Secondary Ion Mass Spectrometry Technique Research Articles

Ho3+ -doped BaGd2 ZnO5 green-emitting phosphor for solid-state lighting: synthesis, characterization, and photoluminescence properties.

In this work, we present the synthesis of a green-emitting series of BaGd2 ZnO5 :xHo3+ (0.5-3mol%) phosphors using a high-temperature solid-state reaction method. Phase purity and crystal structure information were evaluated through X-ray powder diffraction patterns. Optical properties were examined through diffuse reflectance spectra, revealing that the prepared phosphor exhibited a band gap of 4.65 eV. The effect of Ho3+ doping on the morphology and ion distribution on the surface was assessed using scanning electron microscopy and time-of-flight secondary ion mass spectrometry techniques, respectively. The excitation spectra of the synthesized phosphor exhibited a charge transfer band and strong absorption transitions. The emission spectra displayed typical holmium emission characteristics, featuring a strong green emission band associated with f-f transitions from 5 F4 + 2 S2 → 5 I8 . Decay dynamics of the synthesized phosphor exhibited a single-exponential decay pattern, with lifetimes ranging from 0.103 to 0.053 ms. The intrinsic radiative lifetime, calculated through Auzel's fitting was determined to be 0.14 ms. Using the emission spectra, colorimetric behaviour was analyzed, revealing that the Commission Internationale de l'éclairage (CIE) coordinates exclusively lay within the green region at (0.285, 0.705), with an impressive colour purity of 99.6%. Given these marked properties, the synthesized phosphor exhibits great potential for a wide range of green-emitting applications, including displays, white light-emitting diodes, and security signage.

Stacking pressure homogenizes the electrochemical lithiation reaction of silicon anode in solid-state batteries

Several tens of MPa stacking pressure is usually necessary to fully utilize the capacity of energy-dense silicon anode in solid-state batteries, presenting significant hurdles for real applications. It is thus critical to establish the link between the macroscopic stacking pressure and the microscopic electrochemical processes. In this work, we used titration gas chromatography to quantify the capacity-loss processes of silicon anodes under different stacking pressures. Furthermore, time-of-flight secondary ion mass spectrometry, electron microscopy, and phase-field modeling techniques were used to map the spatial distribution of chemical species (e.g., LixSi alloys), stress, and electrochemical overpotential upon (de)lithiation processes of the silicon anode. High stacking pressure was observed to significantly increase the extent that a Si anode can be lithiated because of the increased reaction homogeneity resulting from the strong electro-mechanical coupling, while its impact over lithium loss during the first cycle is rather limited. Our work provides a basis to unlock the full potential of Si-anode based solid-state batteries at near-ambient stacking pressure and calls for innovative strategies to minimize or compensate for the lithium loss at the first cycle.

Effect of optimal rapid thermal alloying of ohmic contacts to microwave pseudomorphic HEMTs

Gallium Arsenide (GaAs) pseudomorphic High Electron Mobility Transistors (pHEMTs) are currently used as active devices in manufacturing Monolithic Microwave Integrated Circuits (MMICs) for microwave and millimetre wave applications like Transmit-Receive (T/R) modules in Radars and communication. Low contact resistances (Rc) of pHEMT devices are necessary to obtain low access resistances to the device channel, for enhancement of transconductance and cut-off frequency. Devices formed by optimal and suboptimal conditions of rapid thermal alloying by infra-red optical radiation are investigated using cross-section transmission electron microscopy (XTEM), backside secondary ion mass spectrometry (backside SIMS) and thermal imaging techniques to understand the role of optimal alloy formation and its role in enhancement of device parameters.

Artifact-free secondary ion mass spectrometry profiling of a full vertical cavity surface emitting laser structure

The optimization of the structure of vertical-cavity surface-emitting lasers (VCSELs) is required to produce more efficient devices. The secondary ion mass spectrometry (SIMS) technique can provide information about the structure and the distribution of dopants and contaminants. However, VCSELs are relatively thick, contain hundreds of layers with varying compositions, and consist of very thin layers. Classical SIMS is prone to artifacts which decreases the quality of the results. In this work, modifications of the SIMS measurement procedures are presented: high incident angle bombardment reduces the mixing effect; optimization of the extraction parameters increases the signal-to-noise ratio from 2.1 to 24.3 dB; Ion polishing and beam service preserves the quality of the measurement. Due to impact energy modulations quantum wells and barriers are registered as box-shaped features. The raw data is free of artifacts and reflects the realistic distribution of elements. Such accuracy may prove invaluable for further optimization of VCSELs.

