In this work enhancement of H2/CO selectivity of GaN sensors coated with amorphous microporous silicon oxycarbide (SiOC) filter layer has been studied. Amorphous SiOC ceramic has been synthesized by pyrolysis of vinyl-functionalized polysiloxane at 700 °C under argon. N2-adsorption measurement confirms formation of microporous SiOC ceramic. SiOC layer with a thickness of about 6 µm was coated on GaN sensor substrate after two-fold coating/pyrolysis steps. Transient response characteristics and sensor signals of uncoated GaN and SiOC-coated GaN sensors were measured towards H2 (50, 500 and 1000 ppm) and CO (50, 70 and 100 ppm) in nitrogen at 400 °C. Uncoated GaN showed high sensor signal towards both H2 and CO whereas for SiOC-coated GaN almost no sensing towards CO was found.
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