The single-pass (50 cm) amplifier performance of an atmospheric-pressure ArF laser pumped by a 65-ns full-width-at-half-maximum short-pulse electron beam was investigated theoretically for a wide range of excitation rates (0.1-2.0 MW/cm/sup 3/). Atmospheric mixtures of Ne, Ar, and F/sub 2/ (three mixtures of Ar=40%, 70%, and Ne-free) were studied. A kinetic numerical model of the ArF amplifier with a Ne buffer system was constructed. A one-dimensional propagation treatment considered the gain depletion and saturation absorption spatially and temporally along the optical axis. In this model the rate constants for electron quenching of ArF* of 1.6*10/sup -7/, 1.9*10/sup -7/, and 2.4*10/sup -7/ cm/sup 3//s were used for Ar concentration of 40, 70 percent, and Ar/F/sub 2/ mixture, respectively.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>