Significance of conodont data for explaining geosystem perturbations during the Middle Devonian Kačák Episode

The present review of published data as well as the new results demonstrate the versatility of conodonts in documenting and explaining global environmental fluctuations related to the Kačák Episode (KE) in the latest Eifelian. Although the conodont zonation of the KE interval is ambiguous and requires revision, the compilation of conodont stratigraphic ranges shows their potential for a precise worldwide correlation of relevant marine strata. Conodont biofacies may serve to document environmental changes connected with KE, in particular the sealevel rise at its beginning, followed by a regressive trend. Nevertheless, the familiar Icriodus/Polygnathus ratio should be carefully applied as an indication of water depth and nearshore vs. offshore position, being controlled also by other factors, such as paleolatitude and/or climate. Oxygen isotopes in conodont apatite, studied using secondary ion mass spectrometry technique evidence a warming at the onset of KE, based on the new data from the open marine facies of the Prague Basin. At the same time, they indicated climate-controlled salinity fluctuations in the epeiric Belarusian Basin. The present investigations as well as previous results suggest caution when analyzing thermally altered conodonts which may result in biased oxygen isotope signatures. The present experience suggests the conodont colour alteration index CAI 3 as a boundary value above which the caution is necessary.

The Role of Surface in Hydride Formation Processes

Several LaNi5-based hydrogen storage alloys were studied using secondary ion mass spectrometry (SIMS) technique. Ar+ ions with the energy of 10 - 18 keV were used as primary ions. The study of the initial stages of the processes of LaNi5-based alloys interaction with hydrogen under the experimental conditions showed that on the areas of clean surface, hydrogen formed chemical compounds with the both of the main components of the alloy: nickel and lanthanum. As hydrogen accumulates on the surface and in the near-surface region, a hydrogen-containing structure is formed, which is characterized by a certain stoichiometric ratio of components. Nickel in this structure has strong chemical bonds with two hydrogen atoms, and lanthanum – with two or more hydrogen atoms. Along with such compounds, some structures with lower hydrogen content are also formed. The formed hydrogen-containing structure includes both main alloy components, La and Ni for all the studied samples, even though only lanthanum is generally accepted to be the hydride-forming element in such alloys. The SIMS studies of the chemical composition of the surface monolayers of the intermetallic alloy LaNi5, in the process of its interaction with oxygen, showed the following. As a result of the oxygen interaction with the alloy, a complex chemical structure including oxygen, lanthanum and nickel is formed on the surface and in the near-surface region of LaNi5. Oxygen in such a structure, similarly to hydrogen, forms strong chemical bonds with both components of the alloy. This is indicated by the presence in the mass spectra of a large set of oxygen-containing emissions of positive and negative secondary ions with lanthanum and nickel, as well as oxygen-containing lanthanum-nickel cluster secondary ions. The formed oxide compounds have a three-dimensional structure and occupy tens of monolayers. Oxygen poisoning of the surface of the hydride-forming alloy LaNi5 can occur regardless of whether the surface of the alloy was clean from the very beginning or it was covered with a layer of hydrogen-containing chemical compounds.

Revealing the Subzero-Temperature Electrochemical Kinetics Behaviors in Ni-Rich Cathode.

The sluggish kinetics in Ni-rich cathodes at subzero temperatures causes decreased specific capacity and poor rate capability, resulting in slow and unstable charge storage. So far, the driving force of this phenomenon remains a mystery. Herein, with the help of in-situ X-ray diffraction and time of flight secondary ion mass spectrometry techniques, the continuous accumulation of both the cathode electrolyte interphase (CEI) film formation and the incomplete structure evolution during cycling under subzero temperature are proposed. It is presented that excessively uniform and thick CEI film generated at subzero temperatures would block the diffusion of Li+ -ions, resulting in incomplete phase evolution and clear charge potential delay. The incomplete phase evolution throughout the Li+ -ion intercalation/de-intercalation processes would further cause low depth of discharge and poor electrochemical reversibility with low initial Coulombic efficiency, as well. In addition, the formation of the thick and uniform CEI film would also consume Li+ -ions during the charging process. This discovery highlights the effects of the CEI film formation behavior and incomplete phase evolution in restricting electrochemical kinetics under subzero temperatures, which the authors believe would promote the further application of the Ni-rich cathodes.

