High entropy alloys (HEAs) have presented potential applications in nuclear power plants owing to their novel atomic structure based high irradiation resistance. However, understanding of He-ion irradiation of HEAs is still lacking. In this work, we reveal He-ion irradiation resistance of HEA CrMnFeCoNi by comparison study with a pure Ni and a 304 stainless steel (304SS). It is found that the damage structure in the three materials can be characterized with He bubbles and stacking faults/stacking fault tetrahedrons ((SFs/SFTs), which show a similar depth distribution after He-ion irradiation at both RT and 450 °C. Although the He bubbles have a similar size about 2 nm after irradiation at RT, the He bubble sizes of the HEA, 304SS, and Ni increase to 4.0 ± 0.9, 5.3 ± 1.0 and 6.7 ± 1.0 nm after irradiation at 450 °C, respectively. Moreover, the density of SFs/SFTs displays in an order of Ni < 304SS < HEA at both RT and 450 °C. The He-ion irradiation at RT causes significant hardness enhancement for the three materials, however, compared to RT, after irradiation at 450 °C, the Ni presents softening, while the 304SS, especially the HEA, shows further hardening. Thus, the HEA CrMnFeCoNi possesses the smallest He bubble size, the densest SFs/SFTs, and the highest hardening, indicating the best structural stability, as well as the best He-ion irradiation resistance, which can be attributed to its low mobility of He atoms and point defects.