SiGe Quantum Dots Research Articles

Nanoheteroepitaxy of Ge and SiGe on Si: role of composition and capping on quantum dot photoluminescence.

We investigate the nanoheteroepitaxy of SiGe and Ge quantum dots (QDs) grown on nanotips substrates realized in Si(001) wafers. Due to the lattice strain compliance, enabled by the nanometric size of the tip and the limited dot/substrate interface area, which helps to reduce dot/substrate interdiffusion, the strain and SiGe composition in the QDs could be decoupled. This demonstrates a key advantage of the nanoheteroepitaxy over the Stranski-Krastanow growth mechanism. Nearly semi-spherical, defect-free, ∼100 nm wide SiGe QDs with different Ge contents were successfully grown on the nanotips with high selectivity and size uniformity. On the dots, thin dielectric capping layers were deposited, improving the optical properties by the passivation of surface states. Intense photoluminescence was measured from all samples investigated with emission energy, intensity, and spectral linewidth dependent on the SiGe composition of the QDs and the different capping layers. Radiative recombination occurs in the QDs, and its energy matches the results of band-structure calculations that consider strain compliance between the QD and the tip. The nanotips arrangement and the selective growth of QDs allow to studying the PL emission from only 3-4 QDs, demonstrating a bright emission and the possibility of selective addressing. These findings will support the design of optoelectronic devices based on CMOS-compatible emitters.

Fabrication and Characterization of Four-State Inverter Utilizing Quantum Dot Gate Field-Effect Transistors (QDGFETS)

This paper presents the experimental results of nMOS quantum dot gate field-effect transistor (QDG-FET) based four-state inverter fabricated and tested with Si/SiO2 and Ge/GeO2 quantum dots. The site-specific self-assembly of SiOx-cladded Si and GeOx-cladded Ge quantum dot layers in the gate region implements both the driver and load FETs in enhancement nMOS inverters. A four-state inverter will allow the reduction of FET count in logic block in microprocessors.

SI/GE Quantum Dot Channel FETs for Multi-Bit Computing

This paper presents quantum dot channel (QDC) FETs in quantum wire and coupled quantum dot configurations for cryogenic operation with multi-state operation. It also describes gate-all-around (GAA) quantum dot channel (QDC) FETs that exhibit potential multi-state characteristics at room temperature. FETs with cladded Si and Ge quantum dot layers as a transport channel have been fabricated. The formation of a quantum dot superlattice (QDSL) when SiOx-cladded Si and/or GeOx-cladded Ge quantum dots (QD) are assembled results in mini-energy sub-bands in the conduction and valence band. The intra-mini-energy band transitions results in significant changes in the drain current when gate and/or drain voltages are varied. This novel feature provides a pathway for 16-/32-state logic in CMOS-X configuration. The gate-defined Si quantum dot FETs, comprising of tunnel barrier coupled, have been reported for quantum computing at cryogenic temperatures.

Light emission from ion-implanted SiGe quantum dots grown on Si substrates

We report on electroluminescence spectroscopy experiments demonstrating room-temperature light emission from heavily alloyed SiGe quantum dots, for which the light emission properties are enhanced by incorporated split-[110] self-interstitials. The quantum dots are formed during molecular beam epitaxy deposition of Si0.6Ge0.4 alloys on n-doped silicon-on-insulator substrates. To create the split-[110] self-interstitials the quantum dots were co-implantated in-situ using Si and Ge ions. The hybrid emitters were further embedded into the intrinsic region of a p-i-n diode structure to enable electrical pumping. Similar to previous theoretical results on unstrained Ge-based quantum dots containing these defects, radiative direct transitions are possible for these SiGe light emitters. However, in SiGe dots these transitions are not at the Brillouin zone center. Instead, first-principles calculations indicate that the presence of the split-[110] self-interstitial defect in strained and unstrained SiGe can lead to optically direct transitions in momentum space in the X-direction of the Brillouin zone.