Nitrogen-Rich Organic Matter Formation and Stabilization in Iron Ore Tailings: A Submicrometer Investigation.

Organic matter (OM) formation and stabilization are critical processes in the eco-engineered pedogenesis of Fe ore tailings, but the underlying mechanisms are unclear. The present 12 month microcosm study has adopted nanoscale secondary ion mass spectrometry (NanoSIMS) and synchrotron-based scanning transmission X-ray microscopy (STXM) techniques to investigate OM formation, molecular signature, and stabilization in tailings at micro- and nanometer scales. In this system, microbial processing of exogenous isotopically labeled OM demonstrated that 13C labeled glucose and 13C/15N labeled plant biomass were decomposed, regenerated, and associated with Fe-rich minerals in a heterogeneous pattern in tailings. Particularly, when tailings were amended with plant biomass, the 15N-rich microbially derived OM was generated and bound to minerals to form an internal organo-mineral association, facilitating further OM stabilization. The organo-mineral associations were primarily underpinned by interactions of carboxyl, amide, aromatic, and/or aliphatic groups with weathered mineral products derived from biotite-like minerals in fresh tailings (i.e., with Fe2+ and Fe3+) or with Fe3+ oxyhydroxides in aged tailings. The study revealed microbial OM generation and subsequent organo-mineral association in Fe ore tailings at the submicrometer scale during early stages of eco-engineered pedogenesis, providing a basis for the development of microbial based technologies toward tailings' ecological rehabilitation.

Adsorption of 2-Mercaptobenzothiazole Organic Inhibitor and its Effects on Copper Anodic Oxidation in Alkaline Environment

The adsorption of 2-MBT organic inhibitor on copper and its effects on anodic oxide growth in NaOH were investigated using cyclic voltammetry, X-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectrometry techniques. It is shown that 2-MBT significantly impedes the growth of the Cu(I) oxide by forming a multilayered organic film on the surface. A major factor influencing the formation and properties of the organic barrier layer is the presence and structure of the interfacial native oxide on which it forms. The 2-MBT multilayer bonds to the metallic copper substrate mostly via its sulphur atoms along with a small fraction of the nitrogen atoms also bonding to the metallic substrate. Additionally, there is an interaction between the inhibitor molecules and copper released from the surface to form metal-organic complexes in the outer layers of the thicker films.

Steric Hindrance-Induced Dehydration Promotes Cation Selectivity in Trans-Subnanochannel Transport.

Dehydration is a basic phenomenon in ion transport through confined nanochannels, but how it affects ion trans-membrane selectivity has not been understood due to a lack of characterization techniques and suitable pore structures. Herein, hydration number distributions of typical alkali metal ions were characterized by combining uniform subnanochannels of ZIF-8-based membranes with the in situ liquid time-of-flight secondary ion mass spectrometry (ToF-SIMS) technique, revealing that steric hindrance induced ion dehydration through neutral confined ZIF-8 windows. The reduction in size due to partial dehydration increased the intrapore velocity for monovalent cations. The highest entropy value with maximum size changes resulting from dehydration drove fast and efficient selective transport of Li+ over other alkaline metal ions, leading to a Li+/Rb+ selectivity of 5.2. The dehydration at the entrance of membrane pores was shown to account for the majority of overall barriers, being a dominant element for ion transport. High hydration energy (>1500 kJ/mol) hindered the dehydration and transport of typical alkaline earth metal ions, achieving ultrahigh monovalent/bivalent cation selectivity (∼104). These findings uncover the crucial role of dehydration energy barriers and size-based entropy barriers in ion selectivity of trans-subnanochannel transport, providing guidelines for designing selective membranes with specific pore sizes to promote the dehydration of desired solutes.

From DFT investigations of oxygen-implanted molybdenum disulfide to temperature-induced stabilization of MoS2/MoO3 heterostructure

In this work, we study the mechanism of the implantation process of two-dimensional molybdenum disulfide. We proposed the oxidation scheme and investigated the changes in the geometry of the MoS2 layer, as well as HOMO and LUMO orbitals location using the Density Functional Theory technique. We found that the oxygen was incorporated into the MoS2 structure and the MoS2/MoO3 heterostructure was created. The effect of implantation and the presence of heterostructure was investigated in the Secondary Ion Mass Spectrometry technique with atomic-resolution depth profiles. The presence of molybdenum trioxide was confirmed using Raman spectroscopy. The successful implantation allowed to obtain a stable conductive/insulating heterostructure of MoS2/MoO3 with promising properties.

