Silicon Nitride Photonic Integrated Circuits Research Articles

300-nm-thick, ultralow-loss silicon nitride photonic integrated circuits by 8-in. foundry production

Silicon nitride (Si3N4) photonic integrated circuits are rapidly developing in recent decades. The low loss of Si3N4 attracts significant attention and facilitates a wide range of applications in integrated photonics. In this work, we demonstrate the foundry fabrication of a 300-nm-thick 8-in. wafer-scale Si3N4 platform, with a microresonator intrinsic quality factor of up to 15×106, corresponding to an ultralow loss of 2.2 dB/m. Leveraging this platform, we develop a mature process design kit, achieving a single-mode waveguide propagation loss of less than 5 dB/m, an edge coupler loss of 1.3 dB, and an insertion loss of 0.07 dB for multimode interference couplers. Utilizing the processed Si3N4 chip, we realize a hybrid integrated tunable external cavity laser with a tuning range from 1534 to 1602 nm, a record-high side-mode suppression ratio of up to 76 dB, an optical power of 26 mW, and an intrinsic linewidth of down to 314 Hz. Our work lays a solid foundation for the further development of applications, including nonlinear optics, quantum optics, optical communications, and ranging.

Frequency stabilization of C-band semiconductor lasers through a SiN photonic integrated circuit

Integrated semiconductor lasers represent essential building blocks for integrated optical components and circuits and their stability in frequency is fundamental for the development of numerous frontier applications and engineering tasks. When dense optical circuits are considered, the stability of integrated laser sources can be impaired by the thermal cross-talk generated by the action of neighboring components, leading to a deterioration of the long-term system performance (on the scale of seconds). In this work we show the design and the experimental characterization of a silicon nitride photonic integrated circuit (PIC) that is able to frequency stabilize 16 semiconductor lasers, simultaneously. A stabilized 50 GHz-spaced two-channel system is demonstrated through the detection of the related beating note and the stability of the resulting waveform is characterized via the use of artificially induced thermal cross-talk stimuli.

Micro-Ring Resonator Assisted Photothermal Spectroscopy of Water Vapor.

We demonstrated, for the first time, micro-ring resonator assisted photothermal spectroscopy measurement of a gas phase sample. The experiment used a telecoms wavelength probe laser that was coupled to a silicon nitride photonic integrated circuit using a fibre array. We excited the photothermal effect in the water vapor above the micro-ring using a 1395 nm diode laser. We measured the 1f and 2f wavelength modulation response versus excitation laser wavelength and verified the power scaling behaviour of the signal.

High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay

Efficient fiber-chip coupling interfaces are critically important for integrated photonics. Since surface gratings diffract optical signals vertically out of the chip, these couplers can be placed anywhere in the circuit allowing for wafer-scale testing. While state-of-the-art grating couplers have been developed for silicon-on-insulator (SOI) waveguides, the moderate index contrast of silicon nitride (SiN) presents an outstanding challenge for implementing efficient surface grating couplers on this platform. Due to the reduced grating strength, a longer structure is required to radiate the light from the chip which produces a diffracted field that is too wide to couple into the fiber. In this work, we present a novel grating coupler architecture for silicon nitride photonic integrated circuits that utilizes an amorphous silicon (α-Si) overlay. The high refractive index of the α-Si overlay breaks the coupler’s vertical symmetry which increases the directionality. We implement subwavelength metamaterial apodization to optimize the overlap of the diffracted field with the optical fiber Gaussian mode profile. Furthermore, the phase of the diffracted beam is engineered to focalize the field into an SMF-28 optical fiber placed 55 µm above the surface of the chip. The coupler was designed using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations supported by genetic algorithm optimization. Our grating coupler has a footprint of 26.8 × 32.7 µm2 and operates in the O-band centered at 1.31 μm. It achieves a high directionality of 85% and a field overlap of 90% with a target fiber mode size of 9.2 µm at the focal plane. Our simulations predict a peak coupling efficiency of − 1.3 dB with a 1-dB bandwidth of 31 nm. The α-Si/SiN grating architecture presented in this work enables the development of compact and efficient optical interfaces for SiN integrated photonics circuits with applications including optical communications, sensing, and quantum photonics.