Luminescent Properties of Ordered Arrays of Silicon Disk-Like Resonators with Embedded GeSi Quantum Dots

Luminescent Properties of Ordered Arrays of Silicon Disk-Like Resonators with Embedded GeSi Quantum Dots

Collective Modes in the Luminescent Response of Si Nanodisk Chains with Embedded GeSi Quantum Dots

In this paper, we study the effects of GeSi quantum dot emission coupling with the collective modes in the linear chains of Si disk resonators positioned on an SiO2 layer. The emission spectra as a function of the chain period and disk radius were investigated using micro-photoluminescence (micro-PL) spectroscopy. At optimal parameters of the disk chains, two narrow PL peaks, with quality factors of around 190 and 340, were observed in the range of the quantum dot emission. A numerical analysis of the mode composition allowed us to associate the observed peaks with two collective modes with different electric field polarization relative to the chain line. The theoretical study demonstrates the change of the far-field radiation pattern with increasing length of the disk chain. The intensive out-of-plane emission was explained by the appearance of the dipole mode contribution. The obtained results can be used for the development of Si-based near-infrared light sources.

Emission Enhancement of Ge/Si Quantum Dots in Hybrid Structures with Subwavelength Lattice of Al Nanodisks.

The effects of resonance interaction of plasmonic and photonic modes in hybrid metal-dielectric structures with square Al nanodisk lattices coupled with a Si waveguide layer were investigated using micro-photoluminescence (micro-PL) spectroscopy. As radiation sources, GeSi quantum dots were embedded in the waveguide. A set of narrow PL peaks superimposed on the broad bands were observed in the range of quantum dot emissions. At optimal parameters of Al nanodisks lattices, almost one order increasing of PL intensity was obtained. The experimental PL spectra are in good agreement with results of theoretical calculations. The realization of high-quality bound states in the continuum was confirmed by a comparative analysis of the experimental spectra and theoretical dispersion dependences. The results demonstrated the perspectives of these type structures for a flat band realization and supporting the slow light.

Single SiGe quantum dot emission deterministically enhanced in a high-Q photonic crystal resonator.

We report the resonantly enhanced radiative emission from a single SiGe quantum dot (QD), which is deterministically embedded into a bichromatic photonic crystal resonator (PhCR) at the position of its largest modal electric field by a scalable method. By optimizing our molecular beam epitaxy (MBE) growth technique, we were able to reduce the amount of Ge within the whole resonator to obtain an absolute minimum of exactly one QD, accurately positioned by lithographic methods relative to the PhCR, and an otherwise flat, a few monolayer thin, Ge wetting layer (WL). With this method, record quality (Q) factors for QD-loaded PhCRs up to Q ∼ 105 are achieved. A comparison with control PhCRs on samples containing a WL but no QDs is presented, as well as a detailed analysis of the dependence of the resonator-coupled emission on temperature, excitation intensity, and emission decay after pulsed excitation. Our findings undoubtedly confirm a single QD in the center of the resonator as a potentially novel photon source in the telecom spectral range.

Lattice deformation and potential effects on linear and nonlinear optical properties of doped SiGe quantum dot encapsulated in Si matrix

Lattice deformation and potential effects on linear and nonlinear optical properties of doped SiGe quantum dot encapsulated in Si matrix

Nanoscale imaging of phonon dynamics by electron microscopy

Spatially resolved vibrational mapping of nanostructures is indispensable to the development and understanding of thermal nanodevices1, modulation of thermal transport2 and novel nanostructured thermoelectric materials3–5. Through the engineering of complex structures, such as alloys, nanostructures and superlattice interfaces, one can significantly alter the propagation of phonons and suppress material thermal conductivity while maintaining electrical conductivity2. There have been no correlative experiments that spatially track the modulation of phonon properties in and around nanostructures due to spatial resolution limitations of conventional optical phonon detection techniques. Here we demonstrate two-dimensional spatial mapping of phonons in a single silicon–germanium (SiGe) quantum dot (QD) using monochromated electron energy loss spectroscopy in the transmission electron microscope. Tracking the variation of the Si optical mode in and around the QD, we observe the nanoscale modification of the composition-induced red shift. We observe non-equilibrium phonons that only exist near the interface and, furthermore, develop a novel technique to differentially map phonon momenta, providing direct evidence that the interplay between diffuse and specular reflection largely depends on the detailed atomistic structure: a major advancement in the field. Our work unveils the non-equilibrium phonon dynamics at nanoscale interfaces and can be used to study actual nanodevices and aid in the understanding of heat dissipation near nanoscale hotspots, which is crucial for future high-performance nanoelectronics.

