Silicon Microring Resonator Research Articles

Integrated non-reciprocal magneto-optics with ultra-high endurance for photonic in-memory computing

AbstractProcessing information in the optical domain promises advantages in both speed and energy efficiency over existing digital hardware for a variety of emerging applications in artificial intelligence and machine learning. A typical approach to photonic processing is to multiply a rapidly changing optical input vector with a matrix of fixed optical weights. However, encoding these weights on-chip using an array of photonic memory cells is currently limited by a wide range of material- and device-level issues, such as the programming speed, extinction ratio and endurance, among others. Here we propose a new approach to encoding optical weights for in-memory photonic computing using magneto-optic memory cells comprising heterogeneously integrated cerium-substituted yttrium iron garnet (Ce:YIG) on silicon micro-ring resonators. We show that leveraging the non-reciprocal phase shift in such magneto-optic materials offers several key advantages over existing architectures, providing a fast (1 ns), efficient (143 fJ per bit) and robust (2.4 billion programming cycles) platform for on-chip optical processing.

Multi-task photonic reservoir computing: wavelength division multiplexing for parallel computing with a silicon microring resonator

Nowadays, as the ever-increasing demand for more powerful computing resources continues, alternative advanced computing paradigms are under extensive investigation. Significant effort has been made to deviate from conventional Von Neumann architectures. In-memory computing has emerged in the field of electronics as a possible solution to the infamous bottleneck between memory and computing processors, which reduces the effective throughput of data. In photonics, novel schemes attempt to collocate the computing processor and memory in a single device. Photonics offers the flexibility of multiplexing streams of data not only spatially and in time, but also in frequency or, equivalently, in wavelength, which makes it highly suitable for parallel computing. Here, we numerically show the use of time and wavelength division multiplexing (WDM) to solve four independent tasks at the same time in a single photonic chip, serving as a proof of concept for our proposal. The system is a time-delay reservoir computing (TDRC) based on a microring resonator (MRR). The addressed tasks cover different applications: Time-series prediction, waveform signal classification, wireless channel equalization, and radar signal prediction. The system is also tested for simultaneous computing of up to 10 instances of the same task, exhibiting excellent performance. The footprint of the system is reduced by using time-division multiplexing of the nodes that act as the neurons of the studied neural network scheme. WDM is used for the parallelization of wavelength channels, each addressing a single task. By adjusting the input power and frequency of each optical channel, we can achieve levels of performance for each of the tasks that are comparable to those quoted in state-of-the-art reports focusing on single-task operation. We also quantify the memory capacity and nonlinearity of each parallelized RC and relate these properties to the performance of each task. Finally, we provide insight into the impact of the feedback mechanism on the performance of the system.

Demonstration of high-frequency self-pulsing oscillations in an active silicon micro-ring cavity

We experimentally investigated the self-pulsing (SP) oscillations induced by the thermo-optic, free carrier, and Kerr nonlinear effects in integrated active silicon microring resonators. We demonstrate high frequency self-pulsing oscillations (up to 30 MHz) by applying a few millivolts of reverse bias voltage to the PIN junction of the active cavity. We illustrate that the shape of those oscillations (i.e., frequency and duty cycle) can be controlled by adjusting the CW input power and applying a reverse bias voltage to the PIN junction for carrier removal. This controlling is important for synchronizing the cavity which is crucial for neural network applications. Furthermore, we utilize a mathematical model for visualizing the stability regions by numerically studying coupled mode theory in silicon microcavity under different conditions.

Broadband continuous-wave mid-infrared wavelength conversion in high-Q silicon microring resonators

Broadband continuous-wave mid-infrared wavelength conversion in high-<i>Q</i> silicon microring resonators

Silicon microring resonator modulator based on PIN junction: performance optimization

Silicon microring resonator modulator based on PIN junction: performance optimization

Symmetric silicon microring resonator optical crossbar array for accelerated inference and training in deep learning

Photonic integrated circuits are emerging as a promising platform for accelerating matrix multiplications in deep learning, leveraging the inherent parallel nature of light. Although various schemes have been proposed and demonstrated to realize such photonic matrix accelerators, the in situ training of artificial neural networks using photonic accelerators remains challenging due to the difficulty of direct on-chip backpropagation on a photonic chip. In this work, we propose a silicon microring resonator (MRR) optical crossbar array with a symmetric structure that allows for simple on-chip backpropagation, potentially enabling the acceleration of both the inference and training phases of deep learning. We demonstrate a 4×4 circuit on a Si-on-insulator platform and use it to perform inference tasks of a simple neural network for classifying iris flowers, achieving a classification accuracy of 93.3%. Subsequently, we train the neural network using simulated on-chip backpropagation and achieve an accuracy of 91.1% in the same inference task after training. Furthermore, we simulate a convolutional neural network for handwritten digit recognition, using a 9×9 MRR crossbar array to perform the convolution operations. This work contributes to the realization of compact and energy-efficient photonic accelerators for deep learning.

