Controlling surface wettability is an important road to afford the materials with anticipated functional properties, such as anti-fogging, anti-icing and self-cleaning. Manipulating the surface topography and chemical composition is a promising strategy to achieve the expected functional properties. Herein, we concurrently realized the control of surface topography and chemical composition of the film materials via exploiting a simply one step method through the hydrolysis and condensation of tetraethoxysilane (TEOS) to form silica sol-gel films. By adjusting the amount of water, TEOS and basic catalyst, the hydrophilic or hydrophobic chemical groups on the silica particles surface were well controlled. As a result, the sol-gel silica films exhibiting a controllable and wide range contact angles from 7.7±1.5° to 121.6±1.8° were obtained by this simple one-step method. The inorganic nonmetallic, metallic and polymer materials surface could maintain different wettability by the modification of controlled wettability silica films. Furthermore the wettability of silica film could be easily changed from hydrophobicity to superhydrophilicity through a heat-treatment due to the decrease of hydrophobic chemical groups conforming to the time-temperature equivalence principle. Raising temperature and extending holding time were equivalent to chemical bond breaking which result in the wettability change of silica films.