Photoluminescence enhancement by deterministically site-controlled, vertically stacked SiGe quantum dots

The Si/SiGe heterosystem would be ideally suited for the realization of complementary metal-oxide-semiconductor (CMOS)-compatible integrated light sources, but the indirect band gap, exacerbated by a type-II band offset, makes it challenging to achieve efficient light emission. We address this problem by strain engineering in ordered arrays of vertically close-stacked SiGe quantum dot (QD) pairs. The strain induced by the respective lower QD creates a preferential nucleation site for the upper one and strains the upper QD as well as the Si cap above it. Electrons are confined in the strain pockets in the Si cap, which leads to an enhanced wave function overlap with the heavy holes near the upper QD’s apex. With a thickness of the Si spacer between the stacked QDs below 5 nm, we separated the functions of the two QDs: The role of the lower one is that of a pure stressor, whereas only the upper QD facilitates radiative recombination of QD-bound excitons. We report on the design and strain engineering of the QD pairs via strain-dependent Schrödinger-Poisson simulations, their implementation by molecular beam epitaxy, and a comprehensive study of their structural and optical properties in comparison with those of single-layer SiGe QD arrays. We find that the double QD arrangement shifts the thermal quenching of the photoluminescence signal at higher temperatures. Moreover, detrimental light emission from the QD-related wetting layers is suppressed in the double-QD configuration.

Si-based light emitters synthesized with Ge+ ion bombardment

The photoluminescence (PL) of Ge/Si nanostructures synthesized by using Ge+ ion bombardment is studied. The structure represents a Si substrate with GeSi nanoclusters created by 80 keV Ge implantation with a fluence of ∼1015 ions/cm2 and subsequent thermal annealing. The PL measurements confirm the advantage of Ge/Si structures synthesized using Ge+ ion bombardment over the usual epitaxial structures with GeSi quantum dots. The presence of defects produced by Ge implantation results in pronounced PL at telecom wavelengths up to room temperature. The results provide a basis for creating efficient light emitters compatible with the existing Si technology.

Magnetic-Gradient-Free Two-Axis Control of a Valley Spin Qubit in SixGe1−x

Spins in SiGe quantum dots are promising candidates for quantum bits but are also challenging due to the valley degeneracy which could potentially cause spin decoherence and weak spin-orbital coupling. In this work we demonstrate that valley states can serve as an asset that enables two-axis control of a singlet-triplet qubit formed in a double quantum dot without the application of a magnetic field gradient. We measure the valley spectrum in each dot using magnetic field spectroscopy of Zeeman split triplet states. The interdot transition between ground states requires an electron to flip between valleys, which in turn provides a g-factor difference $\Delta g$ between two dots. This $\Delta g$ serves as an effective magnetic field gradient and allows for qubit rotations with a rate that increases linearly with an external magnetic field. We measured several interdot transitions and found that this valley introduced $\Delta g$ is universal and electrically tunable. This could potentially simplify scaling up quantum information processing in the SiGe platform by removing the requirement for magnetic field gradients which are difficult to engineer.

One-Stage Formation of Two-Dimensional Photonic Crystal and Spatially Ordered Arrays of Self-Assembled Ge(Si) Nanoislandson Pit-Patterned Silicon-On-Insulator Substrate.

A new approach to improve the light-emitting efficiency of Ge(Si) quantum dots (QDs) by the formation of an ordered array of QDs on a pit-patterned silicon-on-insulator (SOI) substrate is presented. This approach makes it possible to use the same pre-patterned substrate both for the growth of spatially ordered QDs and for the formation of photonic crystal (PhC) in which QDs are embedded. The periodic array of deep pits on the SOI substrate simultaneously serves as a template for spatially ordering of QDs and the basis for two-dimensional PhCs. As a result of theoretical and experimental studies, the main regularities of the QD nucleation on the pre-patterned surface with deep pits were revealed. The parameters of the pit-patterned substrate (the period of the location of the pits, the pit shape, and depth) providing a significant increase of the QD luminescence intensity due to the effective interaction of QD emission with the PhC modes are found.