Compositional changes by SIMS and XPS analyses on fresh and aged Roman-like glass

This study reports important analytical evidence of an unusual non-uniform element distribution in the superficial layers of glass matrices (from few nm up to 1 µm). The unforeseen observation was made on silica-soda-lime glass mock-ups before and after their artificial ageing, using secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS) surface analysis techniques. The analyses showed a marked non-homogeneous element distribution at the glass surface. The results indicated a very low concentration of Na at the surface up to a depth of around 500 nm below the surface, where its concentration increases reaching a plateau. In addition, the profile distribution of H in the first 200 nm of the pristine glass surface indicated a diffusion of hydrogen from the surrounding environment to the glass network. Additional modifications during the glass ageing process related to external factors (such as temperature and humidity) were also identified in relation to sodium atoms, with atoms on the glass surface showing a different chemical state from those in the bulk. This study confirms that glass composition as well as glass alteration are non-homogeneous locally supporting the importance of studying glass surface as region of interaction with surrounding environment.

Untargeted Metabolomic Characterization of Glioblastoma Intra-Tumor Heterogeneity Using OrbiSIMS.

Glioblastoma (GBM) is an incurable brain cancer with a median survival of less than two years from diagnosis. The standard treatment of GBM is multimodality therapy comprising surgical resection, radiation, and chemotherapy. However, prognosis remains poor, and there is an urgent need for effective anticancer drugs. Since different regions of a single GBM contain multiple cancer subpopulations ("intra-tumor heterogeneity"), this likely accounts for therapy failure as certain cancer cells can escape from immune surveillance and therapeutic threats. Here, we present metabolomic data generated using the Orbitrap secondary ion mass spectrometry (OrbiSIMS) technique to investigate brain tumor metabolism within its highly heterogeneous tumor microenvironment. Our results demonstrate that an OrbiSIMS-based untargeted metabolomics method was able to discriminate morphologically distinct regions (viable, necrotic, and non-cancerous) within single tumors from formalin-fixed paraffin-embedded tissue archives. Specifically, cancer cells from necrotic regions were separated from viable GBM cells based on a set of metabolites including cytosine, phosphate, purine, xanthine, and 8-hydroxy-7-methylguanine. Moreover, we mapped ubiquitous metabolites across necrotic and viable regions into metabolic pathways, which allowed for the discovery of tryptophan metabolism that was likely essential for GBM cellular survival. In summary, this study first demonstrated the capability of OrbiSIMS for in situ investigation of GBM intra-tumor heterogeneity, and the acquired information can potentially help improve our understanding of cancer metabolism and develop new therapies that can effectively target multiple subpopulations within a tumor.

Application of ion implantation as a tool to study neutron induced morphological changes in HOPG and RBMK-1500 reactor graphite

Based on the RBMK-1500 (rus.: peaктop бoльшoй мoщнocти кaнaльный, PБMК; reaktor bolshoy moshchnosti kanalnyy, “high-power channel-type reactor”) reactor irradiation conditions, ion implantation was used as a tool to study neutron induced morphological changes in both highly oriented pyrolytic graphite (HOPG) and nuclear grade RBMK graphite. Graphite samples were implanted with 180 keV 14N+ ions at the fluences of 1.0 × 1016 ions/cm−2 and 2.5 × 1016 ions/cm−2. To study temperature effects on both ion migration and structural disorder level in the graphite matrix, the implantation procedures were carried out under different temperature conditions – room temperature (RT) and 500 °C. Subsequently, the distribution profiles of the implanted 14N+ ions were obtained by using secondary ion mass spectroscopy (SIMS) technique, while the microstructural properties of the graphite were evaluated by Raman spectroscopy. Implantation induced primary displacement damage profiles and implanted ion profiles were evaluated theoretically by using GEANT4 10.6 and SRIM-2013 codes. The profiles of implanted nitrogen obtained by SIMS technique were found to be in good agreement with theoretical ones. The surfaces of HOPG samples displayed macroscopic damage in form of fractures after 14N+ ion implantation at 500 °C; however, in case of RBMK graphite, the sample surfaces remained without visually observable changes. The Raman spectra showed an increase of sp3-related content and formation of amorphous carbon in both HOPG and RBMK graphite samples; the latter exhibits higher structural disorder at microscopic level and stronger amorphization than HOPG.

