Ta-Si-C coatings with Si content varying from 2.7 to 30.8 at.% were synthesized by magnetron co-sputtering. Their microstructure, tribological properties and corrosion performance were investigated. The coatings exhibited two distinct structural forms: a Ta(C, Si) solid solution for the lower silicon contents (2.7 and 5.6 at.% Si) and a Ta(C, Si)/a-C:Si nanocomposite for higher Si content (13.7, 20.8 and 30.8 at.% Si). Notably, the Ta(C, Si) solid solution at 5.6 at.% Si demonstrated the highest hardness of 44±2.7 GPa, resulting from the solid solution strengthening. Furthermore, this solid solution also demonstrated the lowest wear rate (1.21×10-6 mm3N-1m-1), due to its superior hardness and H3/E2 ratio. Additionally, the coating with 5.6 at.% Si displayed the most outstanding corrosion resistance, attributed to its higher crystalline quality and denser structure, which effectively prevented the permeation of corrosive media through the coating to the substrate.
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