Sensitive Sensor Array Research Articles

A 120>tex<$,times$>/tex<110 Position Sensor With the Capability of Sensitive and Selective Light Detection in Wide Dynamic Range for Robust Active Range Finding

A 120/spl times/110 sensitive and light selective position sensor array with wide dynamic range is presented. The sensor can detect the position of a low-intensity light projected on nonuniform background illumination for a robust range finding system. It achieves -18-dB signal-to-background ratio (SBR) light detection in wide range of 48-dB background illumination due to a modulated light projection and correlation technique on the sensor plane. It also realizes selective light detection for multiple light projection systems. The range finder has been fabricated in 0.6-/spl mu/m CMOS process and successfully tested. The range finding system achieves <1.5-mm range accuracy at 1000 mm using a low-intensity projected laser beam in a nonuniform target scene.

Sensor array, method for manufacturing sensor array, and ultrasonic diagnostic apparatus using the same

A highly sensitive sensor array can be easily manufactured. An ultrasonic probe as the sensor array used in an ultrasonic diagnostic apparatus includes a substrate formed of a backing member. On a main surface of the substrate, a plurality of piezoelectric oscillators is fixed in a matrix form. Each of the piezoelectric oscillators includes a plurality of laminated piezoelectric layers. Between the piezoelectric layers, inner electrodes are formed. On each end face of the piezoelectric layers, an outer electrode is formed. The piezoelectric oscillators are bonded onto the substrate by adhesive in such a manner that the plurality of piezoelectric layers is laminated in a direction parallel to the main surface of the substrate. On the plurality of piezoelectric oscillators, an acoustic matching layer is formed, and on the acoustic matching layer, an acoustic lens is formed.

A semiconducting metal oxide sensor array for the detection of NO x and NH 3

In many fossil fuel burning systems, NO x emissions are minimized by a selective catalytic reduction (SCR) technique where NH 3 is injected into the flue gas stream to react with NO x to form environmentally safe gases, such as nitrogen and water vapor. Unfortunately, this process is usually incomplete, resulting in either NO x emissions or excess NH 3 (NH 3 slip). Therefore, a critical need exits for an in situ sensor array near the stack to provide real-time control of the NH 3 injection, and hence, minimize the NO x emissions released into the environment. In the present work, semiconducting metal oxide (SMO) film technology is used to engineer a small, robust, sensitive, and selective sensor array to detect NO x and NH 3 emissions. Many thin film tungsten trioxide (WO 3) based sensing elements were tested in order to identify two film recipes capable of sensitively and selectively detecting NO x and NH 3. The critical parameters inherent in each film recipe are type of substrate material, film thickness, doping, deposition temperature, and operating temperature. The two element sensor array’s response characteristics analyzed include the response and recovery times, rates of reaction, dynamic range, sensitivity, repeatability and selectivity.