Photonic-electronic integrated circuit-based coherent LiDAR engine

Chip-scale integration is a key enabler for the deployment of photonic technologies. Coherent laser ranging or FMCW LiDAR, a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range, and immunity to interference. However, wafer-scale integration of these systems has been challenged by stringent requirements on laser coherence, frequency agility, and the necessity for optical amplifiers. Here, we demonstrate a photonic-electronic LiDAR source composed of a micro-electronic-based high-voltage arbitrary waveform generator, a hybrid photonic circuit-based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide amplifier. Importantly, all systems are realized in a wafer-scale manufacturing-compatible process comprising III-V semiconductors, silicon nitride photonic integrated circuits, and 130-nm SiGe bipolar complementary metal-oxide-semiconductor (CMOS) technology. We conducted ranging experiments at a 10-meter distance with a precision level of 10 cm and a 50 kHz acquisition rate. The laser source is turnkey and linearization-free, and it can be seamlessly integrated with existing focal plane and optical phased array LiDAR approaches.

Broadband 2 × 2 multimode-interference coupler on the silicon-nitride platform.

In this paper, we present the design, optimization, and implementation of a sub-wavelength grating (SWG) multi-mode interference coupler (MMI) on the silicon nitride photonic integrated circuit (PIC) platform with a significantly enhanced bandwidth compared to the conventional MMI. We extend the SWG MMI theory, previously presented for the silicon-on-insulator platform, to the Si3N4/SiO2 platform. Our approach involves an initial parameter optimization for a non-paired design, followed by a shift to a paired design that offers a smaller footprint and a broader bandwidth. The optimized SWG MMI exhibits a 1 dB bandwidth of 300 nm for both the insertion loss and power imbalance, making it a significant addition to silicon nitride photonics.

Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits.

Alignment is critical for efficient integration of photonic integrated circuits (PICs), and microelectromechanical systems (MEMS) actuators have shown potential to tackle this issue. In this work, we report MEMS positioning actuators designed with the ultimate goal of aligning silicon nitride (SiN) waveguides either to different outputs within a SiN chip or to active chips, such as lasers and semiconductor optical amplifiers. For the proof-of-concept, suspended SiN waveguides implemented on a silicon-on-insulator wafer were displaced horizontally in the direction of light propagation to close an initial gap of 6.92 µm and couple the light to fixed output waveguides located on a static section of the chip. With the gap closed, the suspended waveguides showed ∼ 345 nm out-of-plane misalignment with respect to the fixed waveguides. The suspended waveguides can be displaced laterally by more than ±2 µm. When the waveguides are aligned and the gap closed, an average loss of -1.6 ± 0.06 dB was achieved, whereas when the gap is closed with a ± 2 µm lateral displacement, a maximum average loss of ∼ -19.00 ± 0.62 dB was obtained. The performance of this positioner does not only pave the way for active chip alignment, but it could also be considered for optical switching applications.

Hybrid Silicon Nitride Photonic Integrated Circuits Covered by Single-Walled Carbon Nanotube Films.

The integration of low-dimensional materials with optical waveguides presents promising opportunities for enhancing light manipulation in passive photonic circuits. In this study, we investigate the potential of aerosol-synthesized single-walled carbon nanotube (SWCNT) films for silicon nitride photonic circuits as a basis for developing integrated optics devices. Specifically, by measuring the optical response of SWCNT-covered waveguides, we retrieve the main SWCNT film parameters, such as absorption, nonlinear refractive, and thermo-optic coefficients, and we demonstrate the enhancement of all-optical wavelength conversion and the photoresponse with a 1.2 GHz bandwidth.

Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces.

Silicon nitride (Si3N4) is a versatile waveguide material platform for CMOS foundry-based photonic integrated circuits (PICs) with low loss and high-power handling. The range of applications enabled by this platform is significantly expanded with the addition of a material with large electro-optic and nonlinear coefficients such as lithium niobate. This work examines the heterogeneous integration of thin-film lithium-niobate (TFLN) on silicon-nitride PICs. Bonding approaches are evaluated based on the interface used (SiO2, Al2O3 and direct) to form hybrid waveguide structures. We demonstrate low losses in chip-scale bonded ring resonators of 0.4 dB/cm (intrinsic Q = 8.19 × 105). In addition, we are able to scale the process to demonstrate bonding of full 100-mm TFLN wafers to 200-mm Si3N4 PIC wafers with high layer transfer yield. This will enable future integration with foundry processing and process design kits (PDKs) for applications such as integrated microwave photonics and quantum photonics.

Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits

The foundry development of integrated photonics has revolutionized today’s optical interconnect and datacenters. Over the last decade, we have witnessed the rising of silicon nitride (Si3N4) integrated photonics, which is currently transferring from laboratory research to foundry manufacturing. The development and transition are triggered by the ultimate need for low optical loss offered by Si3N4, which is beyond the reach of silicon and III-V semiconductors. Combined with modest Kerr nonlinearity, tight optical confinement, and dispersion engineering, Si3N4 has today become the leading platform for linear and Kerr nonlinear photonics, and it has enabled chip-scale lasers featuring ultralow noise on par with table-top fiber lasers. However, so far all the reported fabrication processes of tight-confinement, dispersion-engineered Si3N4 photonic integrated circuits (PICs) with optical loss down to few dB/m have only been developed on 4-inch (100 mm diameter) or smaller wafers. Yet, to transfer these processes to established CMOS foundries that typically operate 6-inch or even larger wafers, challenges remain. In this work, we demonstrate the first foundry-standard fabrication process of Si3N4 PICs with only 2.6 dB/m loss, thickness above 800 nm, and near 100% fabrication yield on 6-inch (150 mm diameter) wafers. Such thick and ultralow-loss Si3N4 PIC enables low-threshold generation of soliton frequency combs. Merging with advanced heterogeneous integration, active ultralow-loss Si3N4 integrated photonics could pave an avenue to addressing future demands in our increasingly information-driven society.

Routing Single Photons from a Trapped Ion Using a Photonic Integrated Circuit

Trapped ions are promising candidates for nodes of a scalable quantum network due to their long-lived qubit coherence times and high-fidelity single- and two-qubit gates. Future quantum networks based on trapped ions will require a scalable way to route photons between different nodes. Photonic integrated circuits from fabrication foundries provide a compact solution to this problem. However, these circuits typically operate at telecommunication wavelengths that are incompatible with the strong dipole emissions of trapped ions. In this work, we demonstrate the routing of single photons from a trapped ion using a photonic integrated circuit. We employ quantum frequency conversion to match the emission of the ion to the operating wavelength of a foundry-fabricated silicon nitride photonic integrated circuit, achieving a total transmission of 31.0% \ifmmode\pm\else\textpm\fi{} 0.9% through the device. Using programmable phase shifters, we switch the single photons between the output channels of the circuit and demonstrate a 50:50 beam splitting condition. These results constitute an important step towards programmable routing and entanglement distribution in large-scale quantum networks and distributed quantum computers.

Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit

Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit

SiN foundry platform for high performance visible light integrated photonics

We present a high performance silicon nitride photonic integrated circuit platform operating at visible wavelengths, accessible through the commercial foundry, LIGENTEC. Propagation losses were measured across the visible spectrum from 450 nm to 850 nm. For wavelengths above 630 nm, losses were <1 dB/cm in TE and <0.5 dB/cm in TM. Additionally, sets of single mode waveguide-coupled ring resonators across three separate chips were tested and analysed. A peak intrinsic Q factor of 3.69 × 106 was measured for a single resonance at ∼635.3 nm, with an average value of 2.28 × 106 recorded over 10 peaks in a 3 nm tuning range. Analyses of the loss and coupling, as functions of bus-ring coupling gap and waveguide width, are also presented. High confinement, low loss devices realised on the chip-scale in a wide-bandgap material like silicon nitride are increasingly important for the next generation of integrated optical devices operating at visible wavelengths.

Multi-color flow cytometer with PIC-based structured illumination.

We demonstrate a flow cytometer in which structured light illumination is used to attribute fluorescent and scattering signals to their excitation wavelength. A suitable multi-color light source emitting structured illumination patterns at 405, 488, 561 and 640 nm is developed based on a silicon nitride photonic integrated circuit and cytometry experiments are conducted with calibration beads. Performance metrics of the novel cytometer are compared with those of a mature, commercial device. While the experimental device still features a slightly higher sensitivity floor than the commercial one, all but the most weakly stained beads can be categorized. These promising results validate the feasibility of the proposed concept.