Simultaneous optical power insensitivity and non-volatile wavelength trimming using 2D In4/3P2Se6 integration in silicon photonics

In integrated photonic circuits, microring resonators are essential building blocks but are susceptible to phase errors due to fabrication imperfections and optical power fluctuations. Conventional active phase tuning methods are power-intensive and challenging to integrate into densely packed photonic chips. This study proposes a solution by integrating a thin 2D layer of In4/3P2Se6 (InPSe) onto silicon microring resonators (Si-MRR). This approach mitigates sensitivity to laser power and achieves non-volatile wavelength trimming. Under bias voltage, the device exhibits electro-optic behavior, offering a non-volatile phase trimming rate of −2.62 pm/V to −4.62 pm/V, corresponding to InPSe thicknesses of 45 nm to 120 nm. Low optical losses of 0.0091 to 0.0361 dB/μm were also measured, corresponding to thicknesses of 30 nm to 120 nm. The devices demonstrate stable in-situ resonance wavelength stabilization and bidirectional trimming, ensuring cyclic stability for non-volatile phase control. This advancement enhances the performance of silicon photonics across diverse applications, facilitating high-capacity, high-power operation in compact designs.

Design and analysis of all-optical reversible adder and subtractor using silicon microring resonator

Design and analysis of all-optical reversible adder and subtractor using silicon microring resonator

Numerical Analysis of All-Optical Binary to Gray Code Converter Using Silicon Microring Resonator

Numerical Analysis of All-Optical Binary to Gray Code Converter Using Silicon Microring Resonator

Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2 µm wave band.

Silicon photonic-integrated circuits (PICs) operating in the 2 µm wave band are of great interest for spectroscopic sensing, nonlinear optics, and optical communication applications. However, the performance of silicon PICs in this wave band lags far behind the conventional optical communication band (1310/1550 nm). Here we report the realization of a low-loss waveguide and an ultrahigh-Q microring resonator in the 2 µm wave band on a standard 200 mm silicon photonic platform. The single-mode strip waveguide fabricated on a 220 nm-thick silicon device layer has a record-low propagation loss ∼0.2 dB/cm. Based on the low-loss waveguide, we demonstrate an ultrahigh-Q microring resonator with a measured loaded Q-factor as high as 1.1 × 106 and intrinsic Q-factor of 2 × 106, one order of magnitude higher than prior silicon resonators operating in the same wave band. The extinction ratio of the resonator is higher than 22 dB. These high-performance silicon photonic components pave the way for on-chip sensing applications and nonlinear optics in the 2 µm wave band.

Characteristics of highly sensitive hydrogen gas sensor based on Pt-SiO2/Si microring resonator

A hydrogen gas sensor based on a silicon microring resonator (MRR) with a Pt–SiO2 thin film as a hydrogen-sensitive film is proposed and investigated to realize a high-sensitivity hydrogen sensor. The sensor detects hydrogen on the basis of the resonant wavelength shift caused by the reaction heat generated in the Pt–SiO2 film. In the hydrogen exposure measurement, resonant wavelength shifts of approximately 5.0 and 2.4 nm were observed at hydrogen concentrations of 4.0 and 0.4 vol%, respectively, showing the high sensitivity of the proposed sensor. In addition, an MRR sensor with an upper Al2O3 cladding layer is proposed and its higher sensitivity is theoretically demonstrated.

Measurement of the Nonlinear Loss and Effective Free Carrier Lifetime in Silicon Microring Resonators

Measurement of the Nonlinear Loss and Effective Free Carrier Lifetime in Silicon Microring Resonators

High-Q silicon microring resonator with ultrathin sub-wavelength thicknesses for sensitive gas sensing

Microring resonators, due to their ability to enable robust strong light–matter interactions within their structures, have garnered substantial interest for their utility in sensing applications, particularly in the realm of gas detection. However, there is an inherent trade-off between a microring resonator's quality factor and confinement factor in the air, making it difficult to balance them. Here, we demonstrate a novel solution with a suspended nanomembrane silicon (SNS) microring resonator. This resonator has ultrathin sub-wavelength thicknesses (0.02–0.03λ), which breaks the trade-off, offering not only a high intrinsic quality factor of 6 × 105 but also an extraordinarily large confinement factor of ∼80% in the air at mid-infrared wavelengths. As a proof-of-concept demonstration, we applied the SNS microring resonator for CO2 gas sensing, exhibiting a sensitivity over 10 times higher than conventional silicon resonators and a large dynamic sensing range spanning from 0% to 100% with a high resolution of better than 4% and chemical specificity. By virtue of its excellent properties, the SNS microring resonator has the potential to open new possibilities for the development of unprecedented nanophotonic integrated circuits, with a broad range of applications in on-chip sensing scenarios.

Gassing up potential for silicon microring resonators

Novel design opens possibilities for nanophotonic integrated circuits, on-chip sensitive gas sensing, and more.