Speciation and distribution of chromium (III) in rice root tip and mature zone: The significant impact of root exudation and iron plaque on chromium bioavailability

Evidence on the contribution of root regions with varied maturity levels in iron plaque (IP) formation and root exudation of metabolites and their consequences for uptake and bioavailability of chromium (Cr) remains unknown. Therefore, we applied combined nanoscale secondary ion mass spectrometry (NanoSIMS) and synchrotron-based techniques, micro-X-ray fluorescence (µ-XRF) and micro-X-ray absorption near-edge structure (µ-XANES) to examine the speciation and localisation of Cr and the distribution of (micro-) nutrients in rice root tip and mature region. µ-XRF mapping revealed that the distribution of Cr and (micro-) nutrients varied between root regions. Cr K-edge XANES analysis at Cr hotspots attributed the dominant speciation of Cr in outer (epidermal and sub-epidermal) cell layers of the root tips and mature root to Cr(III)-FA (fulvic acid-like anions) (58–64%) and Cr(III)-Fh (amorphous ferrihydrite) (83–87%) complexes, respectively. The co-occurrence of a high proportion of Cr(III)-FA species and strong co-location signals of 52Cr16O and 13C14N in the mature root epidermis relative to the sub-epidermis indicated an association of Cr with active root surfaces, where the dissolution of IP and release of their associated Cr are likely subject to the mediation of organic anions. The results of NanoSIMS (poor 52Cr16O and 13C14N signals), dissolution (no IP dissolution) and µ-XANES (64% in sub-epidermis >58% in the epidermis for Cr(III)-FA species) analyses of root tips may be indicative of the possible re-uptake of Cr by this region. The results of this research work highlight the significance of IP and organic anions in rice root systems on the bioavailability and dynamics of heavy metals (e.g. Cr).

Sustainable high-yield lignocellulosic fibers and modification technologies educing softness and strength for tissues and hygiene products for global health

Unbleached hardwood kraft pulp was treated with a non-ionic surfactant to decrease the concentration of a hydration shell by dislodging hard-to-remove water through a targeted reduction in surface tension. Energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectrometry techniques were used to investigate and evaluate these fiber-surfactant interactions. Scanning electron microscopeimages were taken to observe the change in the morphology from the surfactant treatment. The surface tension was measured by using pendant drop tests, which reduced from 71.46 mN/m to ∼ 49–51 mN/m for different pretreatment techniques and hence, reduced the pulling force exerted by the liquid bridge water on the fibers by 28–31%. This consequently led to reduced fiber collapse, and the surfactant-treated fibers showed higher bulk and softness without a concomitant sacrifice of mechanical properties. The scanning electron microscopeimages confirmed a more cylindrical fiber structure and showed an unaffected fiber–fiber interaction because of which the tensile strength was not compromised with the increase of bulk. The surfactant-treated fibers showed better recovery or spring back, i.e. a return to their original form after compression relative to the untreated fibers. Therefore, it was possible to make tissue papers with higher bulk, softer hand-feel, and a higher absorbing capacity, without reducing the tensile strength by simple and green processes involving chemical and mechanical modifications.

Comparison of AMS, TIMS, and SIMS techniques for determining uranium isotope ratios in individual particles.

The determination of isotope ratios in individual uranium particles is very important for nuclear safeguards. In this work, accelerator mass spectrometry (AMS), thermal ionization mass spectrometry (TIMS), and secondary ion mass spectrometry (SIMS) were applied to isotope ratio analysis of individual uranium particles and compared in terms of background, measurement accuracy, and efficiency. Several individual uranium particles (1-7μm) from certified reference materials were used as samples. The results show that the average values of blank counting rate of 235 U for AMS, FT-TIMS (FT: fission track), SEM-TIMS (SEM: scanning electron microscope), and SIMS were 7.3, 7.8, 2.7 and 2.2cps, respectively. The relative error of 234 U/235 U and 234 U/236 U isotope ratios of the particles from U200 for AMS were within 10% and 20%, whereas the results of FT-TIMS and SIMS were within 5% and 10%, respectively. The relative error and external precision of 234 U/238 U and 235 U/238 U of the particles from U850 for the method of AMS, SEM-TIMS, and SIMS were within 10% and 5%, respectively. For 236 U/238 U, the average values of the relative error and external precision measured by AMS were within 5%, which measured by SEM-TIMS and SIMS were all within 10%. AMS has advantages in measuring 236 U/238 U. The measurement time of AMS and SEM-TIMS was shorter than that of FT-TIMS and longer than that of SIMS. It is considered that AMS and SEM-TIMS have a certain development prospect, and it is necessary to research deeply.