Зависимость люминесцентных свойств упорядоченных групп Ge(Si) наноостровков от параметров ямок на структурированной поверхности подложки "кремний на изоляторе"

This paper presents the results of studies of the luminescence properties of structures with Ge(Si) quantum dots (QDs), in which a pit-patterned surface of silicon on insulator substrate served both for the spatial ordering of QDs and for the formation of a two-dimensional photonic crystal. It is shown that by choosing the parameters of pit-patterned substrate (the diameter of the pits and the period of their location), it is possible to provide a significant increase of intensity of the QD luminescence signal in the near-IR range. This enhancement is associated with interaction of spatially ordered QD emission with the modes of a photonic crystal formed by the pattern of pits. The effect of amplification of the luminescence signal persists up to room temperature.

Electron Spin Resonance in Heterostructures with Ring Molecules of GeSi Quantum Dots

Heterostructures with annular groups of GeSi quantum dots grown on Si(001) substrates with GeSi nanodisks embedded beneath the surface are investigated by the electron spin resonance technique. It is demonstrated that electrons in annular groups can be localized at the apexes of quantum dots in the annular groups. Narrowing of the electron spin resonance line of the annular electron states localized at the nanodisks is observed. The width of this line decreases when the magnetic field deviates from the structure growth direction, which confirms experimentally the earlier prediction that the spin relaxation time T2 should increase in this case.

Coupling of Germanium Quantum Dots with Collective Sub-radiant Modes of Silicon Nanopillar Arrays.

In this paper, we demonstrate the infrared photoluminescence emission from Ge(Si) quantum dots coupled with collective Mie modes of silicon nanopillars. We show that the excitation of band edge dipolar modes of a linear nanopillar array results in strong reshaping of the photoluminescence spectra. Among other collective modes, the magnetic dipolar mode with the polarization along the array axis contributes the most to the emission spectrum, exhibiting an experimentally measured Q-factor of around 500 for an array of 11 pillars. The results belong to the first experimental evidence of light emission enhancement of quantum emitters applying collective Mie resonances in finite nanoresonators and therefore represent an important contribution to the new field of active all-dielectric meta-optics.

Nanoscale Phonon Mapping of Single SiGe Quantum Dots by Vibrational EELS

Nanoscale Phonon Mapping of Single SiGe Quantum Dots by Vibrational EELS

Self-assembled epitaxial metal–semiconductor nanostructures with enhanced GeSi quantum dot luminescence

Hybrid structures containing Ag nanoparticles and GeSi quantum dots were developed using the self-organization of metal nanoislands on the surface of a strained semiconductor structure. The enhanced photoluminescence from GeSi quantum dots (QDs) coupled with Ag nanoislands was obtained. Ag nanoislands epitaxially grown on top of the multilayered structures with GeSi QDs support a surface plasmon resonance that can be tuned to the QD emission wavelength by changing Ag nanoparticle parameters. The numerical modeling of surface plasmon resonance allows attributing this effect to the increase of the recombination rate due to the coupling of QD emitters with Ag nanoislands.

Photoluminescence of compact GeSi quantum dot groups with increased probability of finding an electron in Ge

The photoluminescence (PL) of the combined Ge/Si structures representing a combination of large (200–250 nm) GeSi disk-like quantum dots (nanodisks) and four-layered stacks of compact groups of smaller (30 nm) quantum dots grown in the strain field of nanodisks was studied. The multiple increase in the PL intensity was achieved by the variation of parameters of vertically aligned quantum dot groups. The experimental results were analyzed on the basis of calculations of energy spectra, electron and hole wave functions. It was found that the quantum dot arrangement in compact groups provides the effective electron localization in Δx,y-valleys with an almost equal probability of finding an electron in the Si spacer and Ge barrier. As a result, the main channels of radiative recombination in the structures under study correspond to spatially direct optical transitions.