Time delay reservoir computing with a silicon microring resonator and a fiber-based optical feedback loop

Silicon microring resonators serve as critical components in integrated photonic neural network implementations, owing to their compact footprint, compatibility with CMOS technology, and passive nonlinear dynamics. Recent advancements have leveraged their filtering properties as weighting functions, and their nonlinear dynamics as activation functions with spiking capabilities. In this work, we investigate experimentally the linear and nonlinear dynamics of microring resonators for time delay reservoir computing, by introducing an external optical feedback loop. After effectively mitigating the impact of environmental noise on the fiber-based feedback phase dependencies, we evaluate the computational capacity of this system by assessing its performance across various benchmark tasks at a bit rate of few Mbps. We show that the additional memory provided by the optical feedback is necessary to achieve error-free operation in delayed-boolean tasks that require up to 3 bits of memory. In this case the microring was operated in the linear regime and the photodetection was the nonlinear activation function. We also show that the Santa Fe and Mackey Glass prediction tasks are solved when the microring nonlinearities are activated. Notably, our study reveals competitive outcomes even when employing only 7 virtual nodes within our photonic reservoir. Our findings illustrate the silicon microring’s versatile performance in the presence of optical feedback, highlighting its ability to be tailored for various computing applications.

Development and analysis of all-optical multipurpose OR, XOR, NAND, AND, NOR, and XNOR logic gates in a single unit using silicon microring resonator

Development and analysis of all-optical multipurpose OR, XOR, NAND, AND, NOR, and XNOR logic gates in a single unit using silicon microring resonator

On-Chip Fabrication-Tolerant Exceptional Points Based on Dual-Scatterer Engineering.

The intriguing and anomalous optical characteristics of exceptional points (EPs) in optical resonators have attracted significant attention. While EP-related phenomena have been observed by perturbing resonators with off-chip components, implementing EPs fully on-chip remains challenging due to their extreme susceptibility to fabrication errors. In this Letter, we propose a succinct and compact approach to reach EP in an on-chip integrated silicon microring resonator by manipulating the evolution of backscatterings with two nanocylinders of disparate diameters. The theoretical analysis unveils that the fabrication constraints could be significantly relieved by increasing the difference in diameters of the nanocylinders. The evolution from non-EP to EP is traced experimentally through the step-by-step tuning of the angular and radial positions of nanocylinders. The proposed method opens a pathway toward the on-chip high-density integration of non-Hermitian devices.

Multi-shot near-infrared femtosecond laser tuning of silicon microring resonators

We studied multi-shot femtosecond laser surface modification as a permanent tuning technique for obtaining the desired resonance wavelengths for silicon microring resonators. In this multi-shot tuning approach, each microring resonator was irradiated with 10 or 100 laser pulses in the same location of the waveguide with selected laser fluence. The laser beam has 800 nm wavelength, 130 fs pulse duration, a Gaussian spatial profile with a beam waist radius of 13.1μm, and pulse energies of 12 nJ to 186 nJ to generate the applied range of laser fluences. The silicon microring resonators used in the study have a 15μm diameter and are coupled to a waveguide of 500 nm in width with a gap of 260 nm. We found that the multi-shot tuning curves (resonance wavelength shifts as a function of laser fluences) do not monotonically increase with laser fluences: they first increase, then plateau, and finally decrease. We observed that the laser energies required for the multi-shot case to obtain the onset of crystalline modifications and ablation are several times below the single-shot case because of the incubation effect. With proper control we can achieve both positive and negative resonance wavelength shifts with acceptable induced roundtrip waveguide losses.

Design of ultrahigh-Q silicon microring resonators based on free-form curves.

A design method for ultrahigh-Q microring resonators (MRRs) based on Bezier free-form curves was proposed and demonstrated. An MRR consisting of a specially designed 180° waveguide bend, a directional coupler, and two low-loss multi-mode strip waveguides was designed. The free-form curves were used to increase the degree of freedom in the design, shaping the waveguide bend with a gradient width and curvature. This design effectively reduced the propagation loss caused by the roughness of waveguide sidewalls and the mode mismatch loss caused by the excitation of high order modes. The small effective radius of only 20µm enabled the MRR to have a large free spectral range (FSR) and a compact and flexible structure. The MRR was manufactured using a standard process provided by foundry and measured to have an ultrahigh loaded Q factor of 1.86 × 106 and a FSR of about 1 nm.

High-Q and high finesse silicon microring resonator

We demonstrate the design, fabrication, and experimental characterization of a single transverse mode adiabatic microring resonator (MRR) implemented using the silicon-on- insulator (SOI) platform using local oxidation of silicon (LOCOS) approach. Following its fabrication, the device was characterized experimentally and an ultrahigh intrinsic Q-factor of ∼2 million with a free spectral range (FSR) of 2 nm was achieved, giving rise to a finesse of ∼1100, the highest demonstrated so far in SOI platform at the telecom band. We have further studied our device to analyze the source of losses that occur in the MRR and to understand the limits of the achievable Q-factor. The surface roughness was quantified using AFM scans and the root mean square roughness was found to be ∼ 0.32±0.03 nm. The nonlinear losses were further examined by coupling different optical power levels into the MRR. Indeed, we could observe that the nonlinear losses become more pronounced at power levels in the range of hundreds of microwatts. The demonstrated approach for constructing high-Q and high finesse MRRs can play a major role in the implementation of devices such as modulators, sensors, filters, frequency combs and devices that are used for quantum applications, e.g., photon pair generation.