Angled Flip-Chip Integration of VCSELs on Silicon Photonic Integrated Circuits

An investigation of angled flip-chip integration of a singlemode 850 nm vertical-cavity surface-emitting laser (VCSEL) on a silicon nitride photonic integrated circuit (PIC) is presented. Using numerical FDTD simulations, we consider the conditions under which the VCSEL can be integrated at an angle over a grating coupler with high coupling efficiency and low optical feedback. With both coupling efficiency and feedback decreasing with increasing angle, there is a trade-off. With co-directional coupling, first-order diffraction loss sets in at a critical angle, which further reduces the coupling efficiency. No such critical angle exists for contra-directional coupling. We also experimentally demonstrate angled flip-chip integration of GaAs-based 850 nm single transverse and polarization mode VCSELs over grating couplers on a silicon-nitride PIC. At the output grating coupler, light is either collected by an optical fiber or converted to a photocurrent using a flip-chip integrated GaAs-based photodetector. The latter forms an on-PIC optical link. We measured an insertion loss of 21.9, 17.6 and 20.1 dB with a singlemode fiber, multimode fiber and photodetector over the output grating coupler, respectively.

A Review of Capabilities and Scope for Hybrid Integration Offered by Silicon-Nitride-Based Photonic Integrated Circuits.

In this review we present some of the recent advances in the field of silicon nitride photonic integrated circuits. The review focuses on the material deposition techniques currently available, illustrating the capabilities of each technique. The review then expands on the functionalisation of the platform to achieve nonlinear processing, optical modulation, nonvolatile optical memories and integration with III-V materials to obtain lasing or gain capabilities.

Compact, spatial-mode-interaction-free, ultralow-loss, nonlinear photonic integrated circuits

Multi-mode waveguides are ubiquitously used in integrated photonics. Although interaction among different spatial waveguide eigenmodes can induce novel nonlinear phenomena, spatial mode interaction is typically undesired. Adiabatic bends, such as Euler bends, have been favoured to suppress spatial mode interaction. Here, we adapt and optimize Euler bends to build compact racetrack microresonators based on ultralow-loss, multi-mode, silicon nitride photonic integrated circuits. The racetrack microresonators feature a footprint of only 0.21 mm2 for 19.8 GHz free spectral range, suitable for tight photonic integration. We quantitatively investigate the suppression of spatial mode interaction in the racetrack microresonators with Euler bends. We show that the low optical loss rate (15.5 MHz) is preserved, on par with the mode interaction strength (25 MHz). This results in an unperturbed microresonator dispersion profile. We further generate a single dissipative Kerr soliton of 19.8 GHz repetition rate without complex laser tuning schemes or auxiliary lasers. The optimized Euler bends and racetrack microresonators can be building blocks for integrated nonlinear photonic systems, as well as linear circuits for programmable processors or photonic quantum computing.

Low loss modified Bezier bend waveguide.

We proposed and experimentally demonstrated a low loss modified Bezier bend for silicon and silicon nitride photonic integrated circuits. Both simulation and experimental results confirm that the modified Bezier bend can effectively reduce the bend loss for silicon and silicon nitride platform. At a bend radius of 1 µm, the reduction of bend loss from 0.367 dB/90° of circular bend and 0.35 dB/90° of traditional Bezier bend to 0.117 dB/90° of modified Bezier bend for silicon platform was experimentally demonstrated. For a 12-µm radius silicon nitride bend, the bend loss reduction from 0.65 dB/90° of circular bend and 0.575 dB/90° of traditional Bezier bend to 0.32 dB/90° was achieved. The proposed modified Bezier bend design can also be applied to other material systems, such as InP, LN, GaAs, etc., to effectively reduce the bend waveguide loss.

Passive Photonic Integrated Circuits Elements Fabricated on a Silicon Nitride Platform.

The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology—basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.

Silicon Nitride External Cavity Laser With Alignment Tolerant Multi-Mode RSOA-to-PIC Interface

We demonstrate an external cavity laser formed by combining a silicon nitride photonic integrated circuit with a reflective semiconductor optical amplifier. The laser uses an alignment tolerant edge coupler formed by a multi-mode waveguide splitter right at the edge of the silicon nitride chip that relaxes the required alignment to the III-V gain chip and equally splits the power among its two output waveguides. Both the ground and first order mode are excited in the coupler and reach the quadrature condition at the waveguide junction, ensuring equal power to be coupled to both. Two high-quality-factor ring resonators arranged in Vernier configuration close a Sagnac loop between the two waveguides. In addition to wideband frequency tuning, they result in a longer effective cavity length. The alignment tolerant coupler increases the alignment tolerance in the two directions parallel to the chip surface by a factor 3 relative to conventional edge couplers, making it ideal for gain chip integration via pick-and-place technology. Lasing is maintained in a misalignment range of ±6 μm in the direction along the edge of the chip. A Lorentzian laser linewidth of 39 kHz is achieved.