Abstract The objective of this research was silanize zirconium oxide (ZrO2) nanoparticles with 3-(trimethoxysilyl) propyl methacrylate (γ -MPS). Silanization is a surface treatment process of a material using silane compounds to improve the surface adhesive and compatibility of ZrO2 with other materials or coatings and to modify its surface. The surface modification of ZrO2 by 3-(trimethoxysilyl) propyl methacrylate as coupling agents under the influence of ultrasonic waves. The silanized ZrO2 was characterized Fourier Transform Infrared Spectroscopy (FTIR) and thermogravimetric analysis (TGA). The FTIR analysis indicated the interaction of the silane compound on the ZrO2 surface, showing characteristic peaks corresponding to Zr-OH, C-H stretching, carbonyl groups, and Zr-O-Si bonds, indicating successful grafting. The FTIR spectra for the ZrO2 nanoparticles, showing peaks at 1088 cm−1 showed the formation of Zr-O-Si covalent bonds. ZrO2 nanoparticles also exhibited a characteristic peak at 400 cm−1, indicating the deformation of Zr-O-Zr bonds. C=C, and C=O peaks are observed in the range of 1632-1714 cm−1. Thermogravimetric analysis (TGA) measures showed a higher weight loss of the silanized ZrO2 when higher amounts of silane were added.