AbstractWe report on the microstructure of MgxZn1–xO films grown on MgO/c‐sapphire by P‐MBE. Cross sectional specimens of three layers with rock salt, wurtzite, and mixed crystal structure were studied by high‐resolution transmission electron microscopy (HRTEM). Selected area diffraction pattern (SADP) and fast fourier transform (FFT) were also employed to analyze the samples. The results indicate the growth of cubic‐MgZnO along the [111] direction accompanied by twinning. HRTEM micrograph of wurtzite‐MgZnO confirmed that initial stage of the growth starts with a cubic structure and then changes to the wurtzite phase. Our results demonstrate that by introducing a thin MgO buffer layer, growth of cubic‐MgZnO with low Mg content is feasible. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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