Chemical Imaging of Organic Materials by MeV SIMS Using a Continuous Collimated Ion Beam

MeV SIMS is a type of secondary ion mass spectrometry (SIMS) technique where molecules are desorbed from the sample surface with ions of MeV energies. In this work, we present a novel system for molecular imaging of organic materials using a continuous analytical beam and a start trigger for timing based on the detection of secondary electrons. The sample is imaged by a collimated primary ion beam and scanning of the target with a lateral resolution of ∼20 μm. The mass of the analyzed molecules is determined with a reflectron-type time-of-flight (TOF) analyzer, where the START signal for the TOF measurement is generated by the secondary electrons emitted from a thin carbon foil (∼5 nm) placed over the beam collimator. With this new configuration of the MeV SIMS setup, a primary ion beam with the highest possible electronic stopping can be used (i.e., highest secondary molecular yield), and samples of any thickness can be analyzed. Since the electrons are collected from the thin foil rather than from the sample surface, the detection efficiency of secondary electrons is always the same for any type of analyzed material. Due to the ability to scan the samples by a piezo stage, samples of a few cm in surface size can be imaged. The imaging capabilities of MeV SIMS are demonstrated on crossing ink lines deposited on paper, a thin section of a mouse brain, and a fingerprint deposited on a thick Si wafer to show the potential application of the presented technique for analytical purposes in biology and forensic science.

Synthesis, photoluminescence, Judd-Ofelt analysis, and thermal stability studies of Dy3+-doped BaLa2ZnO5 phosphors for solid-state lighting applications.

Here, we report a series of white-emitting Ba(La2-x Dy x )ZnO5 (x = 0-7 mol%) phosphors synthesized via a high-temperature solid-state reaction. The synthesized phosphor's phase purity and tetragonal crystal structure were confirmed by an X-ray powder diffraction (XRPD) pattern. The wide bandgap characteristic feature was assessed through reflectance spectra, and the estimated bandgap was found to be 4.70 eV. Besides analyzing the effect of doping on the surface morphology, the distribution of ions on the surface was observed through the secondary ion mass spectroscopy technique. The synthesized phosphor was found to display bluish (486 nm) and yellowish (576 nm) bands in the emission spectra under the excitation of 325 nm and 352 nm, which together are responsible for producing the white luminescence. The analysis of Judd-Ofelt parameters indicates the symmetric nature of Dy3+ substitution in the present host. The thermal stability of the phosphor was assessed by varying the temperature up to 403 K, and it was found that the synthesized phosphor possesses improved thermal stability with an activation energy of 0.29 eV. The photometric evaluations of the present phosphor revealed the CIE coordinates around the near-white regime (0.3448, 0.3836), along with the color-correlated temperature value of 5102 K. All research on this luminescent material's unique features points to the possibility of using it to fabricate white-light-emitting devices for solid-state lighting applications.

Study of ruthenium film grown in oxygen environment for x-ray optics application

Ru shows high damage threshold as compared to other standard materials Au, Rh and Pt for high heat load applications in high brilliance synchrotron radiation source and x-ray free electron laser. It is also a promising candidate to be used as a protective capping layer in multilayers for increasing their life time. In the present study, Ru thin films of 500Å thickness were deposited in oxygen environment at different substrate temperatures varying from 70°C to 500°C. In reactive ion beam sputtering process, the flow of Ar and reactive O2 gas was maintained in 4:1 ratio keeping total flow 3 SCCM constant. The deposited films were characterized using grazing incidence x-ray reflectivity (GIXRR), grazing incidence x-ray diffraction (GIXRD) and secondary ion mass spectroscopy (SIMS) techniques. A significant change in GIXRR profile was observed in the sample grown at 100°C and 500°C whereas the GIXRD measurements indicated no significant formation of ruthenium oxide at different temperatures. However, a strong peak of Ru2Si3 (222) at 500°C was observed indicating a strong interfacial reaction at ruthenium/ substrate interface.The experimental data suggested a weak signature of RuO2 phase in the films deposited at RT, 70°C and 100°C and therefore the effect of ruthenium oxide with 10% composition in pure ruthenium was calculated on optical performance in extreme ultra violet region of photon energy (85-115 eV).