In this work, an attempt has been made to fabricate SnO2 porous films using automated nebulizer spray pyrolysis technique with the influence of a porogen. Pure tin dioxide and porous tin dioxide (SnO2/SnO2) thin films were prepared from a precursor solution composed of SnCl2·2H2O and polyethylene glycol as a porogen. The structural, morphological, optical and gas sensing performance of the prepared thin films were characterized. The inclusion of porogen significantly improved the sensing property of porous SnO2 bilayer thin films and it was confirmed by structural, morphological and gas sensing performance studies. The optimized spray process parameter was determined finally in this work as SnO2 precursor strength of 0.2 M for porous SnO2 layer. Under this condition, the increased lattice constant, lattice defect and increased pores diameter were achieved, which exhibited good gas sensitivity and selectivity towards NO2 gas at 250 ºC. The response and recovery time is decreased as 50%, the deduction limit is 0.9 ppm. In addition, during the five weeks test, the response level was observed nearly constant, which indicated that the SnO2 bilayer sensor has long-term stability.
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