferometry to obtain the porous surfaces required for omniphobic surface. An optical unit was fabricated from a liquid crystal on a silicon-spatial light modulator, a collimated lens, a mask with two holes, a beam expander, and an aspheric condensing lens. After coupling the prepared porous surface, lubricating oil was applied. The sliding speed and sliding durability were shown to be optimized by the depth of grooves and surface roughness, processing conditions were demonstrated where water and oleic acid slide off at an inclination angle of 10°.

LCOS Spatial Light Modulator for Digital Holography

Liquid crystal on silicon (LCOS) spatial light modulator (SLM) is the most widely used optical engine for digital holography. This paper aims to provide an overview of the applications of phase-only LCOS in two-dimensional (2D) holography. It begins with a brief introduction to the holography theory along with its development trajectory, followed by the fundamental operating principle of phase-only LCOS SLMs. Hardware performance of LCOS SLMs (in terms of frame rate, phase linearity and flicker) and related experimental results are presented. Finally, potential improvements and applications are discussed for futuristic holographic displays. Full Text: PDF ReferencesM. Wolfke, Physikalische Zeitschrift 21, 495 (1920). DirectLink D. Gabor, "A New Microscopic Principle", Nature 161, 777 (1948). CrossRef H. Haken, "Laser Theory", Light and Matter 5, 14 (1970). CrossRef S. Benton, "Selected Papers on Three-dimensional displays", SPIE Press (2001). DirectLink X. 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Speckle-free laser projection structured illumination microscopy based on a digital micromirror device

In the structured illumination microscopy (SIM) family, interferometric implementations using traditional physical gratings or advanced liquid crystal on silicon spatial light modulators are popular but have the disadvantages of expensive and limited speed. A promising alternative of a digital micromirror device (DMD) has improved the situation for its lower cost and higher speed, furthermore, it has contributed to the proposal of a simple and compact projection DMD-SIM. However, the projection DMD-SIM method is accused of erroneously measuring the resolution because of the scattering characteristic of gold beads, despite the inferior experimental resolution that is because of the low fringe contrast and the resulting low signal-to-noise ratio (SNR). As an improvement, we use a high-brightness laser for illumination to achieve higher SNR, and the accompanying problems of speckle and inhomogeneity originating from the laser’s high coherence are solved by a high-frequency phase-randomization deformable mirror in conjunction with a square-core multimode fiber, which does not limit the image acquisition speed and with fewer energy losses compared to the existing methods. Also, in terms of the problem of low SNR, we apply a parallel-iteration Richardson–Lucy deconvolution algorithm for SIM reconstruction to further improve the imaging performance based on ensuring the resolution. Based on these advances, we image fluorescent nanoparticles and other non-biological and biological fluorescent samples, and the experimental results demonstrate the improved imaging performance of our modified system.

Simple method to evaluate the pixel crosstalk caused by fringing field effect in liquid-crystal spatial light modulators

In this work we provide a simple experimental method to measure and evaluate the pixel crosstalk in phase-only liquid-crystal displays caused by the fringing field effect. The technique is a reverse engineering method that does not require information about the microscopic physical parameters of the liquid-crystal material or details of the fabrication and electronics of the display. Instead, it is based on the overall effect on the diffraction efficiency of displayed binary phase gratings as a function of the addressed gray level. We show how the efficiency of the zero (DC) and first diffraction orders provides valuable information enough to identify and quantify the pixel crosstalk. The technique is demonstrated with a modern phase-only liquid-crystal on silicon (LCOS) spatial light modulator (SLM), illustrating the limitations that this effect imposes to the spatial resolution of the device and providing quantitative measurement of the impact on the diffraction efficiency.